JPS61115918U - - Google Patents

Info

Publication number
JPS61115918U
JPS61115918U JP19817384U JP19817384U JPS61115918U JP S61115918 U JPS61115918 U JP S61115918U JP 19817384 U JP19817384 U JP 19817384U JP 19817384 U JP19817384 U JP 19817384U JP S61115918 U JPS61115918 U JP S61115918U
Authority
JP
Japan
Prior art keywords
thermal mass
mass flow
flow rate
sensor unit
flow controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19817384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19817384U priority Critical patent/JPS61115918U/ja
Publication of JPS61115918U publication Critical patent/JPS61115918U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP19817384U 1984-12-31 1984-12-31 Pending JPS61115918U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19817384U JPS61115918U (2) 1984-12-31 1984-12-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19817384U JPS61115918U (2) 1984-12-31 1984-12-31

Publications (1)

Publication Number Publication Date
JPS61115918U true JPS61115918U (2) 1986-07-22

Family

ID=30756939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19817384U Pending JPS61115918U (2) 1984-12-31 1984-12-31

Country Status (1)

Country Link
JP (1) JPS61115918U (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005514613A (ja) * 2001-12-21 2005-05-19 エムケーエス インスツルメント，インコーポレーテッド 質量流量制御装置の熱管理のための装置及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162415A (ja) * 1983-02-16 1984-09-13 エマ−ソン・エレクトリツク・カンパニ− 熱的質量流量計

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162415A (ja) * 1983-02-16 1984-09-13 エマ−ソン・エレクトリツク・カンパニ− 熱的質量流量計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005514613A (ja) * 2001-12-21 2005-05-19 エムケーエス インスツルメント，インコーポレーテッド 質量流量制御装置の熱管理のための装置及び方法

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