JPS6111708A - 端面レンズ付チヤネル光導波路およびその製造方法 - Google Patents

端面レンズ付チヤネル光導波路およびその製造方法

Info

Publication number
JPS6111708A
JPS6111708A JP13186684A JP13186684A JPS6111708A JP S6111708 A JPS6111708 A JP S6111708A JP 13186684 A JP13186684 A JP 13186684A JP 13186684 A JP13186684 A JP 13186684A JP S6111708 A JPS6111708 A JP S6111708A
Authority
JP
Japan
Prior art keywords
optical waveguide
waveguide
silicon substrate
lens
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13186684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0531124B2 (de
Inventor
Yasubumi Yamada
泰文 山田
Masao Kawachi
河内　正夫
Mitsuho Yasu
安　光保
Morio Kobayashi
盛男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13186684A priority Critical patent/JPS6111708A/ja
Publication of JPS6111708A publication Critical patent/JPS6111708A/ja
Publication of JPH0531124B2 publication Critical patent/JPH0531124B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2552—Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma & Fusion (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
JP13186684A 1984-06-28 1984-06-28 端面レンズ付チヤネル光導波路およびその製造方法 Granted JPS6111708A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13186684A JPS6111708A (ja) 1984-06-28 1984-06-28 端面レンズ付チヤネル光導波路およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13186684A JPS6111708A (ja) 1984-06-28 1984-06-28 端面レンズ付チヤネル光導波路およびその製造方法

Publications (2)

Publication Number Publication Date
JPS6111708A true JPS6111708A (ja) 1986-01-20
JPH0531124B2 JPH0531124B2 (de) 1993-05-11

Family

ID=15067957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13186684A Granted JPS6111708A (ja) 1984-06-28 1984-06-28 端面レンズ付チヤネル光導波路およびその製造方法

Country Status (1)

Country Link
JP (1) JPS6111708A (de)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321610A (ja) * 1986-07-15 1988-01-29 Fujitsu Ltd 光導波路デバイスの形成方法
JPS6365405A (ja) * 1986-09-05 1988-03-24 Fujitsu Ltd 光導波路
JPH0491311U (de) * 1990-12-27 1992-08-10
US5387269A (en) * 1993-09-03 1995-02-07 At&T Bell Laboratories Methods for making planar waveguides with removal of a sacrifical member which surrounds the core
JPH09166728A (ja) * 1995-12-15 1997-06-24 Nec Corp 光導波路デバイスとその製造方法
EP0981168A3 (de) * 1998-08-18 2000-07-19 TRW Inc. Mikro-optische Halbleiterbauelemente und Herstellungsverfahren
WO2002093203A3 (en) * 2001-05-17 2003-05-01 Optronx Inc Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US6611636B2 (en) 2001-05-17 2003-08-26 Optronx, Inc. Hybrid active electronic and optical Fabry Perot cavity
US6625348B2 (en) 2001-05-17 2003-09-23 Optron X, Inc. Programmable delay generator apparatus and associated method
US6654511B2 (en) 2001-05-17 2003-11-25 Sioptical, Inc. Optical modulator apparatus and associated method
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51129248A (en) * 1975-05-02 1976-11-10 Sony Corp Optical waveguide
JPS53102047A (en) * 1977-02-18 1978-09-06 Hitachi Ltd Treating method of optical fiber end face
JPS5611925A (en) * 1979-07-10 1981-02-05 Sumitomo Chem Co Ltd Production of polyester with high molecular weight
JPS57186710A (en) * 1981-05-14 1982-11-17 Toshiba Corp Optical circuit substrate and its manufacture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51129248A (en) * 1975-05-02 1976-11-10 Sony Corp Optical waveguide
JPS53102047A (en) * 1977-02-18 1978-09-06 Hitachi Ltd Treating method of optical fiber end face
JPS5611925A (en) * 1979-07-10 1981-02-05 Sumitomo Chem Co Ltd Production of polyester with high molecular weight
JPS57186710A (en) * 1981-05-14 1982-11-17 Toshiba Corp Optical circuit substrate and its manufacture

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321610A (ja) * 1986-07-15 1988-01-29 Fujitsu Ltd 光導波路デバイスの形成方法
JPS6365405A (ja) * 1986-09-05 1988-03-24 Fujitsu Ltd 光導波路
JPH0491311U (de) * 1990-12-27 1992-08-10
US5387269A (en) * 1993-09-03 1995-02-07 At&T Bell Laboratories Methods for making planar waveguides with removal of a sacrifical member which surrounds the core
JPH09166728A (ja) * 1995-12-15 1997-06-24 Nec Corp 光導波路デバイスとその製造方法
EP0981168A3 (de) * 1998-08-18 2000-07-19 TRW Inc. Mikro-optische Halbleiterbauelemente und Herstellungsverfahren
WO2002093203A3 (en) * 2001-05-17 2003-05-01 Optronx Inc Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US6611636B2 (en) 2001-05-17 2003-08-26 Optronx, Inc. Hybrid active electronic and optical Fabry Perot cavity
US6625348B2 (en) 2001-05-17 2003-09-23 Optron X, Inc. Programmable delay generator apparatus and associated method
US6654511B2 (en) 2001-05-17 2003-11-25 Sioptical, Inc. Optical modulator apparatus and associated method
US6671443B2 (en) 2001-05-17 2003-12-30 Sioptical, Inc. Shallow photonic bandgap device
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6823112B2 (en) 2001-05-17 2004-11-23 Sioptical, Inc. Hybrid multiplexer/demultiplexer
US6826320B2 (en) 2001-05-17 2004-11-30 Sioptical, Inc. Focusing mirror and lens
US6869881B2 (en) 2001-05-17 2005-03-22 Sioptical, Inc. Method for forming passive optical coupling device
US6895136B2 (en) 2001-05-17 2005-05-17 Sioptical, Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
EP1402564A4 (de) * 2001-05-17 2005-06-29 Optronx Inc Integrierte optische/elektronische schaltungen und zugeordnete verfahren zur gleichzeitigen erzeugung dieser
US6947615B2 (en) 2001-05-17 2005-09-20 Sioptical, Inc. Optical lens apparatus and associated method
US7409327B2 (en) 2001-05-17 2008-08-05 Sioptical Inc. Simulation program for integrated optical/electronic circuit

Also Published As

Publication number Publication date
JPH0531124B2 (de) 1993-05-11

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