JPS6112077U - Ｉｃ試験装置のｉｃ素子案内加熱体 - Google Patents

Ｉｃ試験装置のｉｃ素子案内加熱体

Info

Publication number
JPS6112077U
JPS6112077U JP9758184U JP9758184U JPS6112077U JP S6112077 U JPS6112077 U JP S6112077U JP 9758184 U JP9758184 U JP 9758184U JP 9758184 U JP9758184 U JP 9758184U JP S6112077 U JPS6112077 U JP S6112077U
Authority
JP
Japan
Prior art keywords
heat
thermal conductivity
heater
heating body
guide body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9758184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS64617Y2 (de
Inventor
公平 佐藤
徳幸 五十嵐
真一 幸谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP9758184U priority Critical patent/JPS6112077U/ja
Priority to US06/747,560 priority patent/US4691831A/en
Priority to DE8585107793T priority patent/DE3582752D1/de
Priority to EP85107793A priority patent/EP0166409B1/de
Publication of JPS6112077U publication Critical patent/JPS6112077U/ja
Application granted granted Critical
Publication of JPS64617Y2 publication Critical patent/JPS64617Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9758184U 1984-06-25 1984-06-27 Ｉｃ試験装置のｉｃ素子案内加熱体 Granted JPS6112077U (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9758184U JPS6112077U (ja) 1984-06-27 1984-06-27 Ｉｃ試験装置のｉｃ素子案内加熱体
US06/747,560 US4691831A (en) 1984-06-25 1985-06-21 IC test equipment
DE8585107793T DE3582752D1 (de) 1984-06-25 1985-06-24 Testeinrichtung fuer integrierte schaltungen.
EP85107793A EP0166409B1 (de) 1984-06-25 1985-06-24 Testeinrichtung für integrierte Schaltungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9758184U JPS6112077U (ja) 1984-06-27 1984-06-27 Ｉｃ試験装置のｉｃ素子案内加熱体

Publications (2)

Publication Number Publication Date
JPS6112077U true JPS6112077U (ja) 1986-01-24
JPS64617Y2 JPS64617Y2 (de) 1989-01-09

Family

ID=30657137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9758184U Granted JPS6112077U (ja) 1984-06-25 1984-06-27 Ｉｃ試験装置のｉｃ素子案内加熱体

Country Status (1)

Country Link
JP (1) JPS6112077U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001316502A (ja) * 2000-04-28 2001-11-16 Jsr Corp 伝熱性シートおよびそれを用いた加熱構造、放熱構造、電気的検査方法および装置。

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001316502A (ja) * 2000-04-28 2001-11-16 Jsr Corp 伝熱性シートおよびそれを用いた加熱構造、放熱構造、電気的検査方法および装置。

Also Published As

Publication number Publication date
JPS64617Y2 (de) 1989-01-09

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