JPS61122495U - - Google Patents
Info
- Publication number
- JPS61122495U JPS61122495U JP504385U JP504385U JPS61122495U JP S61122495 U JPS61122495 U JP S61122495U JP 504385 U JP504385 U JP 504385U JP 504385 U JP504385 U JP 504385U JP S61122495 U JPS61122495 U JP S61122495U
- Authority
- JP
- Japan
- Prior art keywords
- air
- piping
- float
- specific weight
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000013022 venting Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP504385U JPS61122495U (cs) | 1985-01-18 | 1985-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP504385U JPS61122495U (cs) | 1985-01-18 | 1985-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61122495U true JPS61122495U (cs) | 1986-08-01 |
Family
ID=30481194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP504385U Pending JPS61122495U (cs) | 1985-01-18 | 1985-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61122495U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015066514A (ja) * | 2013-09-30 | 2015-04-13 | 東京エレクトロン株式会社 | 基板処理システム |
-
1985
- 1985-01-18 JP JP504385U patent/JPS61122495U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015066514A (ja) * | 2013-09-30 | 2015-04-13 | 東京エレクトロン株式会社 | 基板処理システム |
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