JPS61123189A - Electrode for gas laser - Google Patents

Abstract

PURPOSE:To reduce the cost of electrodes having fixed resistance while simplify ing and facilitating mounting and dismantling, and to rationalize man-hours by severally constituting split electrodes in integral substances into which ballast resistors are incorporated. CONSTITUTION:The original end 13 of a cathode 1 is extended up to a hollow section in a cylindrical high-tesion insulator 11, the nose 19 of a potential trasmitting terminal 17 is fitted while facing the original end 13, and a resistor 23 is arranged between both the original end 13 and the nose 19, and connected by a conductive sealing material 25. A metallic ring 21 is fixed to the terminal 17 through brazing, etc. through a seal ring at the upper end of the insulator 11. The split electrodes can be treated as an integral substace into which a ballast resistor is incorporated, thus simply mounting and dismantiling and exchanging compact electrodes having a stable resistance value easily.

Description

[Detailed Description of the Invention] a. Field of Industrial Application The present invention relates to an electrode for a gas laser, and more specifically to a high-voltage electrode in which the base end of a discharge electrode and the tip of a potential transmission terminal are arranged opposite to each other in a hollow part. A gas laser characterized in that an insulating cylindrical body is provided, a desired electrical resistor is provided in the middle of the opposing arrangement, and a fusion connection portion of a conductive sealing material is provided between the opposing end and both ends of the electrical resistor. It is related to electrodes.

b. Prior Art The prior art will be explained below with reference to FIG.

For example, the cathode 1 shown in FIG. 2 is composed of a large number of divided electrodes, each of which is provided opposite to one anode 7 shown in the shape of a round bar, with a ballast resistor 5 interposed on the side of each power supply equipment 3. be.

The cathode 1 and the anode 7 are provided in a laser gas chamber 9, and a gas such as helium, nitrogen, or carbon dioxide gas circulates around both electrodes, and a gas laser is oscillated by the discharge between the two electrodes.

Conventionally, a ballast resistor 5 is provided in each divided electrode, such as the cathode 1 in the example of FIG. 2, and the ballast resistor 5 and the divided electrode (cathode 1 in the example of FIG. 2) are connected in the laser gas chamber 9. It was connected.

C0 Problems to be Solved by the Invention As is already clear from the above explanation, if the electrode and the ballast resistor 5 are separate, the number of steps required for attachment and detachment will be large, and it will be necessary to There were disadvantages such as discharge variation and high cost.

Means for Solving the d0 Problem According to the present invention, in view of the above-mentioned disadvantages, the divided electrodes are individually formed into an integral body with a built-in last resistor.

01 function Thus, since a large number of divided electrodes are integrated into each part with a built-in ballast resistor, electrodes of constant resistance can be obtained at low cost, and attachment and detachment can be easily performed, and the number of man-hours can be rationalized.

t, Embodiment The electrode according to the embodiment of the present invention shown in FIG.
is provided extending to the hollow part 15 of the cylindrical high voltage insulator 11.

One tip of a potential transmission terminal 17 is provided in the hollow part 15 facing the base fa13 of the cathode 1, and the high voltage insulator 1
1, a metal ring 21 is attached to the potential transmission terminal 17 by brazing or the like via a seal ring (not shown). - A resistor 23 made of tin dioxide or carbon is arranged between the base end 13 of the cathode 1 and the tip 19 of the potential transmission terminal 17, which are provided facing the hollow part 15, and this resistor 23 is placed inside. For example, the opposing ends and the tip are fused and connected with a conductive sealing material 25 such as a mixture of copper powder and glass powder.

Q8 Effects of the invention In the electrodes according to the embodiments of the invention described in detail above, each of the divided electrodes is assembled as an integrated body with a built-in ballast resistor.
Because it can be handled easily, it has become possible to easily attach and detach compact electrodes with stable resistance values.

Thus, i! for gas lasers embodies the technical idea of the present invention. The electrode overcomes the disadvantages of conventional split electrodes and has been able to create a compact, easy-to-attach, low-cost electrode with a stable resistance value.

In addition, in the embodiment, an example in which the divided electrode is a cathode has been explained, but it is natural that the same applies to the case where the divided electrode is an anode, and other design changes can be made without departing from the technical idea of the present invention. It is also clear that there is.

[Brief explanation of the drawing]

FIG. 1 is an elevational view and a half longitudinal sectional view of an electrode according to an embodiment of the present invention. FIG. 2 is an explanatory diagram showing a conventional electrode. (Explanation of symbols representing main parts of the drawing) 1... Cathode 7... Anode 11... High voltage insulator 17... Potential transmission terminal 23
...Resistor 25...Conductive sealing material Fig. 1 Fig. 2

Claims (1)

[Claims] A high voltage insulating cylindrical body is provided in which the base end of the discharge electrode and the tip of the potential transmission terminal are arranged opposite to each other in a hollow part, a desired electrical resistor is provided in the middle of the opposed arrangement, and the opposing end and the electrical resistor are provided. An electrode for a gas laser, characterized in that a fusion connection part of a conductive sealing material is provided between both ends of the electrode.