JPS61125171U - - Google Patents
Info
- Publication number
- JPS61125171U JPS61125171U JP15467584U JP15467584U JPS61125171U JP S61125171 U JPS61125171 U JP S61125171U JP 15467584 U JP15467584 U JP 15467584U JP 15467584 U JP15467584 U JP 15467584U JP S61125171 U JPS61125171 U JP S61125171U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- shield
- vacuum
- window
- window member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (2) | 1984-10-13 | 1984-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (2) | 1984-10-13 | 1984-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125171U true JPS61125171U (2) | 1986-08-06 |
| JPH0226937Y2 JPH0226937Y2 (2) | 1990-07-20 |
Family
ID=30712667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15467584U Expired JPH0226937Y2 (2) | 1984-10-13 | 1984-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226937Y2 (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490423B1 (ko) * | 2008-02-15 | 2015-02-09 | 엘아이지에이디피 주식회사 | 플라즈마 처리장치 및 그에 구비되는 뷰 포트 |
-
1984
- 1984-10-13 JP JP15467584U patent/JPH0226937Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490423B1 (ko) * | 2008-02-15 | 2015-02-09 | 엘아이지에이디피 주식회사 | 플라즈마 처리장치 및 그에 구비되는 뷰 포트 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226937Y2 (2) | 1990-07-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61125171U (2) | ||
| USD262032S (en) | Outer casing for planetary gear assembly | |
| JPS6154556U (2) | ||
| JPH0413049U (2) | ||
| JPH01103827U (2) | ||
| JPS62123756U (2) | ||
| JPS63167167U (2) | ||
| JPH0334060U (2) | ||
| JPH0246880U (2) | ||
| JPH0322858U (2) | ||
| JPS63118938U (2) | ||
| JPH0173293U (2) | ||
| JPS62140266U (2) | ||
| JPH03127223U (2) | ||
| JPH042001U (2) | ||
| JPS62177261U (2) | ||
| JPS61123508U (2) | ||
| JPS6345520U (2) | ||
| JPS6416157U (2) | ||
| JPH02118823U (2) | ||
| JPH03103195U (2) | ||
| JPS6180472U (2) | ||
| JPS63201545U (2) | ||
| JPH03117163U (2) | ||
| JPS6363063U (2) |