JPS61134036U - - Google Patents
Info
- Publication number
- JPS61134036U JPS61134036U JP1746985U JP1746985U JPS61134036U JP S61134036 U JPS61134036 U JP S61134036U JP 1746985 U JP1746985 U JP 1746985U JP 1746985 U JP1746985 U JP 1746985U JP S61134036 U JPS61134036 U JP S61134036U
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- measured
- image
- probe
- display unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1746985U JPH0225235Y2 (2) | 1985-02-08 | 1985-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1746985U JPH0225235Y2 (2) | 1985-02-08 | 1985-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61134036U true JPS61134036U (2) | 1986-08-21 |
| JPH0225235Y2 JPH0225235Y2 (2) | 1990-07-11 |
Family
ID=30505200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1746985U Expired JPH0225235Y2 (2) | 1985-02-08 | 1985-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225235Y2 (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6435928A (en) * | 1987-07-30 | 1989-02-07 | Tokyo Electron Ltd | Semiconductor inspection device |
-
1985
- 1985-02-08 JP JP1746985U patent/JPH0225235Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6435928A (en) * | 1987-07-30 | 1989-02-07 | Tokyo Electron Ltd | Semiconductor inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0225235Y2 (2) | 1990-07-11 |
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