JPS61135538U - - Google Patents
Info
- Publication number
- JPS61135538U JPS61135538U JP1782985U JP1782985U JPS61135538U JP S61135538 U JPS61135538 U JP S61135538U JP 1782985 U JP1782985 U JP 1782985U JP 1782985 U JP1782985 U JP 1782985U JP S61135538 U JPS61135538 U JP S61135538U
- Authority
- JP
- Japan
- Prior art keywords
- insulated
- plasma processing
- low
- metal plate
- temperature plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782985U JPS61135538U (pl) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1782985U JPS61135538U (pl) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61135538U true JPS61135538U (pl) | 1986-08-23 |
Family
ID=30505900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1782985U Pending JPS61135538U (pl) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61135538U (pl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887825A (ja) * | 1981-11-20 | 1983-05-25 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
-
1985
- 1985-02-13 JP JP1782985U patent/JPS61135538U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887825A (ja) * | 1981-11-20 | 1983-05-25 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
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