JPS61136536U - - Google Patents
Info
- Publication number
- JPS61136536U JPS61136536U JP1875185U JP1875185U JPS61136536U JP S61136536 U JPS61136536 U JP S61136536U JP 1875185 U JP1875185 U JP 1875185U JP 1875185 U JP1875185 U JP 1875185U JP S61136536 U JPS61136536 U JP S61136536U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- gas
- substrate
- gas outlet
- rotating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 239000000470 constituent Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1875185U JPS61136536U (2) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1875185U JPS61136536U (2) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136536U true JPS61136536U (2) | 1986-08-25 |
Family
ID=30507678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1875185U Pending JPS61136536U (2) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136536U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009158767A (ja) * | 2007-12-27 | 2009-07-16 | Tokyo Electron Ltd | 回転塗布装置 |
-
1985
- 1985-02-13 JP JP1875185U patent/JPS61136536U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009158767A (ja) * | 2007-12-27 | 2009-07-16 | Tokyo Electron Ltd | 回転塗布装置 |
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