JPS61142442U - - Google Patents
Info
- Publication number
- JPS61142442U JPS61142442U JP17040284U JP17040284U JPS61142442U JP S61142442 U JPS61142442 U JP S61142442U JP 17040284 U JP17040284 U JP 17040284U JP 17040284 U JP17040284 U JP 17040284U JP S61142442 U JPS61142442 U JP S61142442U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing apparatus
- rotary chuck
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 39
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Structure Of Belt Conveyors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17040284U JPS61142442U (mo) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17040284U JPS61142442U (mo) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142442U true JPS61142442U (mo) | 1986-09-03 |
Family
ID=30728110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17040284U Pending JPS61142442U (mo) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142442U (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142817A (ja) * | 1986-12-05 | 1988-06-15 | Tokyo Electron Ltd | 基板の処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS626691U (mo) * | 1985-06-26 | 1987-01-16 |
-
1984
- 1984-11-12 JP JP17040284U patent/JPS61142442U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS626691U (mo) * | 1985-06-26 | 1987-01-16 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142817A (ja) * | 1986-12-05 | 1988-06-15 | Tokyo Electron Ltd | 基板の処理装置 |
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