JPS61142451U - - Google Patents
Info
- Publication number
- JPS61142451U JPS61142451U JP2666485U JP2666485U JPS61142451U JP S61142451 U JPS61142451 U JP S61142451U JP 2666485 U JP2666485 U JP 2666485U JP 2666485 U JP2666485 U JP 2666485U JP S61142451 U JPS61142451 U JP S61142451U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- lifting plate
- mounting table
- holding groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2666485U JPS61142451U (2) | 1985-02-26 | 1985-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2666485U JPS61142451U (2) | 1985-02-26 | 1985-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142451U true JPS61142451U (2) | 1986-09-03 |
Family
ID=30522886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2666485U Pending JPS61142451U (2) | 1985-02-26 | 1985-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142451U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009073544A (ja) * | 2007-09-22 | 2009-04-09 | Konica Minolta Opto Inc | 基板取り出し治具及び記録媒体用ガラス基板の製造方法 |
-
1985
- 1985-02-26 JP JP2666485U patent/JPS61142451U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009073544A (ja) * | 2007-09-22 | 2009-04-09 | Konica Minolta Opto Inc | 基板取り出し治具及び記録媒体用ガラス基板の製造方法 |
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