JPS61147276U - - Google Patents
Info
- Publication number
- JPS61147276U JPS61147276U JP2915285U JP2915285U JPS61147276U JP S61147276 U JPS61147276 U JP S61147276U JP 2915285 U JP2915285 U JP 2915285U JP 2915285 U JP2915285 U JP 2915285U JP S61147276 U JPS61147276 U JP S61147276U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- chamber
- sample
- resist stripping
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000000992 sputter etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915285U JPS61147276U (fr) | 1985-02-27 | 1985-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2915285U JPS61147276U (fr) | 1985-02-27 | 1985-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61147276U true JPS61147276U (fr) | 1986-09-11 |
Family
ID=30527703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2915285U Pending JPS61147276U (fr) | 1985-02-27 | 1985-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147276U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5713743A (en) * | 1980-06-30 | 1982-01-23 | Toshiba Corp | Plasma etching apparatus and etching method |
-
1985
- 1985-02-27 JP JP2915285U patent/JPS61147276U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5713743A (en) * | 1980-06-30 | 1982-01-23 | Toshiba Corp | Plasma etching apparatus and etching method |
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