JPS6114873B2 - - Google Patents

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Publication number
JPS6114873B2
JPS6114873B2 JP6388278A JP6388278A JPS6114873B2 JP S6114873 B2 JPS6114873 B2 JP S6114873B2 JP 6388278 A JP6388278 A JP 6388278A JP 6388278 A JP6388278 A JP 6388278A JP S6114873 B2 JPS6114873 B2 JP S6114873B2
Authority
JP
Japan
Prior art keywords
adhesive
stamp
stamping
stamp tool
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6388278A
Other languages
Japanese (ja)
Other versions
JPS54155235A (en
Inventor
Akira Yamada
Tadashi Arai
Shigeru Kato
Tadao Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6388278A priority Critical patent/JPS54155235A/en
Publication of JPS54155235A publication Critical patent/JPS54155235A/en
Publication of JPS6114873B2 publication Critical patent/JPS6114873B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 この発明は半導体素子等をパツケージ等に接着
する際の接着剤をスタンピングにより塗布するの
に好適な接着剤塗布装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an adhesive coating device suitable for applying adhesive by stamping when bonding a semiconductor element or the like to a package or the like.

一般に接着剤のスタンピングは、スタンプツー
ルを素子(被固着材)の形状に対応させた任意の
形状に適合させることが出来、スタンプ(押印)
により取着された接着剤の膜厚も比較的安定で、
かつ均一である。スタンピングは接着剤溜の接着
剤層へスタンプツールを上方より押着し、スタン
プツールのスタンプ面に接着剤を付着させた状態
で引上げ、素子を固着するパツケージ面上にスタ
ンプ面を押印して接着剤を前記パツケージ面に取
着するという一連の動作で行われる。ところが、
このスタンピングには接着剤の糸引き現象、即ち
接着剤層にスタンプツールを押着した後に引上げ
る際と、パツケージ面に押印した後に引上げる際
にスタンプツールのスタンプ面と接着剤層及びパ
ツケージ面に取着された接着剤との間をつなぐ糸
状の接着剤が生じる現象が生じることが知られて
いる。この糸引き現象が素子のマウント製造工程
に与える影響には次のものがある。○イスタンピン
グ領域外に接着剤がはみ出して、後工程でのパツ
ケージのシーリング等の不良原因となる。○ロ糸引
き部に比較的多量の接着剤が集中し、均一なるス
タンプ膜厚が得られない。○ハ装置外部周辺を汚染
する。○ニ接着剤の消耗量が多く、非経済的であ
る。
In general, when stamping adhesives, the stamp tool can be adapted to any shape that corresponds to the shape of the element (material to be adhered).
The film thickness of the adhesive attached is also relatively stable,
and uniform. For stamping, press the stamp tool against the adhesive layer in the adhesive reservoir from above, pull up the stamp tool with the adhesive adhered to the stamp surface, and stamp the stamp surface on the package surface to which the element is fixed and bond it. This is done in a series of steps to attach the agent to the package surface. However,
This stamping is caused by the stringing phenomenon of the adhesive, that is, when the stamp tool is pressed onto the adhesive layer and then pulled up, and when the stamp tool is pulled up after being stamped on the package surface, the stamp surface of the stamp tool and the adhesive layer and package surface are It is known that a phenomenon occurs in which thread-like adhesive is formed to connect the adhesive attached to the material. The effects of this stringing phenomenon on the device mount manufacturing process are as follows. ○ Adhesive may protrude outside the stamping area, causing defects in package sealing in subsequent processes. ○B A relatively large amount of adhesive concentrates on the threaded part, making it impossible to obtain a uniform stamp film thickness. ○C Contaminate the outside of the device. ○D. A large amount of adhesive is consumed, making it uneconomical.

従つて、スタンピングを量産プロセスに導入
し、適合させるためには、この接着剤の糸引き現
象を防止するか、又は糸状の接着剤を洗浄す
る等の対策が必要であるが、の方法は製造機械
の構造を複雑にし、かつ素子の信頼性を低下させ
る要因となる。そのための糸引き現象が生じる
こと自体を防止することが望ましい。
Therefore, in order to introduce and adapt stamping to the mass production process, it is necessary to take measures such as preventing this adhesive stringing phenomenon or cleaning the thread-like adhesive. This becomes a factor that complicates the structure of the machine and reduces the reliability of the device. It is desirable to prevent the stringy phenomenon itself from occurring.

糸引き現象の原因はスタンピングに用いる接着
剤の粘度特性とスタンプツールの構造に問題があ
ると思われる。そこで第1図に示すような従来方
式の一般のスタンプツール1を用いてスタンピン
グした場合のスタンピング状態を実験の結果を含
めて考察すると、第2図に示すように糸引き現象
はスタンピング動作を被接着剤塗布面26に対し
て順次行つていく段階に於いて、角柱状にスタン
プツール1の側壁面22へ接着剤23がはい上り
側壁面22周囲の一部23へ集中して付着し、こ
の付着蓄積された接着剤部分より発生する傾向に
あることがわかつた。第2図に示す接着剤の糸引
き現象は従来のスタンプツールを用いたスタンピ
ングに於いて、その動作回数200回後のものであ
る。これは糸引き現象25が特に多く現われた例
であり、このスタンピングを量産用に適用するこ
とは前述の糸引き現象が他に及ぼす影響を考慮す
ると不可である。
The cause of the stringing phenomenon appears to be problems with the viscosity characteristics of the adhesive used for stamping and the structure of the stamp tool. Therefore, when we consider the stamping state when stamping is performed using a conventional general stamp tool 1 as shown in Fig. 1, including the results of experiments, we find that the stringing phenomenon is affected by the stamping operation as shown in Fig. 2. In the step of sequentially applying the adhesive to the adhesive application surface 26, the adhesive 23 crawls up to the side wall surface 22 of the stamp tool 1 in a prismatic shape and adheres to a part 23 around the side wall surface 22 in a concentrated manner. It has been found that this tends to occur from adhesive parts that have been deposited and accumulated. The adhesive stringing phenomenon shown in FIG. 2 occurs after 200 stamping operations using a conventional stamp tool. This is an example in which the stringing phenomenon 25 appears particularly frequently, and it is impossible to apply this stamping to mass production in consideration of the effects of the stringing phenomenon described above on other products.

本発明は上記点に鑑みなされたもので、比較的
粘度の高いエポキシ系接着剤を用いたスタンピン
グに於いても糸引き現象を軽減することが可能と
なり、それによつて従来接着剤の粘度特性によ
り適用接着剤の制限範囲が狭く限定されていたが
この範囲を拡大する事が可能になり、さらに被
固着材の固着面に適合したスタンプエリアと均一
なるスタンプ膜厚を効率良く得ることが出来る接
着剤塗布装置を提供するものである。
The present invention was developed in view of the above points, and it is possible to reduce the stringing phenomenon even in stamping using a relatively high viscosity epoxy adhesive, thereby reducing the viscosity characteristics of conventional adhesives. The limited range of applicable adhesives used to be narrow, but now it is possible to expand this range, and in addition, it is possible to efficiently obtain a stamp area that matches the bonding surface of the material to be bonded and a uniform stamp film thickness. The present invention provides a chemical coating device.

次に本発明装置の第1の実施例を第3図を参照
して説明する。
Next, a first embodiment of the device of the present invention will be described with reference to FIG.

同図において30はスタンプ体例えば角柱状ス
タンプツール1であり、このスタンプツール30
の材質としては表面の耐腐食度の大きい例えばア
ルミ系及びSUS系を選定するとよい。このスタン
プツール30にはスタンピング装置のツールホル
ダー43(第4図)に装着されるための支持部例
えば円柱状支持体31が一体に取着され、スタン
プツール30の被接着剤塗布面47との対接面3
3の稜線35及び側壁面32,34表面に弗素系
樹脂等の撥水性被膜の表面被覆処理が施されてい
る。さらに前記対接面33は滑面に加工されてい
る。この滑面は鐘面及び梨地面で、例えば表面粗
さが、好ましくは6S〜0.05Sである。
In the figure, 30 is a stamp body, for example, a prismatic stamp tool 1, and this stamp tool 30
As the material, it is preferable to select aluminum or SUS, which have a high degree of surface corrosion resistance. A support part, for example, a cylindrical support body 31 is integrally attached to this stamp tool 30 to be attached to a tool holder 43 (FIG. 4) of a stamping device, and the stamp tool 30 is connected to the surface 47 of the stamp tool 30 to which the adhesive is applied. Contact surface 3
The ridge line 35 and the side wall surfaces 32 and 34 of No. 3 are coated with a water-repellent coating such as a fluorine-based resin. Further, the contact surface 33 is processed to be a smooth surface. This smooth surface is a bell surface or a matte surface, and preferably has a surface roughness of, for example, 6S to 0.05S.

次に第4図に示すスタンピング装置によるスタ
ンピング動作を説明する。スタンプツール1は装
置42のツールホルダー43に装着する。予め接
着剤は接着剤溜44内に一定の深さに投入してお
く。この接着剤溜44へスタンプツール30の対
接面33を接着剤層45に対して平行に保ち上方
から垂直方向に降下させて一定時間、一定の圧力
でスタンピングして前記対接面33に接着剤45
を付着する。この後、スタンプツール1を垂直方
向に一定の速度で引上げる。次に別の位置で位置
決め固定された被接着剤塗布面であるパツケージ
47の直上位置へ水平に、接着剤45の付着され
たスタンプツール1を移動し、その後に垂直方向
に降下させパツケージ47表面へ一定時間一定の
圧力で押印し、接着剤をパツケージ47面へ取着
する。次に一定の速度でスタンプツール30を垂
直に定位置まで引上げ、さらに水平方向に移動し
接着剤溜44の上方で停止しスタンプリングの1
サイクルを終了する。
Next, the stamping operation by the stamping apparatus shown in FIG. 4 will be explained. The stamp tool 1 is mounted on a tool holder 43 of the device 42. Adhesive is poured into the adhesive reservoir 44 to a certain depth in advance. The contact surface 33 of the stamp tool 30 is held parallel to the adhesive layer 45 and lowered vertically from above into the adhesive reservoir 44, and stamped with a constant pressure for a certain period of time to adhere to the contact surface 33. agent 45
Attach. Thereafter, the stamp tool 1 is pulled up vertically at a constant speed. Next, the stamp tool 1 with the adhesive 45 adhered to it is moved horizontally to a position directly above the package 47, which is the adhesive application surface that is positioned and fixed at another position, and then lowered vertically to the surface of the package 47. The adhesive is attached to the surface of the package 47 by applying a stamp with a constant pressure for a certain period of time. Next, the stamp tool 30 is vertically pulled up to a fixed position at a constant speed, and then moved horizontally and stopped above the adhesive reservoir 44, where it is attached to the stamp ring
End the cycle.

このような本発明のスタンプツールを用いたス
タンピング動作に於いては、パツケージ面にスタ
ンプした後スタンプツール30を引上げる際の接
着剤の糸引き現象は、その原因となる接着剤のは
い上りがスタンプツール側壁面32の表面被覆部
34により軽減されることにより、減少するよう
になつた。即ち弗素系樹脂等の撥水性被膜を形成
する表面被覆部34は、接着剤に対して離型作用
を有し、繰返しのスタンピング動作に於いて接着
剤のはい上りによる蓄積を防止している。又スタ
ンプ面33を滑面になせば、接着剤がスタンプ面
に均等に取着され一部に集中することなく均一な
膜厚を提供することができるとともに、糸引き現
象に対しても局所的に接着剤が蓄積されることが
減少し、いつそう有効である。さらにスタンピン
グに採用する接着剤の粘度範囲を限定し、それに
応じたスタンプ押着圧力、引上げ速度等を適格に
選ぶ事により糸引き現象の防止がより確実にな
る。
In such a stamping operation using the stamp tool of the present invention, the threading phenomenon of the adhesive when pulling up the stamp tool 30 after stamping on the package surface is caused by the creeping up of the adhesive. This is reduced by being reduced by the surface coating portion 34 of the stamp tool side wall surface 32. That is, the surface coating portion 34, which forms a water-repellent coating such as a fluorine-based resin, has a releasing effect on the adhesive and prevents the adhesive from creeping up and accumulating during repeated stamping operations. In addition, by making the stamp surface 33 a smooth surface, the adhesive can be evenly attached to the stamp surface, providing a uniform film thickness without being concentrated in one part, and also preventing local stringiness. Glue build-up is reduced and when it is so effective. Furthermore, by limiting the viscosity range of the adhesive used for stamping and appropriately selecting the stamp pressing pressure, pulling speed, etc., the stringing phenomenon can be more reliably prevented.

次に本発明の他の実施例を第5図及び第6図を
参照して説明する。この実施例によるスタンプツ
ールは、前記第1実施例の対接面33と外周側壁
面32,34の両面が交わる各稜線35に適切な
傾斜面又は曲面を有する面取部53を設け、さら
に前記第1実施例と同様に面取部53及び外周側
壁部32,34とに表面被覆処理を施し、弗素系
樹脂等の薄膜層54を設けたものである。すなわ
ち対接面33の稜線(面取部53との境界線)近
傍に撥水性被膜を形成した点で前記第1実施例と
同様である。面取部53のスタンプ面51に対す
る垂直方向の長さとしては前記第1実施例のスタ
ンピング動作説明(第1図)に示した接着剤層4
5の膜厚寸法をaとするならば1.5a〜5a程度が適
当である。本スタンプツールを用いた場合、接着
剤のスタンプツールへのはい上りは前記第1実施
例に比して更に減少され、糸引き現象防止の効果
大である。さらにスタンプ面内に前記撥水性被膜
で第7図の応用例に示す様な適当なパターンを形
成させる事により、種々の接着剤に対するスタン
ピングツールの適用範囲が拡大出来る事は明白で
ある。
Next, another embodiment of the present invention will be described with reference to FIGS. 5 and 6. The stamp tool according to this embodiment is provided with a chamfered portion 53 having an appropriate inclined surface or curved surface on each ridge line 35 where the contact surface 33 of the first embodiment intersects with both sides of the outer peripheral side wall surfaces 32 and 34. Similar to the first embodiment, the chamfered portion 53 and the outer peripheral side walls 32 and 34 are subjected to surface coating treatment, and a thin film layer 54 of fluorine resin or the like is provided. That is, this embodiment is similar to the first embodiment in that a water-repellent coating is formed near the ridgeline (boundary line with the chamfered portion 53) of the contact surface 33. The length of the chamfered portion 53 in the direction perpendicular to the stamping surface 51 is determined by the length of the adhesive layer 4 shown in the description of the stamping operation of the first embodiment (FIG. 1).
If the film thickness dimension of No. 5 is a, then approximately 1.5a to 5a is appropriate. When this stamp tool is used, the amount of adhesive creeping up into the stamp tool is further reduced compared to the first embodiment, which is highly effective in preventing the stringing phenomenon. Furthermore, it is clear that the range of application of the stamping tool to various adhesives can be expanded by forming an appropriate pattern within the stamp surface with the water-repellent coating as shown in the application example of FIG.

撥水性被覆は接着剤のはい上る部分に少なくと
も形成すればよいので、少なくとも(稜線を含
む)稜線の近傍の側面に形成すればよい。
Since the water-repellent coating may be formed at least on the portion where the adhesive creeps up, it is sufficient to form the water-repellent coating on at least the side surfaces near the ridgeline (including the ridgeline).

さらに撥水性被膜は第7図イに示すように対接
面33の周縁部に帯状に撥水性被膜71を形成す
ることにより、より粘性の高いものまで糸引き現
象を軽減できる。
Furthermore, by forming a water-repellent coating 71 in a strip shape on the peripheral edge of the contact surface 33 as shown in FIG. 7A, the stringing phenomenon can be reduced even when the viscosity is higher.

さらにまた撥水性被膜72,73を対接面33
中に第7図ロ,ハのように設けて、接着剤の吸着
不要部を形成するのに用いてもよい。
Furthermore, water repellent coatings 72 and 73 are applied to the contact surface 33.
It may also be provided inside as shown in FIG.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のスタンプツールの斜視図、第2
図は第1図のスタンプ後のスタンプツールと接着
剤の過程状態図、第3図は本発明装置の実施例を
説明するためのスタンプツールの斜視図、第4図
は第3図のスタンピング動作説明図、第5図は第
3図の変形例の斜視図、第6図は第4図の変形例
のスタンプツールと接着剤層の関係を示した図で
ある。第7図は本発明のスタンプツール応用例で
スタンプ面の上面図である。 30……スタンプツール本体、32,34……
側壁面及び表面被覆部、33……対接面、53…
…スタンプツール面取部。
Figure 1 is a perspective view of a conventional stamp tool, Figure 2 is a perspective view of a conventional stamp tool.
The figure is a process state diagram of the stamp tool and adhesive after stamping as shown in Fig. 1, Fig. 3 is a perspective view of the stamp tool for explaining an embodiment of the device of the present invention, and Fig. 4 is the stamping operation shown in Fig. 3. 5 is a perspective view of the modification of FIG. 3, and FIG. 6 is a diagram showing the relationship between the stamp tool and the adhesive layer of the modification of FIG. 4. FIG. 7 is a top view of the stamp surface in an applied example of the stamp tool of the present invention. 30... Stamp tool body, 32, 34...
Side wall surface and surface covering portion, 33... opposing surface, 53...
...Stamp tool chamfer.

Claims (1)

【特許請求の範囲】 1 被接着剤塗布面に対接する対接面を有するス
タンプ体と、該スタンプ体の前記対接面の少くと
も稜線近傍のスタンプ体側面に形成された撥水性
被膜とを具備してなることを特徴とする接着剤塗
布装置。 2 撥水性被膜は弗素樹脂である特許請求の範囲
第1項記載の接着剤塗布装置。 3 撥水性被膜はSi(シリコン)樹脂である特許
請求の範囲第1項記載の接着剤塗布装置。
[Scope of Claims] 1. A stamp body having an opposing surface that is in contact with an adhesive-applied surface, and a water-repellent coating formed on a side surface of the stamp body at least near the ridgeline of the opposing surface of the stamp body. An adhesive application device comprising: 2. The adhesive coating device according to claim 1, wherein the water-repellent coating is a fluororesin. 3. The adhesive coating device according to claim 1, wherein the water-repellent coating is made of Si (silicon) resin.
JP6388278A 1978-05-30 1978-05-30 Adhesive coating device Granted JPS54155235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6388278A JPS54155235A (en) 1978-05-30 1978-05-30 Adhesive coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6388278A JPS54155235A (en) 1978-05-30 1978-05-30 Adhesive coating device

Publications (2)

Publication Number Publication Date
JPS54155235A JPS54155235A (en) 1979-12-07
JPS6114873B2 true JPS6114873B2 (en) 1986-04-21

Family

ID=13242095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6388278A Granted JPS54155235A (en) 1978-05-30 1978-05-30 Adhesive coating device

Country Status (1)

Country Link
JP (1) JPS54155235A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428761U (en) * 1990-05-24 1992-03-06

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10113022B4 (en) * 2001-03-17 2013-05-29 Volkswagen Ag Apparatus for painting a surface of a component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428761U (en) * 1990-05-24 1992-03-06

Also Published As

Publication number Publication date
JPS54155235A (en) 1979-12-07

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