JPS61149328U - - Google Patents
Info
- Publication number
- JPS61149328U JPS61149328U JP3274485U JP3274485U JPS61149328U JP S61149328 U JPS61149328 U JP S61149328U JP 3274485 U JP3274485 U JP 3274485U JP 3274485 U JP3274485 U JP 3274485U JP S61149328 U JPS61149328 U JP S61149328U
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- chemical liquid
- way valve
- coating device
- piping path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3274485U JPS61149328U (2) | 1985-03-07 | 1985-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3274485U JPS61149328U (2) | 1985-03-07 | 1985-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149328U true JPS61149328U (2) | 1986-09-16 |
Family
ID=30534543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3274485U Pending JPS61149328U (2) | 1985-03-07 | 1985-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149328U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001239196A (ja) * | 2000-02-29 | 2001-09-04 | Matsushita Electric Ind Co Ltd | ダイボンディング用のペースト塗布装置および塗布方法 |
-
1985
- 1985-03-07 JP JP3274485U patent/JPS61149328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001239196A (ja) * | 2000-02-29 | 2001-09-04 | Matsushita Electric Ind Co Ltd | ダイボンディング用のペースト塗布装置および塗布方法 |
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