JPS61149330U - - Google Patents
Info
- Publication number
- JPS61149330U JPS61149330U JP3170385U JP3170385U JPS61149330U JP S61149330 U JPS61149330 U JP S61149330U JP 3170385 U JP3170385 U JP 3170385U JP 3170385 U JP3170385 U JP 3170385U JP S61149330 U JPS61149330 U JP S61149330U
- Authority
- JP
- Japan
- Prior art keywords
- liquid tank
- rotating plate
- etching solution
- wafer
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3170385U JPS61149330U (2) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3170385U JPS61149330U (2) | 1985-03-06 | 1985-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149330U true JPS61149330U (2) | 1986-09-16 |
Family
ID=30532545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3170385U Pending JPS61149330U (2) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149330U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280339A (ja) * | 1988-09-13 | 1990-03-20 | Furukawa Electric Co Ltd:The | ガラス母材の表面処理方法 |
-
1985
- 1985-03-06 JP JP3170385U patent/JPS61149330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280339A (ja) * | 1988-09-13 | 1990-03-20 | Furukawa Electric Co Ltd:The | ガラス母材の表面処理方法 |
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