JPS61150855U - - Google Patents
Info
- Publication number
- JPS61150855U JPS61150855U JP3317785U JP3317785U JPS61150855U JP S61150855 U JPS61150855 U JP S61150855U JP 3317785 U JP3317785 U JP 3317785U JP 3317785 U JP3317785 U JP 3317785U JP S61150855 U JPS61150855 U JP S61150855U
- Authority
- JP
- Japan
- Prior art keywords
- support device
- substrate support
- substrate
- heat
- resistant insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 238000012856 packing Methods 0.000 claims description 7
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 239000012634 fragment Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3317785U JPS61150855U (da) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3317785U JPS61150855U (da) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150855U true JPS61150855U (da) | 1986-09-18 |
Family
ID=30535383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3317785U Pending JPS61150855U (da) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150855U (da) |
-
1985
- 1985-03-08 JP JP3317785U patent/JPS61150855U/ja active Pending
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