JPS61151342U - - Google Patents
Info
- Publication number
- JPS61151342U JPS61151342U JP3313885U JP3313885U JPS61151342U JP S61151342 U JPS61151342 U JP S61151342U JP 3313885 U JP3313885 U JP 3313885U JP 3313885 U JP3313885 U JP 3313885U JP S61151342 U JPS61151342 U JP S61151342U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- carrier
- opening
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313885U JPS61151342U (mo) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313885U JPS61151342U (mo) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151342U true JPS61151342U (mo) | 1986-09-18 |
Family
ID=30535304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3313885U Pending JPS61151342U (mo) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151342U (mo) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57155744A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Jig for wafer |
-
1985
- 1985-03-08 JP JP3313885U patent/JPS61151342U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57155744A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Jig for wafer |
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