JPS6115544B2 - - Google Patents

Info

Publication number: JPS6115544B2
Authority: JP; Japan
Prior art keywords: support; chip; lanthanum hexaboride; cathode; barrier layer
Prior art date: 1977-09-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP11687577A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5451471A (en

Inventor

Tetsuya Wada

Ryuichi Terasaki

Hideo Hiraoka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Denka Co Ltd

Original Assignee

Denki Kagaku Kogyo KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-09-30

Filing date

1977-09-30

Publication date

1986-04-24

1977-09-30 Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK

1977-09-30 Priority to JP11687577A priority Critical patent/JPS5451471A/ja

1979-04-23 Publication of JPS5451471A publication Critical patent/JPS5451471A/ja

1986-04-24 Publication of JPS6115544B2 publication Critical patent/JPS6115544B2/ja

Status Granted legal-status Critical Current

Links

229910052746 lanthanum Inorganic materials 0.000 claims description 20
FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 20
230000004888 barrier function Effects 0.000 claims description 11
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
239000000463 material Substances 0.000 claims description 5
229910002804 graphite Inorganic materials 0.000 claims description 4
239000010439 graphite Substances 0.000 claims description 4
229910007948 ZrB2 Inorganic materials 0.000 claims description 3
VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 claims description 3
238000010438 heat treatment Methods 0.000 description 13
239000000126 substance Substances 0.000 description 5
229910052799 carbon Inorganic materials 0.000 description 4
238000000034 method Methods 0.000 description 4
238000001816 cooling Methods 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
229910052582 BN Inorganic materials 0.000 description 2
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
239000000872 buffer Substances 0.000 description 2
238000010894 electron beam technology Methods 0.000 description 2
QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
229910025794 LaB6 Inorganic materials 0.000 description 1
229910033181 TiB2 Inorganic materials 0.000 description 1
230000009471 action Effects 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
230000008859 change Effects 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000005611 electricity Effects 0.000 description 1
230000004927 fusion Effects 0.000 description 1
238000007731 hot pressing Methods 0.000 description 1
150000002484 inorganic compounds Chemical class 0.000 description 1
229910010272 inorganic material Inorganic materials 0.000 description 1
239000012212 insulator Substances 0.000 description 1
238000005304 joining Methods 0.000 description 1
ZKEYULQFFYBZBG-UHFFFAOYSA-N lanthanum carbide Chemical compound [La].[C-]#[C] ZKEYULQFFYBZBG-UHFFFAOYSA-N 0.000 description 1
239000000843 powder Substances 0.000 description 1
230000008569 process Effects 0.000 description 1
239000002296 pyrolytic carbon Substances 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1

Landscapes

Solid Thermionic Cathode (AREA)

JP11687577A 1977-09-30 1977-09-30 Hottcathode Granted JPS5451471A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP11687577A JPS5451471A (en)	1977-09-30	1977-09-30	Hottcathode

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP11687577A JPS5451471A (en)	1977-09-30	1977-09-30	Hottcathode

Publications (2)

Publication Number	Publication Date
JPS5451471A JPS5451471A (en)	1979-04-23
JPS6115544B2 true JPS6115544B2 (fr)	1986-04-24

Family

ID=14697787

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP11687577A Granted JPS5451471A (en)	1977-09-30	1977-09-30	Hottcathode

Country Status (1)

Country	Link
JP (1)	JPS5451471A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61133948U (fr) *	1986-01-10	1986-08-21

1977
- 1977-09-30 JP JP11687577A patent/JPS5451471A/ja active Granted

Also Published As

Publication number	Publication date
JPS5451471A (en)	1979-04-23

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