JPS61157857U - - Google Patents
Info
- Publication number
- JPS61157857U JPS61157857U JP4172985U JP4172985U JPS61157857U JP S61157857 U JPS61157857 U JP S61157857U JP 4172985 U JP4172985 U JP 4172985U JP 4172985 U JP4172985 U JP 4172985U JP S61157857 U JPS61157857 U JP S61157857U
- Authority
- JP
- Japan
- Prior art keywords
- comparator
- sensor
- output signal
- reference value
- cleaning solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4172985U JPS61157857U (2) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4172985U JPS61157857U (2) | 1985-03-22 | 1985-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157857U true JPS61157857U (2) | 1986-09-30 |
Family
ID=30551827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4172985U Pending JPS61157857U (2) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157857U (2) |
-
1985
- 1985-03-22 JP JP4172985U patent/JPS61157857U/ja active Pending
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