JPS61164026U - - Google Patents
Info
- Publication number
- JPS61164026U JPS61164026U JP4830185U JP4830185U JPS61164026U JP S61164026 U JPS61164026 U JP S61164026U JP 4830185 U JP4830185 U JP 4830185U JP 4830185 U JP4830185 U JP 4830185U JP S61164026 U JPS61164026 U JP S61164026U
- Authority
- JP
- Japan
- Prior art keywords
- flat plate
- gas introduction
- lower electrode
- plasma etching
- doughnut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4830185U JPS61164026U (2) | 1985-04-01 | 1985-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4830185U JPS61164026U (2) | 1985-04-01 | 1985-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164026U true JPS61164026U (2) | 1986-10-11 |
Family
ID=30564429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4830185U Pending JPS61164026U (2) | 1985-04-01 | 1985-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164026U (2) |
-
1985
- 1985-04-01 JP JP4830185U patent/JPS61164026U/ja active Pending
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