JPS61164031U - - Google Patents
Info
- Publication number
- JPS61164031U JPS61164031U JP4768685U JP4768685U JPS61164031U JP S61164031 U JPS61164031 U JP S61164031U JP 4768685 U JP4768685 U JP 4768685U JP 4768685 U JP4768685 U JP 4768685U JP S61164031 U JPS61164031 U JP S61164031U
- Authority
- JP
- Japan
- Prior art keywords
- dust removal
- gun body
- removal part
- filter
- pressure gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4768685U JPS61164031U (2) | 1985-03-30 | 1985-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4768685U JPS61164031U (2) | 1985-03-30 | 1985-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164031U true JPS61164031U (2) | 1986-10-11 |
Family
ID=30563239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4768685U Pending JPS61164031U (2) | 1985-03-30 | 1985-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164031U (2) |
-
1985
- 1985-03-30 JP JP4768685U patent/JPS61164031U/ja active Pending
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