JPS61171246U - - Google Patents
Info
- Publication number
- JPS61171246U JPS61171246U JP5374785U JP5374785U JPS61171246U JP S61171246 U JPS61171246 U JP S61171246U JP 5374785 U JP5374785 U JP 5374785U JP 5374785 U JP5374785 U JP 5374785U JP S61171246 U JPS61171246 U JP S61171246U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heat treatment
- semiconductor wafer
- treatment apparatus
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5374785U JPS61171246U (it) | 1985-04-11 | 1985-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5374785U JPS61171246U (it) | 1985-04-11 | 1985-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171246U true JPS61171246U (it) | 1986-10-24 |
Family
ID=30574900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5374785U Pending JPS61171246U (it) | 1985-04-11 | 1985-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171246U (it) |
-
1985
- 1985-04-11 JP JP5374785U patent/JPS61171246U/ja active Pending
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