JPS61171252U - - Google Patents

Info

Publication number
JPS61171252U
JPS61171252U JP5463485U JP5463485U JPS61171252U JP S61171252 U JPS61171252 U JP S61171252U JP 5463485 U JP5463485 U JP 5463485U JP 5463485 U JP5463485 U JP 5463485U JP S61171252 U JPS61171252 U JP S61171252U
Authority
JP
Japan
Prior art keywords
wafers
stages
pair
storage container
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5463485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648858Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985054634U priority Critical patent/JPH0648858Y2/ja
Priority to US06/819,253 priority patent/US4759681A/en
Publication of JPS61171252U publication Critical patent/JPS61171252U/ja
Application granted granted Critical
Publication of JPH0648858Y2 publication Critical patent/JPH0648858Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1985054634U 1985-01-22 1985-04-11 ウエハ収納容器 Expired - Lifetime JPH0648858Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (ja) 1985-04-11 1985-04-11 ウエハ収納容器
US06/819,253 US4759681A (en) 1985-01-22 1986-01-16 End station for an ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (ja) 1985-04-11 1985-04-11 ウエハ収納容器

Publications (2)

Publication Number Publication Date
JPS61171252U true JPS61171252U (sr) 1986-10-24
JPH0648858Y2 JPH0648858Y2 (ja) 1994-12-12

Family

ID=30576567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985054634U Expired - Lifetime JPH0648858Y2 (ja) 1985-01-22 1985-04-11 ウエハ収納容器

Country Status (1)

Country Link
JP (1) JPH0648858Y2 (sr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0179828U (sr) * 1987-11-19 1989-05-29
JPH01160833U (sr) * 1988-04-12 1989-11-08
JP2013089845A (ja) * 2011-10-20 2013-05-13 Disco Abrasive Syst Ltd ウエーハカセット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60226134A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60226134A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0179828U (sr) * 1987-11-19 1989-05-29
JPH01160833U (sr) * 1988-04-12 1989-11-08
JP2013089845A (ja) * 2011-10-20 2013-05-13 Disco Abrasive Syst Ltd ウエーハカセット

Also Published As

Publication number Publication date
JPH0648858Y2 (ja) 1994-12-12

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