JPS6119045A - System for converting energy beam signal into optical signal - Google Patents
System for converting energy beam signal into optical signalInfo
- Publication number
- JPS6119045A JPS6119045A JP59137129A JP13712984A JPS6119045A JP S6119045 A JPS6119045 A JP S6119045A JP 59137129 A JP59137129 A JP 59137129A JP 13712984 A JP13712984 A JP 13712984A JP S6119045 A JPS6119045 A JP S6119045A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- optical signal
- energy beam
- optical
- phosphor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はＸ線、荷電粒子等のエネルギービーム信号を光
信号に変換する光エネルギービーム信号−光信号変換シ
ステムに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an optical energy beam signal-to-optical signal conversion system that converts energy beam signals such as X-rays and charged particles into optical signals.
従来の螢光スクリーンは、螢光面と信号検出面 −
どの間にガラスが介在し、螢光面と検出面との間のギャ
ップによる光の拡がりに起因した信号強度の低下及びガ
ラス内部での光の散乱によるＳ／Ｎ比の低下等が起きて
いたので、エネルギービームの信号の光信号変換効率が
減少するという欠点があった。Conventional fluorescent screens consist of a fluorescent surface and a signal detection surface.
Glass was interposed between the two, causing a decrease in signal strength due to the spread of light due to the gap between the fluorescent surface and the detection surface, and a decrease in the S/N ratio due to light scattering inside the glass. Therefore, there is a drawback that the optical signal conversion efficiency of the energy beam signal is reduced.
本発明の目的は、従来のシステムに比べて高いエネルギ
ービーム信号−光信号変換効率を持つエネルギービーム
信号−光信号変換システムを提供することにある。An object of the present invention is to provide an energy beam signal-to-optical signal conversion system that has higher energy beam signal-to-optical signal conversion efficiency than conventional systems.
上記目的を達成するために、本発明では、螢光体と光検
出系との間の介在物のうち、光変換効率低域の原因であ
るガラスを取り除き、イメージガイド等の光ファイバー
に直接螢光体等を塗布することにより、エネルギービー
ム信号−光信号変換効率を高めることを特徴としている
。In order to achieve the above object, the present invention removes the glass that causes low light conversion efficiency among the inclusions between the phosphor and the photodetection system, and fluoresces directly into the optical fiber of the image guide etc. It is characterized by increasing the energy beam signal-to-optical signal conversion efficiency by coating the body or the like.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図は、本発明の基本的な構成と動作を簡単に示した
ものである。本発明の光信号変換システムは前面に反射
防止膜１と螢光体２とを塗布したイメージガイド３から
成り、エネルギービームの入射により螢光体２で生じる
光を効率よく光検出系４に伝達することが可能である。FIG. 1 simply shows the basic configuration and operation of the present invention. The optical signal conversion system of the present invention consists of an image guide 3 coated with an antireflection film 1 and a phosphor 2 on the front surface, and efficiently transmits light generated by the phosphor 2 upon incidence of an energy beam to a photodetection system 4. It is possible to do so.
ここで、反射防止板１は適切な厚みを持ち、エネルギー
ビーム５を十分な強度でもって螢光体２に到達させると
共に、螢光体２で生じた光のうちで、図面中上方に向か
う成分を反射させ、イメージガイドに伝達される信号成
分を増大して変換効率を向上させるという働きを持つ。Here, the anti-reflection plate 1 has an appropriate thickness, allows the energy beam 5 to reach the phosphor 2 with sufficient intensity, and also allows the component of the light generated by the phosphor 2 to move upward in the drawing. It has the function of increasing the signal components transmitted to the image guide and improving conversion efficiency.
第２図は、走査型反射電子回折顕微装置への適用例であ
る。加速型ｗＸ６を有する電子銃７から放出される一部
電子ビーム８は収束レンズ９により真空容器１１内にあ
る試料１２の表面に収束される。走査電源１９により一
部電子ビーム用偏向コイル群１０を動作させて一部ビー
ム８を試料１２の表面上で走査させる。この特待られる
反射電子回折線１３は螢光体１４上にのぞき窓１６を通
して反射電子回折像としてａｍされる。駆動機構１７を
使って、光信号変換システム１５を真空中で移動させ、
回折線１３の一部を信号として取得し、光電変換素子１
８で電気信号に変換した後ＣＲＴ２０上に表示する。FIG. 2 is an example of application to a scanning-type backscattered electron diffraction microscope. A part of the electron beam 8 emitted from the electron gun 7 having an accelerating type wX6 is focused by a converging lens 9 onto the surface of a sample 12 in a vacuum container 11. A part of the electron beam deflection coil group 10 is operated by a scanning power supply 19, and a part of the beam 8 is scanned over the surface of the sample 12. This much-anticipated reflected electron diffraction line 13 is reflected onto the phosphor 14 through a viewing window 16 as a reflected electron diffraction image. moving the optical signal conversion system 15 in vacuum using the drive mechanism 17;
A part of the diffraction line 13 is acquired as a signal, and the photoelectric conversion element 1
8, the signal is converted into an electrical signal and then displayed on the CRT 20.
第３図では、螢光体１４、のぞき窓１６の代わりに直接
光信号変換システム１５を設置し、光信号変換システム
１５上の回折図形の一部をアパーチャ２１を通して光電
変換素子１８に取り込み、電気信号に変換した後ＣＲＴ
上に表示する。第４図では、光信号変換システム１５上
の回折図形の一部を光学レンズ２２を通してアパーチャ
２１上に結像させ、アパーチャ２１を通る光のみを光フ
ァイバー２４を通して光電変換素子１８に取り込み、電
気信号に変換した後ＣＲＴ２０上に表示する。In FIG. 3, a direct optical signal conversion system 15 is installed in place of the phosphor 14 and the peephole 16, and a part of the diffraction pattern on the optical signal conversion system 15 is taken into the photoelectric conversion element 18 through the aperture 21, and electricity is generated. CRT after converting to signal
Display above. In FIG. 4, a part of the diffraction pattern on the optical signal conversion system 15 is imaged onto the aperture 21 through the optical lens 22, and only the light passing through the aperture 21 is taken into the photoelectric conversion element 18 through the optical fiber 24 and converted into an electric signal. After conversion, it is displayed on the CRT 20.
このように、イメージカイトに直接螢光体等を塗布する
ことにより光変換信号をガイドに取り込む割合が高くな
ると共に、個々のガイドの径が非常に小さいことから螢
光領域と信号取得領域との一致が良くなることが期待さ
れる。このことは取得信号のＳＮ比と信号取得領域の分
解能を向上させる。また、イメージガイドを使うことに
より画像をデジタル的に表示できるので、計算機等を使
う処理にも適している。In this way, by applying a phosphor etc. directly to the image kite, the ratio of optically converted signals being taken into the guide increases, and since the diameter of each guide is extremely small, the distance between the fluorescing area and the signal acquisition area increases. It is hoped that the agreement will improve. This improves the signal-to-noise ratio of the acquired signal and the resolution of the signal acquisition area. Furthermore, since images can be displayed digitally by using an image guide, it is also suitable for processing using a computer or the like.
以上説明したように、本発明によれば、従来のシステム
に比べて高いエネルギービーム信号−光信号変換効率を
有するエネルギービーム、信号−光信号変換システムが
実現できる。As described above, according to the present invention, an energy beam/signal/optical signal conversion system having higher energy beam signal/optical signal conversion efficiency than conventional systems can be realized.
第１図は、本発明の原理図、第２図は、走査型反射電子
回折顕微装置への設置例を示す図、第３図は、走査型反
射電子回折顕微装置への他の設置例を示す図、第４図は
走査型反射電子回折顕微装置へのさらに他の設置例を示
す図である。
１・・・反射防止膜、２・・・螢光体、３・・・イメー
ジガイド、４・・・光検出系、５・・・入射エルネギ−
ビーム。
６・・・加速電源、７・・・電子銃、８・・・−次電子
ビーム、９・・・収束レンズ、１０・・・−次電子ビー
ム用偏向コイル群、１１・・・真空容器、１２・・・試
料、１３・・・反射電子回折ビーム、１４・・・螢光板
、１５・・・光信号変換システム、１６・・・のそき窓
、１７・・・光信今度換システム駆動機構、１８・・・
光電変換素子、１９・・・走査電源、２０・・・陰極線
管、２１・・・アパーチャ、２２・・・光学レンズ、２
３・・・遮光筒、２４・・・光ファ第 ３ 目
第 ４ 目Fig. 1 shows the principle of the present invention, Fig. 2 shows an example of installation in a scanning backscattered electron diffraction microscope, and Fig. 3 shows another example of installation in a scanning backscattered electron diffraction microscope. The figure shown in FIG. 4 is a diagram showing still another example of installation in a scanning type backscattered electron diffraction microscope device. DESCRIPTION OF SYMBOLS 1... Antireflection film, 2... Fluorescent material, 3... Image guide, 4... Light detection system, 5... Incident energy
beam. 6... Accelerating power supply, 7... Electron gun, 8... -order electron beam, 9... Converging lens, 10... -order electron beam deflection coil group, 11... Vacuum container, 12... Sample, 13... Reflected electron diffraction beam, 14... Fluorescent plate, 15... Optical signal conversion system, 16... Side window, 17... Optical signal conversion system drive mechanism , 18...
Photoelectric conversion element, 19... Scanning power supply, 20... Cathode ray tube, 21... Aperture, 22... Optical lens, 2
3... Light-shielding tube, 24... Optical fiber 3rd eye 4th eye
Claims (1)
上に反射防止膜を形成することにより、前記螢光体を発
光せしめるエネルギービーム信号を光信号に変換する如
く構成したことを特徴とするエネルギービーム信号−光
信号変換システム。An energy device characterized in that the energy beam signal that causes the phosphor to emit light is converted into an optical signal by coating a phosphor directly on the front surface of the image guide and further forming an antireflection film thereon. Beam signal-optical signal conversion system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59137129A JPS6119045A (en) | 1984-07-04 | 1984-07-04 | System for converting energy beam signal into optical signal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59137129A JPS6119045A (en) | 1984-07-04 | 1984-07-04 | System for converting energy beam signal into optical signal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6119045A true JPS6119045A (en) | 1986-01-27 |
Family
ID=15191495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59137129A Pending JPS6119045A (en) | 1984-07-04 | 1984-07-04 | System for converting energy beam signal into optical signal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6119045A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05128991A (en) * | 1991-08-09 | 1993-05-25 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Real-time surface monitoring device |
-
1984
- 1984-07-04 JP JP59137129A patent/JPS6119045A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05128991A (en) * | 1991-08-09 | 1993-05-25 | Hikari Gijutsu Kenkyu Kaihatsu Kk | Real-time surface monitoring device |
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