JPS61192005A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS61192005A JPS61192005A JP60032089A JP3208985A JPS61192005A JP S61192005 A JPS61192005 A JP S61192005A JP 60032089 A JP60032089 A JP 60032089A JP 3208985 A JP3208985 A JP 3208985A JP S61192005 A JPS61192005 A JP S61192005A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic
- magnetic head
- nio
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気ヘッドの構成の改良に関するものである
。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an improvement in the structure of a magnetic head.
従来の技術
従来、磁気ヘッドの構成として、磁気コア材料に、軟磁
性のパーマロイ・センダスト・アモルファス合金・Mn
−Zn−フェライト等を使用し、これを基板に接合又
は接着するか、基板上に蒸着・スパッタ・CVD・メッ
キ等の方法で形成したものが用いられてきた。Conventional technology Conventionally, magnetic heads have been constructed using soft magnetic permalloy, sendust, amorphous alloy, and Mn as magnetic core materials.
-Zn-ferrite or the like has been used, and it has been bonded or adhered to a substrate, or formed on the substrate by methods such as vapor deposition, sputtering, CVD, and plating.
このような構成の磁気ヘッドでは、軟磁性材料と基板材
料の熱膨張係数が等しいか、又はその差が極めて小さく
なければ、温度変化によって両材料の界面に応力が生じ
、亀裂発生の原因となったり、あるいは磁歪効果によ?
て軟磁性材料の磁気特性が悪化する。このため、使用す
る軟磁性材料の種類・組成による熱膨張係数に対応して
、自由に熱膨張係数を変える事のできる基板材料が必要
となり、結晶化ガラス、 CaO−SrO−TiO2系
セラミック基板(特開昭62−57218号公報)、N
iMnO2系セラミック基板(特開昭53−16399
号公報)などが使用されていた。これらの基板材料は、
その組成を調整する事により、広い範囲で熱膨張係数を
選択できるものである。In a magnetic head with such a configuration, unless the thermal expansion coefficients of the soft magnetic material and the substrate material are equal or the difference is extremely small, stress will be generated at the interface between the two materials due to temperature changes, causing cracks. Or is it due to magnetostrictive effects?
The magnetic properties of the soft magnetic material deteriorate. Therefore, there is a need for a substrate material whose thermal expansion coefficient can be freely changed depending on the type and composition of the soft magnetic material used. JP-A-62-57218), N
iMnO2 ceramic substrate (JP-A-53-16399
Publications) etc. were used. These substrate materials are
By adjusting the composition, the coefficient of thermal expansion can be selected within a wide range.
発明が解決しようとする問題点
しかしながら、結晶化ガラスやCa O−SrO−Ti
02系基板では、成分としてアルカリ金属、あるいはC
aを含むために使用時の環境条件、特に湿度変化に対し
て化学的に不安定であり、これらの基板を用いて磁気ヘ
ッドを構成した場合、耐候・耐久性に関して問題を生じ
ていた。−万、Ni Mn Oz系Jl(板を用いた場
合では、温度変化に対する問題はないと考えられるが、
MnOが空気中で加熱されると酸化されてMn20.に
なりやすいために、熱的安定性が充分でなく、また基板
自体に関して、焼成雰囲気を非酸化性にしなければなら
ないだめに製造コストが高くなり、さらにNiOとMn
Oの格子定数の差が大きいために固溶体が形成されにく
く、焼結性が悪いなどの欠点があった。Problems to be Solved by the Invention However, crystallized glass and CaO-SrO-Ti
In the 02 series substrate, alkali metal or C is used as a component.
Since these substrates contain a, they are chemically unstable against environmental conditions during use, especially changes in humidity, and when a magnetic head is constructed using these substrates, problems have arisen regarding weather resistance and durability. -10,000, NiMnOz-based Jl (When using a plate, there is no problem with temperature changes, but
When MnO is heated in air, it is oxidized and becomes Mn20. Thermal stability is insufficient because NiO and Mn tend to be
Due to the large difference in the lattice constants of O, it is difficult to form a solid solution, resulting in poor sinterability.
問題点を解決するだめの手段
本発明は前記問題点を解決するために、岩塩型結晶構造
を持ち、複合酸化物MgxNi、xO(0(xく1)を
主成分とする基板を用い、この基板上に磁気コアとして
軟磁性材料を形成した事を特徴とする磁気ヘッドである
。Means for Solving the Problems In order to solve the above problems, the present invention uses a substrate having a rock salt type crystal structure and containing composite oxides MgxNi,xO(0(x×1)) as main components. This magnetic head is characterized by forming a soft magnetic material as a magnetic core on a substrate.
作用
発明者等は研究の結果、耐湿・耐熱性に優れたNiOI
ICMgOを固溶させる事により、熱膨張係数を1oO
〜140 X 10− ’ /’Cの範囲内で調節可能
な事を見い出した?MgOは水に対して溶解性を持ち、
耐湿性の面で問題があるが、NiOとの固溶体とする事
によって、この点は改善される。従って、このMgxN
i 、−x O基板を用いて構成された磁気ヘッドは優
れた耐候・耐久特性を持つ。また基板材料自体に関して
、NiOとMgOの格子定数の差が小さいために固溶体
を形成しやすく、その上焼成時の雰囲気も特に調節する
必要がないために、製造が容易である。As a result of research, the inventors found that NiOI has excellent moisture and heat resistance.
By dissolving ICMgO, the coefficient of thermal expansion can be reduced to 1oO.
Did you find that it can be adjusted within the range of ~140 x 10-'/'C? MgO has solubility in water,
Although there is a problem in terms of moisture resistance, this point can be improved by forming a solid solution with NiO. Therefore, this MgxN
A magnetic head constructed using an i, -x O substrate has excellent weather resistance and durability characteristics. Regarding the substrate material itself, since the difference in lattice constant between NiO and MgO is small, it is easy to form a solid solution, and there is no need to particularly adjust the atmosphere during firing, so manufacturing is easy.
実施例 以下実施例を示す。Example Examples are shown below.
試薬特級の酸化ニッケルと酸化マグネシウムをそれぞれ
秤量し、湿式ボールミルにて16時間混合した後150
°Cで乾燥し、NiOとMgOのモル比が、NiO:M
g0=1:0.4:1.2:1.1 :1.1 :2,
1 :4,0:1の混合粉末を得た。Reagent grade nickel oxide and magnesium oxide were each weighed and mixed in a wet ball mill for 16 hours.
After drying at °C, the molar ratio of NiO and MgO was changed to NiO:M
g0=1:0.4:1.2:1.1 :1.1 :2,
A mixed powder of 1:4, 0:1 was obtained.
この混合粉末に10重量・”%の純水を加え、造粒し、
3ooKy/dの圧力で金型中で一軸加圧成形した。Add 10% by weight of pure water to this mixed powder, granulate it,
Uniaxial pressure molding was carried out in a mold at a pressure of 3ooKy/d.
この成形体をアルミナを圧力媒体としてSiCの型中に
入れ、110o0C〜15oo℃の温度で、3ooKy
/dの圧力で2時間、ホットプレスしたつ得られた焼結
体は、X線回折により相の同定を、アルキメデス法によ
り密度測定を、走査型電子顕微鏡によυ粒径観察を行な
い、又、焼結体から6朋×5ff×101tIIの試料
を切り出し熱膨張率針によシ25°C〜400 ’Q間
における熱膨張係数の測定を行なった。その結果、X線
回折では、いずれの試料においても岩塩型結晶構造の回
折パターンを示し、これより焼結体は、MgxNi、x
O(0(x〈1)である事が確認された。また密度測定
結果はJNiOとMgOの混合化によって変化するが、
いずれの試料においてもX線回折から求めた理論密度の
99゜6%以上であった。走査電子顕微鏡観察から焼結
体の粒径は5〜10μmであった。熱膨張係数は第1図
に示したように、単一酸化物のMgO、NiOテ140
X 10−7/7C程度と最大になり、Mg%Ni%
Oで最小の1oo×10−7/cを示し、その間では連
続的に変化した。This molded body was placed in a SiC mold using alumina as a pressure medium, and heated to 300°C at a temperature of 110°C to 15°C.
The sintered body obtained by hot pressing for 2 hours at a pressure of A sample of 6 mm x 5 ff x 101 tII was cut out from the sintered body, and the thermal expansion coefficient was measured using a thermal expansion needle between 25°C and 400'Q. As a result, X-ray diffraction showed a diffraction pattern of a rock salt type crystal structure in all samples, which suggests that the sintered body is MgxNi, x
It was confirmed that O(0(x<1).Also, the density measurement results change depending on the mixture of JNiO and MgO,
In all samples, the density was 99.6% or more of the theoretical density determined from X-ray diffraction. The grain size of the sintered body was found to be 5 to 10 μm when observed using a scanning electron microscope. As shown in Figure 1, the thermal expansion coefficient of single oxide MgO, NiO
The maximum value is about X 10-7/7C, and Mg%Ni%
The minimum value was 1oo x 10-7/c at O, and it changed continuously between them.
そこで熱膨張係数が120 X 10−7/ACである
Mgザi、HO(MgO: NiO=1: a )の焼
結体をえらび、切断・研磨して、表面平滑度Rm1LX
0.1μmの基板とした。この基板と、熱膨張係数が
120X 10 /’CのCOを主成分とする軟磁性ア
モルファス合金よシ、第2図に示すような磁気ヘッドを
作成した。第2図中の1は基板、2は磁気ギャップ、3
はアモルファス金属磁気膜、4は巻線用の窓である。Therefore, a sintered body of MgZi, HO (MgO:NiO=1:a) with a thermal expansion coefficient of 120 x 10-7/AC was selected, cut and polished to obtain a surface smoothness of Rm1LX.
The substrate was 0.1 μm thick. A magnetic head as shown in FIG. 2 was fabricated using this substrate and a soft magnetic amorphous alloy containing CO as a main component and having a coefficient of thermal expansion of 120× 10 /'C. In Figure 2, 1 is the substrate, 2 is the magnetic gap, 3
4 is an amorphous metal magnetic film, and 4 is a window for winding.
磁気ヘッド作成の工程を説明すると、よく洗浄した基板
の上に、スパッタ装置で、5i02を主成分とする絶縁
層を約1μmの厚さで形成し、次に軟磁性アモルファス
合金薄膜を30μmの厚さで形成する。この上に基板を
無機接着剤でつけて、第2図中の人、Bをつくる。Bに
はSの巻き線用窓となる溝を形成し、また、ギャップ形
成用ガラスを、人、B両部分の磁気ギャップ形成面に、
スパッタでつけ、最後に人、B部分を熱間接合するっこ
の接合体に巻き線をして、磁気ヘッドとなす。To explain the process of making a magnetic head, an insulating layer mainly composed of 5i02 is formed to a thickness of about 1 μm on a well-cleaned substrate using a sputtering device, and then a soft magnetic amorphous alloy thin film is formed to a thickness of 30 μm. form it. A substrate is attached on top of this using an inorganic adhesive to create person B in Figure 2. A groove is formed in B to serve as a winding window for S, and gap forming glass is placed on the magnetic gap forming surfaces of both the human and B parts.
This is attached by sputtering, and finally the B part is hot-bonded, and wire is wound around this bonded body to form a magnetic head.
このようにして作成したMgy、、Ni440 基板を
用いた磁気ヘッド以外に、比較のため、熱膨張係数が1
20 X 1Q−7/=cの結晶化ガラスおよびCaO
−5rO−Ti02系セラミツクを、それぞれ基板とし
て用い、同様の方法で作成した磁気ヘッドを用意した。In addition to the Mgy, Ni440 magnetic head fabricated in this way, for comparison, the thermal expansion coefficient was 1.
20 x 1Q-7/=c crystallized glass and CaO
Magnetic heads were prepared in the same manner using -5rO-Ti02 ceramic as the substrate.
これら三種の磁気ヘッドに対して、金属磁性粉末を磁気
記録媒体とした、いわゆる「メタルテープ」を、相対速
度約3.8 m / seaで摺動させて、ヘッドの出
力変化・1制摩耗性・耐環境性をテストシた。その結果
、通常の環境下、23°C1湿度50%では、基板の種
類による磁気ヘッド特性の差は、特に見られなかったが
、環境条件が23°C1湿度10%では、結晶化ガラス
およびC&〇−3rO−TiO2系セラミックスを基板
とした磁気ヘッドでは、測定開始後数時間で、ヘッド出
力が数dB低下することが観察された。そこでこれらの
磁気ヘッドを詳しく観察すると、基板表面上に、磁気テ
ープの金属粉が付着し、凹凸が生じていた。A so-called "metal tape", which uses metal magnetic powder as a magnetic recording medium, was slid against these three types of magnetic heads at a relative speed of approximately 3.8 m/sea, and the output change and wear resistance of the head were measured.・Tested environmental resistance. As a result, under the normal environment at 23°C and 50% humidity, there were no particular differences in the magnetic head characteristics depending on the type of substrate, but when the environmental conditions were 23°C and 10% humidity, crystallized glass and C& In a magnetic head using 0-3rO-TiO2 ceramic as a substrate, it was observed that the head output decreased by several dB several hours after the start of measurement. When these magnetic heads were closely observed, it was found that metal powder from the magnetic tape had adhered to the substrate surface, creating irregularities.
一方、本発明の”’A”AO基板には、このような付着
は起こらず、従って磁気ヘッドの出力低下も生じなかっ
た。また、他の環境条件下、高温多湿、高温低湿、低温
多湿、低温低湿でも同様のテストを行なったが、本発明
のMg14Ni%0基板を用いた磁気ヘッドでは、磁気
ヘッド出力・耐摩耗性とも全く問題を生ぜず、安定した
特性を示した。一方、他の基板材料を用いた磁気ヘッド
では、前述のような出力低下や耐摩耗性等で問題を生じ
た。On the other hand, such adhesion did not occur in the "'A" AO substrate of the present invention, and therefore no reduction in the output of the magnetic head occurred. Similar tests were also conducted under other environmental conditions, such as high temperature and high humidity, high temperature and low humidity, low temperature and high humidity, and low temperature and low humidity. It did not cause any problems and exhibited stable characteristics. On the other hand, magnetic heads using other substrate materials have had problems such as decreased output and wear resistance as described above.
耐摩耗性の面から考えると、摩耗量の大きすぎる基板材
料は問題があり、また結晶構造に異方性があると、結晶
方位によって摩耗量が異な、す、基板に凹凸が生じる事
が考えられる。この点から考えても、その結晶構造が岩
塩型である基板材料は要求特性を満たしたものである。From the standpoint of wear resistance, substrate materials that wear too much are problematic, and if the crystal structure has anisotropy, the amount of wear will vary depending on the crystal orientation, which can cause unevenness on the substrate. It will be done. From this point of view, a substrate material whose crystal structure is a rock salt type satisfies the required characteristics.
以上の実施例では、熱膨張係数が120X10−’/’
Cのアモルファス磁性薄膜を用いる場合を示したが、軟
磁性材料としては、これに限らず、その熱膨張係数が1
oo〜140 X 10 ’/’cの範囲内のものであ
れば、それに応じて、NiOとMgOの固溶比率を変え
る事により、最適の基板を提供する事ができるものであ
る。また磁気ヘッドの作成法も、実施例で述べた方法の
みに限定するものではない。In the above example, the coefficient of thermal expansion is 120X10-'/'
Although the case where an amorphous magnetic thin film of C is used is shown, the soft magnetic material is not limited to this, and the thermal expansion coefficient is 1.
If it is within the range of oo to 140 x 10'/'c, an optimal substrate can be provided by changing the solid solution ratio of NiO and MgO accordingly. Furthermore, the method of manufacturing the magnetic head is not limited to the method described in the embodiment.
第1図から明らかなように、熱膨張係数が100〜10
4 X 10−’/’Cを与える組成はNiOが多い側
(o(x(o、s)と、MgOが多い側(o、s(xく
1)があるが、どちらかを選ぶ場合にはNiOが多い側
を選んだ方が良い。NiOが多い方が焼結温度が低くな
り、また、MgOが多いと、耐湿性に問題を生じてくる
可能性があるためである。又、本発明で用いる基板材料
はMgxNi 、 −x Oを主成分とし、機械加工性
を改善するためや、焼結特性を改善するため、添加物を
添加しても、何ら問題を生じるものではない。As is clear from Figure 1, the coefficient of thermal expansion is 100 to 10.
The composition that gives 4 x 10-'/'C is the side with more NiO (o (x (o, s)) and the side with more MgO (o, s (x × 1)), but when choosing one, It is better to choose the side with more NiO.This is because the higher the NiO content, the lower the sintering temperature, and the higher the MgO content, the possibility of problems with moisture resistance. The substrate material used in the invention has MgxNi, -xO as its main components, and no problem will arise even if additives are added to improve machinability or sintering properties.
発明の効果
本発明は、MgxNil−xO(0(x (1) を
主成分とする熱膨張係数の調節された基板を用いた磁気
ヘッドであり、磁気記録媒体との摺動において問題を生
じる稟なく安定した性能を有し、耐環境性、耐摩耗性に
優れたものである。Effects of the Invention The present invention is a magnetic head using a substrate mainly composed of MgxNil-xO (0(x (1)) and having an adjusted coefficient of thermal expansion. It has stable performance and excellent environmental resistance and abrasion resistance.
第1図はMgxNil−xo系材料の熱膨張係数と組成
比Xの値の関係を示す図、第2図は本発明による磁気ヘ
ッドの一例を示す図である。
1・・・・・・基板、2・・・・・・磁気ギャップ、3
・・・・・・アモルファス金属磁性膜、4・・・・・・
巻線用窓。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図
粗べpCx−FIG. 1 is a diagram showing the relationship between the thermal expansion coefficient and the composition ratio X of MgxNil-xo based materials, and FIG. 2 is a diagram showing an example of a magnetic head according to the present invention. 1...Substrate, 2...Magnetic gap, 3
・・・・・・Amorphous metal magnetic film, 4・・・・・・
Winding window. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Rough diagram pCx-
Claims (1)
−_xO(0<x<1)を主成分とする基板を用い、こ
の基板に磁気コアとして軟磁性材料を形成した事を特徴
とする磁気ヘッド。Composite oxide Mg_xNi_1_ with rock salt type crystal structure
- A magnetic head characterized by using a substrate containing xO (0<x<1) as a main component and forming a soft magnetic material as a magnetic core on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60032089A JPS61192005A (en) | 1985-02-20 | 1985-02-20 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60032089A JPS61192005A (en) | 1985-02-20 | 1985-02-20 | Magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61192005A true JPS61192005A (en) | 1986-08-26 |
| JPH0580044B2 JPH0580044B2 (en) | 1993-11-05 |
Family
ID=12349149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60032089A Granted JPS61192005A (en) | 1985-02-20 | 1985-02-20 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61192005A (en) |
-
1985
- 1985-02-20 JP JP60032089A patent/JPS61192005A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580044B2 (en) | 1993-11-05 |
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