JPS61193455U - - Google Patents
Info
- Publication number
- JPS61193455U JPS61193455U JP1985077843U JP7784385U JPS61193455U JP S61193455 U JPS61193455 U JP S61193455U JP 1985077843 U JP1985077843 U JP 1985077843U JP 7784385 U JP7784385 U JP 7784385U JP S61193455 U JPS61193455 U JP S61193455U
- Authority
- JP
- Japan
- Prior art keywords
- glass mask
- cleaning
- cleaning water
- water nozzle
- exhaust box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図ａは、この考案の一実施例を示す水平断
面図、ｂはそのＢ―Ｂ断面図、第２図は排気箱の
斜視図、第３図ａは従来のガラスマスク洗浄装置
を示す水平断面図、ｂはそのＡ―Ａ断面図である
。
各図中、同一符号は同一または相当部分を示し
、１はガラスマスク、２は洗浄水用ノズル、３は
洗浄槽、６は排気用穴、７は内壁、８は排気箱で
ある。
Fig. 1a is a horizontal sectional view showing an embodiment of this invention, b is a BB sectional view thereof, Fig. 2 is a perspective view of an exhaust box, and Fig. 3a is a conventional glass mask cleaning device. Horizontal sectional view, b is its AA sectional view. In each figure, the same reference numerals indicate the same or corresponding parts; 1 is a glass mask, 2 is a cleaning water nozzle, 3 is a cleaning tank, 6 is an exhaust hole, 7 is an inner wall, and 8 is an exhaust box.
Claims (1)
して洗浄する装置において、ガラスマスクおよび
洗浄水用ノズルを収容する狭い洗浄槽の周辺に、
多数の排気用穴を有する内壁を介して排気箱を設
けたことを特徴とするガラスマスク洗浄装置。 (2) 排気箱はガラスマスクおよび洗浄水用ノズ
ルをコ字状に囲むものであることを特徴とする実
用新案登録請求の範囲第１項記載のガラスマスク
洗浄装置。[Scope of Claim for Utility Model Registration] (1) In a device for cleaning a glass mask rotating at high speed by spraying cleaning water, the area around the narrow cleaning tank that accommodates the glass mask and the cleaning water nozzle,
A glass mask cleaning device characterized in that an exhaust box is provided through an inner wall having a large number of exhaust holes. (2) The glass mask cleaning device according to claim 1, wherein the exhaust box surrounds the glass mask and the cleaning water nozzle in a U-shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077843U JPS61193455U (en) | 1985-05-25 | 1985-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077843U JPS61193455U (en) | 1985-05-25 | 1985-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61193455U true JPS61193455U (en) | 1986-12-02 |
Family
ID=30621278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985077843U Pending JPS61193455U (en) | 1985-05-25 | 1985-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61193455U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005317922A (en) * | 2004-03-29 | 2005-11-10 | Shibaura Mechatronics Corp | Substrate processing apparatus and processing method |
-
1985
- 1985-05-25 JP JP1985077843U patent/JPS61193455U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005317922A (en) * | 2004-03-29 | 2005-11-10 | Shibaura Mechatronics Corp | Substrate processing apparatus and processing method |