JPS61197101A - Forming method of groove - Google Patents

Abstract

PURPOSE:To high accurately cut a linear groove, by cutting a single crystal material of face-centered cubic crystal system in the direction of a machined surface. CONSTITUTION:A work 9, consisting of steel single crystal, applies to its machined surface 10 preliminary machining so as to obtain a surface 111, and the work is fixedly provided on a holding bed 11. Subsequently, a diamond cutting tool 12, slightly biting the work 9, is relatively fed in the direction of an arrow head 13 in the drawing, cutting the work. The direction of said arrow head is set to be any one of the directions -110, 0-11, 101-. As a result, straight line grooves 14... of V-shaped section are formed, and the grooves 14... can be high accurately machined with their side edge part generating almost no swell.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a groove forming method for forming linear grooves on a processed surface of a one-plane centered cubic single crystal.

[Technical background of the invention and its problems]

BACKGROUND ART Recently, for the purpose of manufacturing precision parts, linear fine grooves with a depth of several micrometers or less, for example, are carved in multiple stages in a single crystal member. As a groove forming method in this case, cutting using diamond etching, which has excellent transferability of the tool shape to the workpiece, is suitable.

However, single crystal members have anisotropy unique to the single crystal. Therefore, depending on the cutting direction, the 10th
As shown in the figure, the side edge of the groove (A) has a 9 (B) embossing.
, yields (B). CB).

(B) has an adverse effect on the machining accuracy of the groove (man), and is one of the causes of deterioration in the quality of precision parts in which the groove is formed.

[Purpose of the invention]

The present invention has been made in consideration of the above circumstances.

It is an object of the present invention to provide a groove forming method capable of carving linear grooves with high precision in a single crystal member.

[Summary of the invention]

A straight groove is formed by cutting along the (110> direction) between the (111)-faced workpieces of a face-centered cubic single-crystal workpiece.

[Embodiments of the invention]

An embodiment of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a diagram for explaining the determination of cutting conditions in the groove forming method of this embodiment. The cylindrical sample (1) at O1mK is made of copper single crystal, and one end surface (2) thereof is set to be a (111) plane. This end face (2) was cut using a diamond cutting tool to have a flatness of 0.1 μm and a surface roughness of 0.01 μm.
It was face milled to Fkmx. Then, this sample (1) was processed using a CNC (Computer).
Numerical Control) Attach to the lathe. Then, mark the axis (3) of the sample (1) with an arrow (
4) Rotate in direction 2 at, for example, 1000 revolutions per minute. C
The NC lathe used has a resolution of 0.1 μm. Next, the diamond cutting tool (5) as shown in FIG.
) to carve a V-shaped fine groove (6) in cross section with a circular shape and a depth of, for example, 2.2 μm. The diamond cutting tool (5) has a cutting edge angle ε of 42 degrees.

The rake angle r is set to 0 degrees and the relief angle α is set to 10 degrees. Thus, when a groove is formed on the end face (2) by face cutting, the cutting direction (7) changes continuously by 360 degrees, as shown in FIG. The cutting direction is as follows:
(112), Coo), (121), (110)
, (211), (101)[112), (011
), (121), [110), (211), (
101) and (112). The cutting direction is
When the copper threads (111) and <110> intersect at a specific angle, a raised groove (8) as shown in FIG. 4 is formed on the side edge of the formed groove (6).

(8) occurs. So this! The upper part of the inner embankment has the shape of (8), the upper part is the height Ha, the outer embankment υ is the upper height Hb, the inner embankment υ is the width Wa, and the outer embankment P is the upper part of the width wb. When the cutting angle was measured every 10 degrees using a step measuring device, the results shown in FIG. 5 were obtained.

The cutting angle θ (see FIG. 3) in FIG. 5 is.

Indicates the cutting direction. As shown in Fig. 5, the heights of the embankment are Ha, Hb and
, Wb both change at a period of 120 degrees.

Furthermore, the heights Ha and Hb of the embankment have a difference of about 60 degrees between the inside and outside of the groove (6). On the other hand, the upper part of the embankment has a width Wa
, Wb 1 Both show almost the same results.

Therefore, cutting angle θ = 90° (cutting direction (110)
).

When the cutting angle θ = 210° (cutting direction (011)) and the cutting angle θ; 310° (cutting direction (101)), the raised height Ha, Hb and the raised raised width Wa,
Both Wb and Wb are small], and the tool shape of the diamond cutting tool (Φ) is relatively well transferred. This is in the cutting direction (Tlo).

(OTI), (1oe), this is considered to be a precaution to prevent active formation of scratches. Tsumashi,
When the cutting direction matches the direction of the bevel system, plastic deformation,
In other words, it is thought that this is because spe) occurs easily.

Therefore, based on the above test results, the surface to be processed of the workpiece (9) made of single crystal copper is shown in FIG.
1) Pre-process it so that it becomes a flat surface and fix it on a holding table aυ. Next, cut the diamond cutting tool a3 into the workpiece (9)
For example, make a cut of about 5 μm, and feed and cut it relative to the arrow direction (13 direction. This arrow αC direction is one of the directions (110), (011), and (101). As a result, the seventh
A straight groove a having a V-shaped cross section as shown in the figure is formed. The pair of side edges of this straight groove Q4)...
As shown in the figure, when the VC is used, there is no overflow.

Therefore, it is possible to process the straight grooves α with high precision.

In addition, in the above embodiment, the cutting direction regarding straight groove machining on the (111) plane is exemplified.

As shown in the table below, planes of a f
csrm) Regarding other aspects that constitute (111),
Directons of a mold on each surface
Form) (110>) When cutting in a direction that satisfies (110), highly accurate groove machining becomes possible.

Furthermore, although the above embodiments relate to the formation of straight grooves, groove formation using a face milling cutter can also be applied, as shown in FIG. In other words, the workpiece q in this case is
It is made of steel heavy crystal, and its processed surface α0 is (11
1) It is a side. Then, the arc-shaped cutting locus (18) centered on the point (L7) on the machined surface αe is set to be approximately straight, and the direction of the cutting locus α mark is approximately <tio>. If set, it is possible to machine a straight groove with high precision as in the fifth embodiment.Furthermore, the material of the workpiece is one-face centered cubic crystal (FCC:
face centered cube) type (
For example, aluminum [Luri, nickel (Ni).

It can be applied to any material as long as it is gold (Au) or silver (Aj). Furthermore, the depth and width of the linear groove in the present invention may be set arbitrarily. The cross-sectional shape of the groove may also be arbitrary, such as semicircular, U-shaped, or inverted trapezoidal. Furthermore, cutting tools are not limited to diamond tools.
Any tool such as a CBN (Cubic Boron N1tride) tool or a carbide tool may be used.

〔Effect of the invention〕

The groove forming method of the present invention enables highly accurate formation of linear grooves in a workpiece made of a face-centered cubic system material. Therefore, it is possible to improve the quality of a workpiece having a linear groove carved therein as a precision part.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram for determining the cutting direction in an embodiment of the present invention, FIG. 2 is an enlarged perspective view of the main part of the diamond cutting tool in FIG. 1, and FIG. FIG. 4 is a cross-sectional view showing a protrusion generated in a straight groove. Figure 5 is a graph showing the relationship between cutting angle and embossing height.
Figure 6 shows a straight groove 1117I in an embodiment of the present invention.
l! 11, FIG. 7 is a perspective view of the formed straight groove, and FIG. 8 is an enlarged sectional view of the straight groove shown in FIG.
FIG. 9 is an explanatory diagram of a groove forming method according to another embodiment of the present invention, and FIG. 10 is a rounded diagram illustrating the drawbacks of groove forming according to the conventional method. (9): Workpiece, αI: Processed surface. (Ll: Diamond cutting tool. Agent: Patent attorney Kensuke Norichika (and 1 other person) Figure 1 Figure 3 Figure 2 wJ Collection 4 Figure 6 Figure 5 Cutting qIlo<Den Figure 7 Figure 8 Flash

Claims (1)

[Claims] {111} for workpieces made of face-centered cubic single crystal members
A method for forming a groove, comprising the steps of: forming a surface to be machined in the form of a plane; and forming a linear groove by cutting along the <110> direction on the surface to be machined.