JPS61199031U - - Google Patents
Info
- Publication number
- JPS61199031U JPS61199031U JP8306385U JP8306385U JPS61199031U JP S61199031 U JPS61199031 U JP S61199031U JP 8306385 U JP8306385 U JP 8306385U JP 8306385 U JP8306385 U JP 8306385U JP S61199031 U JPS61199031 U JP S61199031U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetic
- permanent magnet
- sputtering
- yoke member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000004907 flux Effects 0.000 claims 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8306385U JPS61199031U (mo) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8306385U JPS61199031U (mo) | 1985-05-31 | 1985-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199031U true JPS61199031U (mo) | 1986-12-12 |
Family
ID=30631349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8306385U Pending JPS61199031U (mo) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199031U (mo) |
-
1985
- 1985-05-31 JP JP8306385U patent/JPS61199031U/ja active Pending
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