JPS6119904B2 - - Google Patents
Info
- Publication number
- JPS6119904B2 JPS6119904B2 JP11368481A JP11368481A JPS6119904B2 JP S6119904 B2 JPS6119904 B2 JP S6119904B2 JP 11368481 A JP11368481 A JP 11368481A JP 11368481 A JP11368481 A JP 11368481A JP S6119904 B2 JPS6119904 B2 JP S6119904B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- column
- conduit
- oxygen
- rectification column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 42
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 37
- 239000001301 oxygen Substances 0.000 claims description 37
- 229910052760 oxygen Inorganic materials 0.000 claims description 37
- 238000000926 separation method Methods 0.000 claims description 26
- 239000007788 liquid Substances 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 4
- 239000000284 extract Substances 0.000 claims description 4
- 239000002912 waste gas Substances 0.000 claims description 4
- 238000010992 reflux Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Description
【発明の詳細な説明】
本発明は、深冷分離法による空気分離法および
装置に係り、特に、窒素を多量に採取し、かつ酸
素を少量採取するに好適なプロセスを有する空気
分離法および装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an air separation method and apparatus using a cryogenic separation method, and particularly to an air separation method and apparatus having a process suitable for extracting a large amount of nitrogen and a small amount of oxygen. It is related to.
従来の深冷分離法による空気分離法および装置
を第１図により説明する。第１図は、原料空気の
圧力より約１Kg/cm2G程度圧力の低い窒素を多量
に採取し、かつ、少量の酸素を採取する空気分離
装置の基本構成を示すプロセス系統図である。第
１図で、圧力が約６Kg/cm2Gの原料空気は導管１
より主熱交換器２へ供給され、主熱交換器２で約
−170℃まで冷却後、導管３を経て精留塔下塔
（以下、下塔と略）４に供給される。下塔４には
多数の棚段５が内設されており、その上部からは
製品窒素が、また、その下部からは酸素分約30％
程度の液体空気が抜出される。この場合、下塔４
上部から抜出し得る製品窒素量には、下塔４の操
作圧力、棚段５数、製品窒素の純度および酸素、
窒素、アルゴン等の空気成分の熱力学的な性質に
より理論的な上限値が存在する。例えば、下塔４
の操作圧力が約６Kg/cm2Gで99.9％以上の高純度
窒素を得るには、製品窒素量の2.5〜３倍程度の
量の原料空気を下塔４へ供給する必要がある。精
留塔上塔（以下、上塔と略）６下部から製品酸素
を得るための原料として、下塔４下部から抜出さ
れた液体空気は、導管７を経て膨張弁８により上
塔６の操作圧力約0.4Kg/cm2Gまで膨張後、導管９
を経て上塔６上部へ供給される。上塔６上部へ
は、この他に、主熱交換器２の中間で原料空気よ
り分流し、導管１０、弁１１、導管１２を経た空
気と、導管３の途中で原料空気より分流し、導管
１３、弁１４を経た空気が合流し、導管１５を経
て空気分離装置の寒冷損失を補償するための装置
である膨張タービン１６に供給され、導管１７を
経て膨張タービン１６で膨張した空気も供給され
る。上塔６上部に供給された液体空気は、上塔６
に内設された棚段１８上を流れ落ち、上塔６底部
に設置された主凝縮器１９内で蒸発して上塔６内
を上昇する蒸気と接触する内に精留され99％以上
の高純度酸素が上塔６下部で得られる。この場
合、酸素を分離するために必要な液体空気の最少
必要量は、上塔６の操作圧力、棚段１８数、液体
空気の酸素濃度、製品酸素の純度および酸素、窒
素、アルゴン等の空気成分の熱力学的な性質によ
り理論計算できる。例えば、上塔６の操作圧力が
0.4Kg/cm2Gで純度99％以上の高純度酸素を得るに
は、液体空気の酸素濃度が約30％であるので、酸
素量の約４〜５倍程度の量の液体空気を上塔６へ
供給する必要がある。なお、窒素は、下塔４上部
より抜出され、導管２０を経て主熱交換器２で温
度回復後、導管２１より製品窒素として採取さ
れ、また、酸素は、上塔６下部より抜出され、導
管２２を経て主熱交換器２で温度回復後、導管２
３より製品酸素として採取される。酸素が分離さ
れた残りの廃ガスは、上塔６上部より抜出され、
導管２４を経て主熱交換器２で温度回復後、導管
２５より不純窒素として取出される。 A conventional air separation method and apparatus using a cryogenic separation method will be explained with reference to FIG. FIG. 1 is a process system diagram showing the basic configuration of an air separation device that extracts a large amount of nitrogen whose pressure is about 1 kg/cm 2 G lower than the pressure of the raw air and also extracts a small amount of oxygen. In Figure 1, the raw air with a pressure of approximately 6Kg/cm 2 G is piped into conduit 1.
It is then supplied to the main heat exchanger 2, where it is cooled down to about -170°C, and then supplied to the lower rectification column (hereinafter abbreviated as the lower column) 4 via the conduit 3. The lower column 4 is equipped with a large number of trays 5, from the upper part of which the product nitrogen comes, and from the lower part the oxygen content of about 30%.
A certain amount of liquid air is extracted. In this case, lower tower 4
The amount of product nitrogen that can be extracted from the upper part includes the operating pressure of the lower column 4, the number of trays, the purity of the product nitrogen, and the oxygen content.
A theoretical upper limit exists due to the thermodynamic properties of air components such as nitrogen and argon. For example, lower tower 4
In order to obtain high purity nitrogen of 99.9% or higher at an operating pressure of approximately 6 Kg/cm 2 G, it is necessary to supply feed air in an amount approximately 2.5 to 3 times the amount of product nitrogen to the lower column 4. The liquid air extracted from the lower part of the lower column 4 is used as a raw material for obtaining product oxygen from the lower part of the upper column (hereinafter referred to as the upper column) 6 of the rectification column. After expanding to an operating pressure of approximately 0.4Kg/cm 2 G, conduit 9
It is supplied to the upper part of the upper tower 6 through. In addition, to the upper part of the upper tower 6, air is diverted from the feed air in the middle of the main heat exchanger 2 and passed through the conduit 10, valve 11, and conduit 12, and air is diverted from the feed air in the middle of the conduit 3, 13. The air that has passed through the valve 14 joins and is supplied via a conduit 15 to an expansion turbine 16, which is a device for compensating the cooling loss of the air separation device, and the air expanded in the expansion turbine 16 is also supplied via a conduit 17. Ru. The liquid air supplied to the upper part of the upper tower 6 is
It flows down on the tray 18 installed in the upper column 6, evaporates in the main condenser 19 installed at the bottom of the upper column 6, and is rectified while coming into contact with the steam rising in the upper column 6, with a concentration of more than 99%. Pure oxygen is obtained at the bottom of the upper column 6. In this case, the minimum amount of liquid air necessary to separate oxygen is determined by the operating pressure of the upper column 6, the number of trays 18, the oxygen concentration of the liquid air, the purity of the product oxygen, and the amount of air such as oxygen, nitrogen, argon, etc. It can be calculated theoretically based on the thermodynamic properties of the components. For example, if the operating pressure of the upper tower 6 is
In order to obtain high-purity oxygen with a purity of 99% or higher at 0.4Kg/cm 2 G, the oxygen concentration of liquid air is approximately 30%, so an amount of liquid air that is approximately 4 to 5 times the amount of oxygen must be added to the upper tower. It is necessary to supply it to 6. Note that nitrogen is extracted from the upper part of the lower column 4, passes through the conduit 20, recovers its temperature in the main heat exchanger 2, and is then collected as product nitrogen from the conduit 21, and oxygen is extracted from the lower part of the upper column 6. , after temperature recovery in main heat exchanger 2 via conduit 22, conduit 2
3, it is collected as product oxygen. The remaining waste gas from which oxygen has been separated is extracted from the upper part of the upper column 6,
After passing through the conduit 24 and recovering the temperature in the main heat exchanger 2, it is taken out through the conduit 25 as impure nitrogen.
上記のような構成およびプロセスを有する従来
の空気分離装置では、酸素量と無関係に液体空気
量が決まつてしまうため、下塔５で窒素を分離し
た残りの液体空気の全量が上塔６へ供給されるこ
とになり、少量の酸素しか必要ない場合は、液体
空気の圧力約６Kg/cm2Gが利用されずに0.4Kg/cm2G
まで圧力を無駄に低下させており、エネルギが十
分利用できないといつた欠点があつた。また、液
体空気の酸素濃度の関係から上塔６の塔径をこれ
以上細く、かつ棚段数を少なくできないといつた
問題もあつた。 In conventional air separation equipment having the above configuration and process, the amount of liquid air is determined regardless of the amount of oxygen, so the entire amount of liquid air remaining after nitrogen is separated in the lower column 5 is sent to the upper column 6. If only a small amount of oxygen is required, the liquid air pressure of approximately 6Kg/cm 2 G will be unused and will be reduced to 0.4Kg/cm 2 G.
The disadvantage was that the pressure was wasted to a point where the energy was not fully utilized. There was also the problem that the diameter of the upper column 6 could not be made any smaller and the number of plates could not be reduced due to the oxygen concentration of the liquid air.
本発明の目的は、上記欠点の除去および上記問
題の解決を目的としたもので、圧力約６Kg/cm2G
の液体空気を選定された操作圧力下において蒸発
させるためのリボイラコンデンサを設置し、リボ
イラコンデンサで液体空気から蒸発した空気によ
り膨張タービンを駆動し寒冷を発生させ、空気分
離装置の寒冷損失の補償を行い、また、リボイラ
コンデンサ内で酸素濃度が一段と高まつた液体空
気をリボイラコンデンサから上塔に供給すること
を特徴とする空気分離法及び装置を提供するもの
である。 The purpose of the present invention is to eliminate the above-mentioned drawbacks and solve the above-mentioned problems .
A reboiler condenser is installed to evaporate the liquid air under a selected operating pressure, and the air evaporated from the liquid air in the reboiler condenser drives an expansion turbine to generate refrigeration, thereby compensating for the refrigeration loss of the air separation device. The present invention also provides an air separation method and apparatus characterized in that liquid air whose oxygen concentration is further increased in the reboiler condenser is supplied from the reboiler condenser to the upper tower.
本発明の一実施例を第２図により説明する。第
２図で、第１図と同一機器等は同一符号で示し説
明を省略する。２６は下塔４上部に設置された第
１リボイラコンデンサで、第１リボイラコンデン
サ２６上部は、下塔４下部と膨張弁８を継部に設
けた導管７，２７により連結されている。また、
第１リボイラコンデンサ２６他の上部からの導管
２８が主熱交換器２内を通り膨張タービン１６の
入口側に連結され、膨張タービン１６の出口側か
らの導管２９は上塔６上部から主熱交換器２に入
る導管２４に連結されている。更に、第１リボイ
ラコンデンサ２６下部と上塔６上部は膨張弁３１
を継部に設けた導管３０，３２により連結されて
いる。３３は上塔６底部に設置された第２リボイ
ラコンデンサである。 An embodiment of the present invention will be described with reference to FIG. In FIG. 2, the same equipment as in FIG. 1 is denoted by the same reference numerals and the explanation thereof will be omitted. Reference numeral 26 denotes a first reboiler condenser installed at the upper part of the lower tower 4. The upper part of the first reboiler condenser 26 is connected to the lower part of the lower tower 4 by conduits 7 and 27 having an expansion valve 8 at the joint. Also,
A conduit 28 from the top of the first reboiler condenser 26 passes through the main heat exchanger 2 and is connected to the inlet side of the expansion turbine 16, and a conduit 29 from the outlet side of the expansion turbine 16 connects to the top of the upper tower 6 for main heat exchange. It is connected to a conduit 24 that enters the vessel 2. Furthermore, the lower part of the first reboiler condenser 26 and the upper part of the upper tower 6 are provided with an expansion valve 31.
They are connected by conduits 30 and 32 provided at the joint. 33 is a second reboiler condenser installed at the bottom of the upper tower 6.
このような構成によれば、圧力が約６Kg/cm2G
の原料空気は導管１より主熱交換器２へ供給さ
れ、ここで約−170℃まで冷却された後に導管３
を経て下塔４に供給される。その後、下塔４上部
から製品窒素が量的に従来技術と同様の制限を受
け抜出される。一方、下塔４下部からは酸素分約
30％程度の液体空気が抜出され、導管７、膨張弁
８、導管２７を経て第１リボイラコンデンサ２６
に供給される。この場合、第１リボイラコンデン
サ２６の操作圧力は、液体空気が下塔４上部の窒
素で熱せられ蒸発できる程度の圧力（約１〜３
Kg/cm2G）に選定される。第１リボイラコンデン
サ２６で液体空気より蒸発した空気は、導管２８
により主熱交換器に戻り、原料空気と熱交換して
約−160℃近傍まで温度回復し、導管２８を経て
膨張タービン１６に供給される。膨張タービン１
６で約0.4Kg/cm2Gまで断熱膨張することにより、
寒冷が発生し、空気の温度が低下し、空気分離装
置の寒冷損失が補償される。この場合、膨張ター
ビン１６に別途原料空気を供給する必要がなく、
窒素および酸素採取用の原料空気のみで済むた
め、原料空気量が減量でき、省エネルギとなる。
その後、膨張タービン１６を出た空気は導管２９
を経て上塔６からの廃ガスと合流し導管２４を経
て主熱交換器２で温度回復した後に導管２５より
不純窒素として取出される。 According to such a configuration, the pressure is approximately 6 Kg/cm 2 G
The feed air of
It is supplied to the lower tower 4 through. Thereafter, the product nitrogen is extracted from the upper part of the lower column 4, subject to the same quantitative limitations as in the prior art. On the other hand, the oxygen fraction from the lower part of lower tower 4
Approximately 30% of the liquid air is extracted and passes through the conduit 7, expansion valve 8, and conduit 27 to the first reboiler condenser 26.
supplied to In this case, the operating pressure of the first reboiler condenser 26 is a pressure (approximately 1 to 3
Kg/cm 2 G). The air evaporated from the liquid air in the first reboiler condenser 26 is transferred to the conduit 28
The air then returns to the main heat exchanger, where it exchanges heat with the feed air to recover the temperature to around -160°C, and is supplied to the expansion turbine 16 via the conduit 28. expansion turbine 1
By adiabatically expanding to approximately 0.4Kg/cm 2 G at 6,
Chilling occurs, the temperature of the air decreases, and the cooling losses of the air separation device are compensated. In this case, there is no need to separately supply raw material air to the expansion turbine 16,
Since only the raw air for nitrogen and oxygen extraction is required, the amount of raw air can be reduced, resulting in energy savings.
The air leaving the expansion turbine 16 is then directed to the conduit 29
It joins with the waste gas from the upper tower 6, passes through a conduit 24, recovers its temperature in the main heat exchanger 2, and is then taken out as impure nitrogen through a conduit 25.
この場合、下塔４から抜出された液体空気の全
てが第１リボイラコンデンサ２６で蒸発する訳で
はなく、その一部は、更に酸素濃度が高まつた液
体空気（酸素分約50〜60％）として第１リボイラ
コンデンサ２６の下部から抜出され導管３０、膨
張弁３１、導管３２を経て上塔６上部へ供給さ
れ、酸素を分離する原料として使用される。この
場合、酸素の分離に酸素濃度が高い液体空気を用
いるので、液体空気の使用量は従来に比べ更に少
量で済み、したがつて、上塔６の塔径を細く、か
つ、棚段数を削減することができる。上塔６で分
離された酸素は、第２リボイラコンデンサ３３の
上部から抜出され、導管２２を経て主熱交換器２
で温度回復後、導管２３より製品酸素として採取
される。一方、酸素が分離された残りの廃ガスは
上塔６上部より抜出され、導管２４で膨張タービ
ン１６からの空気と合流し、主熱交換器２で温度
回復後、導管２５より不純窒素として取出され
る。 In this case, not all of the liquid air extracted from the lower tower 4 is evaporated in the first reboiler condenser 26, but some of it is evaporated into liquid air with an even higher oxygen concentration (oxygen content of about 50 to 60%). ) is extracted from the lower part of the first reboiler condenser 26 and supplied to the upper part of the upper column 6 through the conduit 30, expansion valve 31, and conduit 32, and is used as a raw material for separating oxygen. In this case, since liquid air with a high oxygen concentration is used to separate oxygen, the amount of liquid air used is even smaller than in the past.Therefore, the diameter of the upper column 6 can be made smaller and the number of plates can be reduced. can do. The oxygen separated in the upper column 6 is extracted from the upper part of the second reboiler condenser 33 and sent to the main heat exchanger 2 through the conduit 22.
After the temperature has recovered, the oxygen product is collected from the conduit 23 as product oxygen. On the other hand, the remaining waste gas from which oxygen has been separated is extracted from the upper part of the upper tower 6, joins with the air from the expansion turbine 16 in the conduit 24, and after its temperature is recovered in the main heat exchanger 2, it is passed through the conduit 25 as impure nitrogen. taken out.
本発明は、以上説明したように、空気分離装置
の精留塔下塔上部に第１リボイラコンデンサを、
また、精留塔上塔底部に第２リボイラコンデンサ
を設置し、第１リボイラコンデンサで、かつ、選
定された操作圧力下において、精留塔下塔より抜
出された酸素分に富んだ液体空気から蒸発した空
気を利用し空気分離装置の寒冷損失の補償が行え
るので原料空気量を減量でき省エネルギを達成で
きる効果があり、また、第１リボイラコンデンサ
で蒸発し酸素濃度が更に高まつた液体空気を酸素
を分離する原料として使用するので精留塔上塔の
塔径を細く、かつ、棚段数を削減できる効果もあ
る。 As explained above, the present invention includes a first reboiler condenser in the upper part of the lower column of the rectification column of the air separation device.
In addition, a second reboiler condenser is installed at the bottom of the upper column of the rectification column, and the oxygen-rich liquid air extracted from the lower column of the rectification column is collected at the first reboiler condenser under the selected operating pressure. The evaporated air can be used to compensate for the cooling loss of the air separation equipment, which has the effect of reducing the amount of raw air and achieving energy savings.In addition, the liquid air that is evaporated in the first reboiler condenser and has an even higher oxygen concentration Since it is used as a raw material for separating oxygen, it is possible to reduce the diameter of the upper column of the rectification column and reduce the number of plates.
第１図は、従来の深冷分離法による空気分離法
および装置を説明するもので、原料空気の圧力よ
り約１Kg/cm2G程度圧力の低い窒素を採取し、か
つ、少量の酸素を採取する空気分離装置の基本構
成を示すプロセス系統図である。第２図は、本発
明による窒素を多量に採取し、かつ、酸素を少量
採取する空気分離装置の基本構成を示すプロセス
系統図である。
２……主熱交換器、４……精留塔下塔、６……
精留塔上塔、１６……膨張タービン、２６……第
１リボイラコンデンサ、３３……第２リボイラコ
ンデンサ。
Figure 1 explains the air separation method and equipment using the conventional cryogenic separation method. Nitrogen is collected at a pressure approximately 1 kg/cm 2 G lower than the pressure of the raw air, and a small amount of oxygen is also collected. 1 is a process system diagram showing the basic configuration of an air separation device. FIG. 2 is a process system diagram showing the basic configuration of an air separation device according to the present invention that extracts a large amount of nitrogen and a small amount of oxygen. 2... Main heat exchanger, 4... Fractionation column lower column, 6...
Rectification column upper column, 16... expansion turbine, 26... first reboiler condenser, 33... second reboiler condenser.
Claims (1)
に採取し、かつ、酸素を少量採取する空気分離法
において、該空気分離法による空気分離装置の精
留塔下塔底部の液体空気を所定の圧力下で蒸発さ
せ、蒸発した空気を膨張タービンに導入して空気
分離装置の寒冷損失を補償するとともに、前記蒸
発により酸素濃度が高くなつた液体空気を精留塔
上塔に環流液として導入することを特徴とする空
気分離法。 ２ 深冷分離法による空気分離装置で、精留塔下
塔、精留塔上塔、膨張タービンおよび主熱交換器
等で構成され、窒素を多量に採取し、かつ、酸素
を少量採取する空気分離装置において、前記精留
塔下塔上部に第１リボイラコンデンサを設置し、
第１リボイラコンデンサ上部と精留塔下塔下部を
膨張弁を途中に設けた導管で、第１リボイラコン
デンサ下部と前記精留塔上塔上部を膨張弁を途中
に設けた導管で、第１リボイラコンデンサ部と前
記膨張タービン入口側とを途中前記主熱交換器内
を通る導管でそれぞれ連結し、膨張タービン出口
側導管を精留塔上塔からの廃ガス抜出し用導管に
主熱交換器入口前部で連結し、精留塔上塔底部に
第２リボイラコンデンサを設置したことを特徴と
する空気分離装置。[Scope of Claims] 1. In an air separation method using a cryogenic separation method, in which a large amount of nitrogen is collected and a small amount of oxygen is collected, the bottom of the column below the rectification column of an air separation device using the air separation method. The liquid air is evaporated under a predetermined pressure, and the evaporated air is introduced into an expansion turbine to compensate for the cooling loss of the air separation device. An air separation method characterized by introducing the reflux liquid into the air. 2 Air separation equipment using cryogenic separation method, consisting of a lower rectification column, an upper rectification column, an expansion turbine, a main heat exchanger, etc., which extracts a large amount of nitrogen and a small amount of oxygen. In the apparatus, a first reboiler condenser is installed at the upper part of the lower column of the rectification column,
The upper part of the first reboiler condenser and the lower part of the lower column of the rectification column are connected by a conduit with an expansion valve in the middle, and the lower part of the first reboiler condenser and the upper part of the upper column of the rectification column are connected by a conduit with an expansion valve in the middle. and the expansion turbine inlet side are connected to each other by a conduit that passes through the main heat exchanger midway, and the expansion turbine outlet side conduit is connected to the conduit for extracting waste gas from the upper column of the rectification column at the front of the main heat exchanger inlet. An air separation device characterized in that a second reboiler condenser is installed at the top and bottom of a rectification column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11368481A JPS5816175A (en) | 1981-07-22 | 1981-07-22 | Air separation method and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11368481A JPS5816175A (en) | 1981-07-22 | 1981-07-22 | Air separation method and equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5816175A JPS5816175A (en) | 1983-01-29 |
| JPS6119904B2 true JPS6119904B2 (en) | 1986-05-20 |
Family
ID=14618550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11368481A Granted JPS5816175A (en) | 1981-07-22 | 1981-07-22 | Air separation method and equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5816175A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62152194U (en) * | 1986-03-19 | 1987-09-26 |
-
1981
- 1981-07-22 JP JP11368481A patent/JPS5816175A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5816175A (en) | 1983-01-29 |
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