JPS61200657A - Sample slightly-moving device for electron microscope or the like - Google Patents
Sample slightly-moving device for electron microscope or the likeInfo
- Publication number
- JPS61200657A JPS61200657A JP60038768A JP3876885A JPS61200657A JP S61200657 A JPS61200657 A JP S61200657A JP 60038768 A JP60038768 A JP 60038768A JP 3876885 A JP3876885 A JP 3876885A JP S61200657 A JPS61200657 A JP S61200657A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- axis
- fine movement
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は電子顕微鏡等の試料微動装置に係り、特に多試
料ホルダー装置に好適な試料倣動装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a sample fine movement device for an electron microscope or the like, and particularly to a sample movement device suitable for a multi-sample holder device.
ｌｌ数個の試料を収納し得る試料台を備えた多試料ホル
ダーは公昶である（特願昭５ｌ−９８１６１）。A multi-sample holder equipped with a sample stand capable of storing several samples is publicly available (Japanese Patent Application No. 51-98161).
しかしこれを装着する試料微動装置のＸ方向の駆動軸は
、多試料ホルダーの中心軸と一致しているため試料台を
移動させるだけの空間がとれないので、事実上実施困難
であった。However, since the drive axis in the X direction of the sample fine movement device to which this device is attached coincides with the central axis of the multi-sample holder, there is not enough space to move the sample stage, making it practically difficult to implement.
本発明の目的は、多試料ホルダーを含む、視野中心傾斜
の試料微動傾斜装置の提供にある。An object of the present invention is to provide a fine specimen tilting device that includes a multi-sample holder and tilts the center of the field of view.
試料微動傾斜装置の試料傾斜軸とＸ方向駆動軸が従来一
致していたが、必ずしも一致している必要はなく、試料
微動機能、傾斜機能をそこなはない範囲内で、両者をず
らしてやることにより、試料台移動のための空間を確保
できることに気付いた。Conventionally, the sample tilting axis and the X-direction drive axis of the sample fine movement tilting device were aligned, but they do not necessarily have to be aligned, and they should be shifted within a range that does not impede the sample fine movement function and tilting function. We realized that this allows us to secure space for moving the sample stage.
以下、本発明の一実施例を図により説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第１図は試料ホルダーのところで、電子顕微鏡を横断し
、上部から見た図である。第２図は第１図のＡ−Ａ’断
面図である。１は鏡筒、２は試料微動傾斜台、３は試料
微動傾斜台に装着された多試料ホルダーである。３に４
試料台２０が設けられており、それに試料５ａ〜５ｅま
で５ケの試料が収納されている。図では５ｄの試料が鏡
筒の中心、即ち、検鏡状態に置かれた様子を表わしてい
る。FIG. 1 is a view from above, across the electron microscope, at the sample holder. FIG. 2 is a sectional view taken along the line AA' in FIG. 1 is a lens barrel, 2 is a sample fine movement tilt table, and 3 is a multi-sample holder attached to the sample fine movement tilt table. 3 to 4
A sample stand 20 is provided, and five samples 5a to 5e are stored therein. In the figure, the sample 5d is placed in the center of the lens barrel, that is, in the microscope state.
試料５ｄはツマミ４をまわすことにより、球体軸受１０
を中心とし、スプリング１６とのつシ合いにおいて、Ｘ
方向に動かすことができる。又Ｘ方向の移動については
、第２図による説明が容易である。駆動台Ｌ３に取付け
られたツマミ」５をまわすことによシ、テコ１４が動き
、これと運動している駆動軸１１、連結棒■２が動き、
多試料ホルダー３を動かすことができ、３に取シ付けら
れている試料台２０およびこれに収納されている試料を
Ｘ方向に動かすことができる。多試料ホルダー３は球体
軸受１０を介して、試料微動傾斜台２に取シ付けられて
いるとき、鏡筒内は真空に保たれているため、多試料ホ
ルダー３は常に大気圧で鏡筒内に押される状態となシ、
多試料ホルダー３の接触部１７が連結棒１２に常に押し
つけられているため、ツマミ１５の動きにつシ合ってＸ
方向の動きとなる。By turning the knob 4, the sample 5d has a spherical bearing 10.
, and in conjunction with the spring 16,
It can be moved in the direction. Further, the movement in the X direction can be easily explained using FIG. By turning the knob ``5'' attached to the drive base L3, the lever 14 moves, and the drive shaft 11 and connecting rod ■2 that move with it move.
The multi-sample holder 3 can be moved, and the sample stand 20 attached to the holder 3 and the samples stored therein can be moved in the X direction. When the multi-sample holder 3 is attached to the sample fine tilting table 2 via the spherical bearing 10, the inside of the lens barrel is kept in a vacuum, so the multi-sample holder 3 is always kept at atmospheric pressure inside the lens barrel. When pressed,
Since the contact part 17 of the multi-sample holder 3 is always pressed against the connecting rod 12, it follows the movement of the knob 15 and
It becomes a movement in the direction.
これらＸ、Ｘ方向の試料の移動は検鏡視野選択のための
もので、その移動範囲は通常、試料１ヶ分を微動させる
程度のものである。試料５ａ〜５ｅの任意の試料を検鏡
位置に持ってくるためには、ツマミ９をまわして、試料
台２ｏと連結している軸７に設けられたビン８を溝６ａ
〜６ｅのどこかに持ってくることによって行われる。ギ
ヤー１８をまわすことによシ、ウオームギヤー１９を介
して、試料微動傾斜台２はその軸ｘ−ｘ’を中心に回転
する。これに伴い、試料５は軸ｘ−ｘ’を含む面に設け
られているため、検鏡試料は軸ＸＸ／を中心に傾斜する
。そして、ツマミ９をまわして多試料ホルダーの軸方に
移動させれば、試料台２０は軸ｘ−ｃ’を含んだ面で移
動する。一方Ｘ方向の駆動部の軸ＸＩ ＸＩ’は試料台
２ｏの移動のさまたげとならないよう、軸Ｘ−Ｘ’とは
少し離れた位置に設けられている。従来は、軸ＸＸ／と
軸ＸＩ Ｋ！’が一牧していたため、試料台移動のため
の充分な空間がとれなかった。The movement of the sample in these X and X directions is for selecting the speculum field of view, and the range of movement is usually such that it slightly moves one sample. In order to bring any of the samples 5a to 5e to the microscope position, turn the knob 9 to move the bottle 8 provided on the shaft 7 connected to the sample stage 2o into the groove 6a.
This is done by bringing it somewhere between ~6e. By turning the gear 18 and via the worm gear 19, the sample fine tilting table 2 is rotated about its axis x-x'. Accordingly, since the sample 5 is provided on a plane including the axis xx', the speculum sample is tilted around the axis XX/. When the knob 9 is turned to move the multi-sample holder in the axial direction, the sample stage 20 moves in a plane including the axis x-c'. On the other hand, the axis XI XI' of the drive unit in the X direction is provided at a position slightly apart from the axis XX' so as not to interfere with the movement of the sample stage 2o. Conventionally, axis XX/ and axis XI K! Because the sample was being moved all the time, there was not enough space to move the sample stage.
本発明では、軸ｘ−ｘ’、と軸ＸＩ Ｘｔ’とを一致さ
せないことにより、試料台移動に必要充分な空間を設け
ることができる。図では試料５ヶ同時装着の例を示した
が、鏡筒の大＠埒に応じ、必要なら５ケ以上の試料を同
時装着可能な装置とすることも可能である。In the present invention, by not making the axes xx' and the axes XI-Xt' coincide with each other, it is possible to provide sufficient space for moving the sample stage. Although the figure shows an example in which five samples are mounted at the same time, depending on the size of the lens barrel, it is also possible to make the device capable of simultaneously mounting five or more samples, if necessary.
電子顕微鏡の試料微動装置としてはかならずしも傾斜機
能を必要としない場合もあるが、その場合も多試料用試
料微動装置として、軸ｘ−ｘ’と軸ＸＩ Ｘ＋’を必
要な量だけ離して設ければよい。Although there are cases in which a tilting function is not necessarily required as a specimen fine movement device for an electron microscope, in that case, as a sample fine movement device for multiple samples, the axis x-x' and the axis XI Bye.
本発明によれば、従来２〜３ケの試料しか装着できなか
った多試料ホルダーが、一度に鏡筒の空間のゆるすかぎ
シ多くの試料を装着可能な多試料ホルダーを使用するこ
とができるので、生物試料等、多数の試料を迅速に処理
する必要がある場合はその効果極めて大である。According to the present invention, a multi-sample holder that conventionally could only mount two or three samples can be used as a multi-sample holder that can mount many samples at once by loosening the space in the lens barrel. The effect is extremely large when a large number of samples, such as biological samples, need to be processed quickly.
第１図は本発明夷派例の電子顕微鏡の試料ホルダ一部で
の横断面図、第２図は第１図のルーＡ′断面図でるる。FIG. 1 is a cross-sectional view of a part of a sample holder of an electron microscope according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view along line A' of FIG.
Claims (1)
とも試料微動（傾斜）台とこれに装着された多試料ホル
ダーおよび、該多試料ホルダーをｘ方向に微動させるた
めの駆動部よりなる試料微動（傾斜）装置において、該
試料微動（傾斜）台の軸Ｘ−Ｘ′とｘ方向の駆動軸Ｘ＿
１−Ｘ＿１′との間に、該多試料ホルダー内に設けられ
た試料台移動のさまたげとならないよう必要な隔りを設
けたことを特徴とする電子顕微鏡等の試料微動装置。1. Attached to the side wall of the lens barrel of an electron microscope, etc., it consists of at least a sample fine movement (tilt) table, a multi-sample holder attached to this, and a drive unit for finely moving the multi-sample holder in the x direction. In the sample fine movement (tilting) device, the axis X-X' of the sample fine movement (tilting) table and the drive axis X_ in the x direction
A specimen fine movement device for an electron microscope or the like, characterized in that a necessary distance is provided between the sample table 1-X_1' and the sample stage provided in the multi-sample holder so as not to obstruct movement of the sample table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60038768A JPH073773B2 (en) | 1985-03-01 | 1985-03-01 | Sample fine movement device such as electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60038768A JPH073773B2 (en) | 1985-03-01 | 1985-03-01 | Sample fine movement device such as electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61200657A true JPS61200657A (en) | 1986-09-05 |
| JPH073773B2 JPH073773B2 (en) | 1995-01-18 |
Family
ID=12534469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60038768A Expired - Lifetime JPH073773B2 (en) | 1985-03-01 | 1985-03-01 | Sample fine movement device such as electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073773B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001066231A (en) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | Sample preparation apparatus and sample preparation method |
| KR101085099B1 (en) | 2009-02-12 | 2011-11-21 | 에이피텍 주식회사 | Rotator of transmission electron microscope sample |
| JP2013008633A (en) * | 2011-06-27 | 2013-01-10 | Jeol Ltd | Sample holder and transmission electron microscope system |
-
1985
- 1985-03-01 JP JP60038768A patent/JPH073773B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001066231A (en) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | Sample preparation apparatus and sample preparation method |
| KR101085099B1 (en) | 2009-02-12 | 2011-11-21 | 에이피텍 주식회사 | Rotator of transmission electron microscope sample |
| JP2013008633A (en) * | 2011-06-27 | 2013-01-10 | Jeol Ltd | Sample holder and transmission electron microscope system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073773B2 (en) | 1995-01-18 |
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