JPS6120848B2 - - Google Patents
Info
- Publication number
- JPS6120848B2 JPS6120848B2 JP55142258A JP14225880A JPS6120848B2 JP S6120848 B2 JPS6120848 B2 JP S6120848B2 JP 55142258 A JP55142258 A JP 55142258A JP 14225880 A JP14225880 A JP 14225880A JP S6120848 B2 JPS6120848 B2 JP S6120848B2
- Authority
- JP
- Japan
- Prior art keywords
- rotating polygon
- polygon mirror
- linearly polarized
- laser
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 2
- 230000010287 polarization Effects 0.000 description 14
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Facsimile Scanning Arrangements (AREA)
- Dot-Matrix Printers And Others (AREA)
Description
【発明の詳細な説明】
本発明は、電子写真記録装置等に用いられる直
線偏光レーザーを用いた光走査装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical scanning device using a linearly polarized laser used in electrophotographic recording devices and the like.
レーザービームを用いて入力画信号に対応した
画像を感光層上に書込むレーザー記録装置等は、
一般に、レーザー管から発振されたレーザービー
ムを入力信号に応じて変調させる光変調器と、変
調した光を水平方向に掃引する回転多面鏡と、書
込むべき感光層上に集光し、かつ一方から他方へ
同一速度でスポツト光を移動させる−θレンズ
等から構成されている。ところが、これらのレー
ザー走査光学系を構成する部品の中には、光変調
器あるいは回転多面鏡のように入射する光の偏光
方向により特性が変化するものがあり、特に、
PbM0O4,TeO2などの結晶を超音波媒体として使
用する光変調器は、入射光の偏光方向によつて回
折効率が変化し、また、反射面にAl蒸着面+SiO
保護膜で形成した通常の回転多面鏡は、光の入射
角及び偏光方向によつて反射率が変化する特性を
持つ。このため、無偏光タイプのガスレーザーを
用いた場合には、偏光方向が時間的経過とともに
ランダムに変化し、光変調器の回折効率あるいは
回転多面鏡の反射率が時間的に変化して安定的な
書込みが行えないので、これまでの光走査装置に
は直線偏光タイプのガスレーザーが使用されてき
ていたが、このようなガスレーザーを用いても、
回転多面鏡が持つ反射率の角度依存性により光走
査の偏光角によつて反射強度が変化するため、特
に中間調を出さねばならないような場合には、シ
エーテイング現象と呼ばれる露光ムラの発生を抑
えることができなかつた。 Laser recording devices, etc. that use a laser beam to write an image corresponding to an input image signal on a photosensitive layer,
In general, an optical modulator modulates a laser beam emitted from a laser tube according to an input signal, a rotating polygon mirror that sweeps the modulated light in the horizontal direction, and a rotating polygon mirror that focuses the light onto the photosensitive layer to be written, and one side. It consists of a -θ lens, etc. that moves the spot light from one spot to the other at the same speed. However, some of the components that make up these laser scanning optical systems, such as optical modulators or rotating polygon mirrors, have characteristics that change depending on the polarization direction of the incident light.
Optical modulators that use crystals such as PbM 0 O 4 and TeO 2 as ultrasonic media have diffraction efficiency that changes depending on the polarization direction of the incident light.
A normal rotating polygon mirror formed with a protective film has a characteristic that its reflectance changes depending on the incident angle and polarization direction of light. Therefore, when a non-polarized gas laser is used, the polarization direction changes randomly over time, and the diffraction efficiency of the optical modulator or the reflectance of the rotating polygon mirror changes over time, making it stable. Conventional optical scanning devices have used linearly polarized gas lasers because of the inability to perform detailed writing, but even with such gas lasers,
Due to the angular dependence of the reflectance of a rotating polygon mirror, the reflection intensity changes depending on the polarization angle of light scanning, so it suppresses the occurrence of exposure unevenness called the shading phenomenon, especially when intermediate tones must be produced. I couldn't do it.
本発明は、直線偏光レーザーの偏光振動方向が
回転多面鏡の回転軸と平行な面内で振動するS偏
光及び、回転軸と直角な面内で振動するP偏光に
対して、回転多面鏡の反射率が入射角度に応じて
変化し、これがシエーデイング現象を起す原因を
なす点に着目し、上述した問題を簡単な装置によ
り解決し得る新たな光走査方式を提案することを
目的とするものであり、その特徴とするところ
は、直線偏光レーザーの偏光振動方向を回転多面
鏡の回転軸に対してほぼ45゜に設定した点にあ
る。 The present invention provides a rotating polygon mirror for S-polarized light in which the polarization vibration direction of a linearly polarized laser oscillates in a plane parallel to the rotation axis of the rotating polygon mirror, and P-polarized light in which the polarization vibration direction of a linearly polarized laser oscillates in a plane perpendicular to the rotation axis. Focusing on the fact that the reflectance changes depending on the angle of incidence, which is the cause of the shedding phenomenon, the purpose of this project is to propose a new optical scanning method that can solve the above-mentioned problems with a simple device. Its feature is that the polarization vibration direction of the linearly polarized laser is set at approximately 45 degrees with respect to the rotation axis of the rotating polygon mirror.
すなわち、第1図に示すように、ガスレーザー
管aより発振された直線偏光レーザーの偏光振動
方向が、回転多面鏡bの回転軸と平行な面で振動
するS偏光と、回転軸と直角な面内で振動するP
偏光に対して、Al蒸着面にSiOの保護膜を設けた
回転多面鏡bの反射率は、Alの膜厚、SiOの膜
厚、SiOの蒸着条件等により若干の違いがある
が、第2図に見られるように、いずれも反射角が
大きくなるにしたがつて増加もしくは減少する。
ところが、回転多面鏡bの回転軸と45゜をなす面
内で振動するP+S偏光に対する回転多面鏡bの
反射率は、上記したS偏光、P偏光の中間に位置
して、入射角如何にかかわらずほぼ一定の値を示
すことがわかつた。第2図においては、P+S偏
光が入射角に応じて若干増加傾向にあるが、これ
は偏光の45゜方向へのセツトが正確でないことに
起因するものと考えられ、45゜にセツトした幾つ
かの実験結果によれば反射率は88.3〜88.8%を示
し、この点から回転多面鏡bに対する入射ビーム
の偏光方向はP+S偏光、つまり、回転多面鏡b
の回転軸に対して斜め45゜方向が良いと云える。 That is, as shown in Fig. 1, the polarization vibration directions of the linearly polarized laser emitted from the gas laser tube a are S-polarized light that vibrates in a plane parallel to the rotation axis of the rotating polygon b, and S-polarized light that vibrates in a plane perpendicular to the rotation axis. P vibrating in the plane
The reflectance of rotating polygon mirror b, which has a protective film of SiO on the Al evaporation surface, for polarized light varies slightly depending on the Al film thickness, SiO film thickness, SiO evaporation conditions, etc. As seen in the figure, both increase or decrease as the reflection angle increases.
However, the reflectance of the rotating polygon b for P+S polarized light vibrating in a plane making an angle of 45 degrees with the rotation axis of the rotating polygon b is located between the above-mentioned S polarized light and P polarized light, regardless of the incident angle. It was found that the value was almost constant. In Figure 2, the P+S polarization tends to increase slightly depending on the incident angle, but this is thought to be due to the fact that the polarization is not set accurately in the 45° direction. According to the experimental results of
It can be said that a direction at an angle of 45° with respect to the axis of rotation is best.
以上のように、回転多面鏡の回転軸に対する直
線偏光レーザーの偏光振動方向をほぼ45゜に設定
することにより、入射角が大きくなるにしたがつ
て反射率が増加するS偏光と、減少するP偏光の
ほぼ中間値が得られ、入射角如何にかかわらず反
射率の変化を最小に止どめることができ、シエー
デイング現象のない良好な画像形成が可能とな
る。 As described above, by setting the polarization vibration direction of the linearly polarized laser to approximately 45 degrees with respect to the rotation axis of the rotating polygon mirror, the S-polarized light whose reflectance increases as the incident angle increases, and the P-polarized light whose reflectance decreases as the incident angle increases. A substantially intermediate value of polarization can be obtained, and changes in reflectance can be kept to a minimum regardless of the incident angle, making it possible to form good images without any shedding phenomenon.
第1図は、回転多面鏡に対する直線偏光レーザ
ーの偏光振動方向を説明する図、第2図は、各種
の偏光々に対する回転多面鏡の反射率角度特性を
示す図である。
a……ガスレーザー管、b……回転多面鏡。
FIG. 1 is a diagram illustrating the direction of polarization vibration of a linearly polarized laser with respect to a rotating polygon mirror, and FIG. 2 is a diagram showing reflectance angle characteristics of the rotating polygon mirror with respect to various types of polarized light. a...Gas laser tube, b...Rotating polygon mirror.
Claims (1)
し、変調した光を回転多面鏡を用いて記録媒体上
に掃引して書込む形式の直線偏光レーザーを用い
た光走査装置において、上記直線偏光レーザーの
偏光振動方向を上記回転多面鏡の回転軸に対して
ほぼ45゜方向に設定したことを特徴とする直線偏
光レーザーを用いた光走査方式。1. In an optical scanning device using a linearly polarized laser that modulates the linearly polarized laser according to an input signal and sweeps and writes the modulated light onto a recording medium using a rotating polygon mirror, the linearly polarized laser is An optical scanning method using a linearly polarized laser, characterized in that the direction of polarized light vibration is set at approximately 45 degrees with respect to the rotation axis of the rotating polygon mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55142258A JPS5766416A (en) | 1980-10-09 | 1980-10-09 | Photoscanning system using linear polarizing laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55142258A JPS5766416A (en) | 1980-10-09 | 1980-10-09 | Photoscanning system using linear polarizing laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5766416A JPS5766416A (en) | 1982-04-22 |
| JPS6120848B2 true JPS6120848B2 (en) | 1986-05-24 |
Family
ID=15311136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55142258A Granted JPS5766416A (en) | 1980-10-09 | 1980-10-09 | Photoscanning system using linear polarizing laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5766416A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016058A (en) * | 1983-07-08 | 1985-01-26 | Hitachi Ltd | Light beam scanning device |
| US5251058A (en) * | 1989-10-13 | 1993-10-05 | Xerox Corporation | Multiple beam exposure control |
| US5251057A (en) * | 1989-10-13 | 1993-10-05 | Xerox Corporation | Multiple beam optical modulation system |
| US7787003B2 (en) * | 2005-04-21 | 2010-08-31 | Seiko Epson Corporation | Image forming apparatus |
| JP5953657B2 (en) * | 2011-05-17 | 2016-07-20 | 株式会社ニコン | Spatial light modulator, exposure apparatus, and device manufacturing method |
-
1980
- 1980-10-09 JP JP55142258A patent/JPS5766416A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5766416A (en) | 1982-04-22 |
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