JPS61220763A - 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法 - Google Patents

微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法

Info

Publication number
JPS61220763A
JPS61220763A JP8540085A JP8540085A JPS61220763A JP S61220763 A JPS61220763 A JP S61220763A JP 8540085 A JP8540085 A JP 8540085A JP 8540085 A JP8540085 A JP 8540085A JP S61220763 A JPS61220763 A JP S61220763A
Authority
JP
Japan
Prior art keywords
chamber
contraction
flow
particles
downstream chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8540085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316188B2 (de
Inventor
Yuji Chiba
千葉　裕司
Kenji Ando
謙二 安藤
Tatsuo Masaki
正木　辰雄
Masao Sugata
菅田　正夫
Kuniji Osabe
長部　国志
Osamu Kamiya
神谷　攻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8540085A priority Critical patent/JPS61220763A/ja
Priority to FR8604250A priority patent/FR2579486B1/fr
Priority to GB08607604A priority patent/GB2174509A/en
Priority to DE19863610296 priority patent/DE3610296A1/de
Publication of JPS61220763A publication Critical patent/JPS61220763A/ja
Publication of JPH0316188B2 publication Critical patent/JPH0316188B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP8540085A 1985-03-26 1985-04-23 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法 Granted JPS61220763A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8540085A JPS61220763A (ja) 1985-04-23 1985-04-23 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法
FR8604250A FR2579486B1 (fr) 1985-03-26 1986-03-25 Procede pour regler la vitesse de particules fines
GB08607604A GB2174509A (en) 1985-03-26 1986-03-26 Controlling velocity of particles
DE19863610296 DE3610296A1 (de) 1985-03-26 1986-03-26 Verfahren zum steuern der geschwindigkeit von feinen partikeln

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8540085A JPS61220763A (ja) 1985-04-23 1985-04-23 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP60059619A Division JPS61218810A (ja) 1985-03-26 1985-03-26 微粒子流の流れ制御装置

Publications (2)

Publication Number Publication Date
JPS61220763A true JPS61220763A (ja) 1986-10-01
JPH0316188B2 JPH0316188B2 (de) 1991-03-04

Family

ID=13857730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8540085A Granted JPS61220763A (ja) 1985-03-26 1985-04-23 微粒子流の速度調整方法及びそれを用いた微粒子の堆積方法

Country Status (1)

Country Link
JP (1) JPS61220763A (de)

Also Published As

Publication number Publication date
JPH0316188B2 (de) 1991-03-04

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Legal Events

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