JPS6122455A - Magnetooptic recording medium - Google Patents

Magnetooptic recording medium

Info

Publication number
JPS6122455A
JPS6122455A JP14228184A JP14228184A JPS6122455A JP S6122455 A JPS6122455 A JP S6122455A JP 14228184 A JP14228184 A JP 14228184A JP 14228184 A JP14228184 A JP 14228184A JP S6122455 A JPS6122455 A JP S6122455A
Authority
JP
Japan
Prior art keywords
layer
magnetic layer
magnetic
recording medium
magneto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14228184A
Other languages
Japanese (ja)
Other versions
JPH0350344B2 (en
Inventor
Ichiro Saito
一郎 斉藤
Yoichi Osato
陽一 大里
Hidekazu Fujii
英一 藤井
Kozo Arao
荒尾 浩三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP14228184A priority Critical patent/JPS6122455A/en
Publication of JPS6122455A publication Critical patent/JPS6122455A/en
Priority to US07/246,970 priority patent/US4999260A/en
Publication of JPH0350344B2 publication Critical patent/JPH0350344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing

Abstract

PURPOSE:To attain high-density recording and excellent storage stability by providing the 1st magnetic layer having a magnetic anisotropy vertical to a film face where a transition metal element is scattered to a dielectric to a substrate and the 2nd magnetic layer having a higher coercive force and similar magnetic anisotropy onto the 1st layer. CONSTITUTION:A metal element such as transition metal Fe or a rare earth metal such as Gd is scattered to the dielectric such as SiO2 on a transparent substrate (a) and a magnetization anisotropy is given vertically to the film face to form the 1st magnetic substance layer 1 and the 2nd magnetic layer 2 made of the thin film having a higher coercive force than that of the layer 1 and having the vertical anisotropy in the vertical direction of the film face is provided. A part of the recording medium is absorbed to the layer 1 by irradiating laser light from the base (a) of the recording medium, the light is transmitted through a part and absorbed in the layer 2 while being reached to the layer 2. Thus, the temperature of the layer 2 is increased and magnetization is inverted. Since the coercive force of the layer 1 is weaker than that of the layer 2, the magnetization of the layer 1 is inverted, a bit is recorded and the recorded bit of the layer 1 is stabilized.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、レーザー光を用いて情報の記録・再生・消去
を行なう磁気光学記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a magneto-optical recording medium that records, reproduces, and erases information using laser light.

〔従来技術〕[Prior art]

従来、光磁気記録に用いられる磁気光学記録媒体の材料
としてMnB i系、ガーネット系、希土類−遷移金属
アモルファス系などが知られている。
Conventionally, MnBi-based materials, garnet-based materials, rare earth-transition metal amorphous materials, and the like have been known as materials for magneto-optical recording media used in magneto-optical recording.

MnB i系は、キュリ一温度か高いため、記録の際に
出力の大きなレーザーを必要とし、また粒界ノイズが多
いため、S/N比の高い再生が実施できないという欠点
があり、ガーネット系でも光の透過率が大きいため、記
録の際に出力の大きなレーザーが必要となる欠点があっ
た。その中で、希土類−遷移金属アモルファス系は、両
者の欠点を補うものとして期待されている。
The MnBi system has a high Curie temperature, so it requires a high-output laser for recording, and it also has the disadvantage that it has a lot of grain boundary noise, making it impossible to reproduce with a high S/N ratio. Because of its high light transmittance, it had the disadvantage of requiring a high-output laser for recording. Among these, rare earth-transition metal amorphous systems are expected to compensate for the drawbacks of both.

このような磁気光学記録媒体の再生方式には、ファラデ
ー効果とカー効果を利用する方法がある。カー効果再生
方式ではカー回転角を大きくし再生信号レベルを向上さ
せるために、磁気記録層上にSiOや5i02などの誘
電体層を形成して磁気記録層面上への多重反射を利用す
る方法などが検討されてきた。また、特開昭55−65
41号、特開昭58−6542号等に開示されているよ
うに、磁気記録層を薄膜化し、裏面に金属反射層を形成
することにより、カー効果とファラデー効果を利用して
カー回転角を増加させる方法も知られている。−力、G
dCo、 CdFeなどの比較的大きなカー回転角を有
する磁性層と、DyFe、 TbFeなどの保磁力の大
きい磁性層とを積層することによりカー回転角を増加さ
せ、再生信号レベルを向上させる方法も知られている。
As a reproduction method for such a magneto-optical recording medium, there is a method that utilizes the Faraday effect and the Kerr effect. In the Kerr effect reproduction method, in order to increase the Kerr rotation angle and improve the reproduction signal level, a dielectric layer such as SiO or 5i02 is formed on the magnetic recording layer and multiple reflections on the surface of the magnetic recording layer are utilized. has been considered. Also, JP-A-55-65
As disclosed in Japanese Patent Application Laid-open No. 41 and JP-A-58-6542, by thinning the magnetic recording layer and forming a metal reflective layer on the back surface, the Kerr rotation angle can be adjusted using the Kerr effect and Faraday effect. Methods for increasing this are also known. -force, G
There is also a method of increasing the Kerr rotation angle and improving the reproduction signal level by laminating a magnetic layer with a relatively large Kerr rotation angle such as dCo or CdFe and a magnetic layer with a large coercive force such as DyFe or TbFe. It is being

このようにカー回転角を大きくし、再生信号レベルを向
上させる方法が試みられているが、未だ十分なものでは
ない。また記録されるビットの安定性はバイアス磁界の
大きさによって影響を受は易く、安定したヒツトを記録
するためには最適なバイアス磁界を印加して記録しなけ
ればならない。
Although attempts have been made to increase the Kerr rotation angle and improve the reproduced signal level, these methods are still not satisfactory. Furthermore, the stability of recorded bits is easily affected by the magnitude of the bias magnetic field, and in order to record stable bits, an optimum bias magnetic field must be applied for recording.

また、上述したような磁気記録層は酸素の存在下で高温
高湿の雰囲気に放置すると容易に酸化される。特に、磁
気記録層を薄膜化した場合には、その程度が著しい。従
って、時間が経つにつれて、媒体の記録感度の低下、記
録再生時のエラーの増加、信号の劣化などの欠点が生じ
やすい。
Further, the magnetic recording layer as described above is easily oxidized when left in a high temperature and high humidity atmosphere in the presence of oxygen. In particular, when the magnetic recording layer is made thinner, the extent of the problem is remarkable. Therefore, as time passes, disadvantages such as a decrease in recording sensitivity of the medium, an increase in errors during recording and reproduction, and signal deterioration tend to occur.

〔発明の開示〕[Disclosure of the invention]

本発明は」二連の如き欠点に鑑みなされたものであり1
本発明の目的は、再生信号レベルか高く、しかも安定し
た記録ビットを形成することかでき、結果的に高富度記
録が可能な磁気光学記録媒体を提供することにある。
The present invention has been made in view of the following drawbacks:
SUMMARY OF THE INVENTION An object of the present invention is to provide a magneto-optical recording medium that can produce stable recording bits with a high reproduction signal level and, as a result, can perform high-density recording.

本発明の他の目的は、保存安定性に優れた磁気光学記録
媒体を提供することにある。この目的は次の本発明の磁
気光学記録媒体によって達成することができる。すなわ
ち、本発明の磁気光学記録媒体は、透光性基板と、該基
板上に形成され遷移金属から選ばれた1種以上の金属元
素及び希土類金属から選ばれた1種以上の金属元素を誘
電体中に分散させた薄膜からなり膜面の垂直方向に磁気
異方性を有する第1磁性層と、該第1磁性層上に形成さ
れ該第1次磁性層よりも高い保磁力を有する薄膜からな
り膜面の垂直方向に磁気異方性を有する第2磁性層とを
少なくとも有してなる。
Another object of the present invention is to provide a magneto-optical recording medium with excellent storage stability. This object can be achieved by the following magneto-optical recording medium of the present invention. That is, the magneto-optical recording medium of the present invention includes a transparent substrate, and one or more metal elements selected from transition metals and one or more metal elements selected from rare earth metals formed on the substrate. a first magnetic layer made of a thin film dispersed throughout the body and having magnetic anisotropy in a direction perpendicular to the film surface; and a thin film formed on the first magnetic layer and having a higher coercive force than the first magnetic layer. and a second magnetic layer having magnetic anisotropy in the direction perpendicular to the film surface.

以下、図面を参照にして本発明による磁気光学記録媒体
を説明する。
Hereinafter, a magneto-optical recording medium according to the present invention will be explained with reference to the drawings.

第1図は、本発明の基本的態様を示す模式断面図である
。この図において、aはプラスチック又はカラス等から
なる透光性基板である。lは遷移金属の1種以上の金属
元素、および希土類金属の1種以上の金属元素を誘電体
中に分散させた厚み方向に垂直な磁化容易軸を有する第
1磁性層である。例えば、Fe、 (:o、 Ni等の
遷移金属から選ばれた1種以上の金属元素及びGd、 
Tb、 Dy等の希土類金属から選ばれた1種以上の金
属元素をAIN。
FIG. 1 is a schematic sectional view showing a basic aspect of the present invention. In this figure, a is a translucent substrate made of plastic, glass, or the like. 1 is a first magnetic layer having an axis of easy magnetization perpendicular to the thickness direction in which one or more metallic elements of transition metals and one or more metallic elements of rare earth metals are dispersed in a dielectric material. For example, one or more metal elements selected from transition metals such as Fe, (:o, Ni, etc.) and Gd,
AIN contains one or more metal elements selected from rare earth metals such as Tb and Dy.

Si3N 4 、 MgF2 、 BiF3 、 Si
O,5i02 、 TiO2、及びTa205からなる
群より選ばれた1種以上からなる誘電体中に分散させて
構成される。
Si3N4, MgF2, BiF3, Si
It is configured by being dispersed in a dielectric material made of one or more selected from the group consisting of O, 5i02, TiO2, and Ta205.

誘電体中に含まれる遷移金属及び希土類金属の体積の割
合(体積充填率:q)は、0.5≦q≦0゜85が好ま
しい。体積充填率qが0.5以下であると、厚み方向に
垂直磁気異方性を有する磁化が安定に存在しにくくなり
、またqか0.95以上であると、酸素、水分等の雰囲
気によって磁性層が一酸化され易くなるからである。こ
のような体積充填率の好ましい範囲内に於いて、記録光
に対する第一磁性層の光吸収率が30〜40%程度にな
るように膜厚及び体積充填率を設定することが好ましい
。最適な膜厚は磁性層の材料、充填率によって異なるが
、通常250〜100OAの範囲に設定される。光吸収
率は、後述するようにこの記録媒体への記録、書生の性
能に大きな影響を及ぼす。
The volume ratio (volume filling factor: q) of the transition metal and rare earth metal contained in the dielectric is preferably 0.5≦q≦0°85. If the volume filling factor q is less than 0.5, it will be difficult for magnetization with perpendicular magnetic anisotropy to exist stably in the thickness direction, and if q is more than 0.95, the magnetization will be affected by the atmosphere of oxygen, moisture, etc. This is because the magnetic layer becomes easily oxidized. Within this preferred range of volume filling ratio, it is preferable to set the film thickness and volume filling ratio so that the light absorption rate of the first magnetic layer with respect to recording light is about 30 to 40%. The optimum film thickness varies depending on the material of the magnetic layer and the filling rate, but is usually set in the range of 250 to 100 OA. As will be described later, the light absorption rate has a great influence on the recording and writing performance of this recording medium.

以上説明したような第1磁性層1の好ましい体積充填率
、膜厚及、び光吸収率を考慮して、第1磁性層1を構成
する各原料を多元蒸着源として、スパッタリング法、イ
オンプレーテインク法、電子ビーム蒸着法等により基板
の上へ成膜することによって、第11a性層lを形成す
ることができる。
Considering the preferable volume filling factor, film thickness, and light absorption rate of the first magnetic layer 1 as explained above, each raw material constituting the first magnetic layer 1 is used as a multi-source vapor deposition source, and the sputtering method, ion plating method, etc. The 11a-type layer 1 can be formed by forming a film on the substrate by a TEINK method, an electron beam evaporation method, or the like.

2は第16111性層lよりも高い保磁力を有し、かつ
厚み方向に磁気異方性を看する第2磁性層であり1例え
ば、 Fe、 Go、 Ni等の遷移金属及びGd。
2 is a second magnetic layer which has a higher coercive force than the 16111st magnetic layer 1 and exhibits magnetic anisotropy in the thickness direction;

Tb、 Dy等のん土類金属の中から任意に選ひ出した
1種属−Lの金属元素からなる金属薄膜、バリウムフエ
ライトtli 膜(BaFe204) 、コバルト−ク
ロム合金薄膜(C:o−Cr) 、マンガン−ビスマス
系合金薄膜(MnBi、 Mr+C:uBi)等の磁性
薄膜を使用することができる。
A metal thin film made of a metal element of the 1st class -L arbitrarily selected from earth metals such as Tb and Dy, a barium ferrite tri film (BaFe204), a cobalt-chromium alloy thin film (C:o-Cr ), a manganese-bismuth alloy thin film (MnBi, Mr+C:uBi), and other magnetic thin films can be used.

このような磁性薄膜成分を構成する各原料金属又はフェ
ライトを多元蒸着源として、スパッタリング法、イオン
ブレーティング法、電子ビーム蒸フイ法等の成11り法
によって第1磁性層1上へ成膜することによって、:5
2磁性層2を形成することかできる。第2磁性層2の厚
さは、材質によって異なるが通常500八〜2000八
程度が好ましい。
A film is formed on the first magnetic layer 1 by a deposition method such as a sputtering method, an ion blasting method, an electron beam evaporation method, etc. using each of the raw material metals or ferrites constituting the magnetic thin film component as a multi-source deposition source. By this:5
Two magnetic layers 2 can be formed. The thickness of the second magnetic layer 2 varies depending on the material, but is usually preferably about 500.8 to 2000.8 cm.

第2図は、本発明の磁気光学記録媒体の別の実施態様を
示す模式断面図である。この記録媒体は、第1図に示し
た磁気光学記録媒体の基板aと第1磁性層1との間に反
射防止層すを、第2磁性層2上に保護層3を形成して構
成される。反射防止層すは、第1磁性層表面での反射率
が最小となるような反射防止構造に膜厚を設定した誘電
体からなり磁性層の場合と同様な方法により成膜できる
。この反射防止層すはレーザー光が入射した時に、第1
磁性層表面からの反射光を減少させることにより、レー
ザー光を効率良く磁性層に与える機能を果つ。
FIG. 2 is a schematic cross-sectional view showing another embodiment of the magneto-optic recording medium of the present invention. This recording medium is constructed by forming an antireflection layer between the substrate a and the first magnetic layer 1 of the magneto-optic recording medium shown in FIG. 1, and forming a protective layer 3 on the second magnetic layer 2. Ru. The antireflection layer is made of a dielectric material whose thickness is set to have an antireflection structure that minimizes the reflectance on the surface of the first magnetic layer, and can be formed by the same method as the magnetic layer. This anti-reflection layer is the first layer when laser light is incident on it.
By reducing reflected light from the surface of the magnetic layer, it functions to efficiently apply laser light to the magnetic layer.

保護層3は、有機高分子膜あるいは酸化物、硫化物など
の無機材料や金属材料からなり、磁性層の保存安定性を
向上させる効果がある。この保護層3は、材料が有機物
ならば、各種の塗工法、プラズマ重合法等によって成膜
でき、材料が無機物ならば、磁性層の場合と同様な方法
によって成膜できる。
The protective layer 3 is made of an organic polymer film, an inorganic material such as an oxide or a sulfide, or a metal material, and has the effect of improving the storage stability of the magnetic layer. If the material is organic, this protective layer 3 can be formed by various coating methods, plasma polymerization, etc. If the material is inorganic, it can be formed by the same method as for the magnetic layer.

この磁気光学記録媒体の示すように第1磁性層lは必ず
しも基板aに直接、接して成膜される必要はない。
As shown in this magneto-optical recording medium, the first magnetic layer l does not necessarily have to be formed in direct contact with the substrate a.

また、第3図の示すように、第2図で示した態様の磁気
光学記録媒体に接着層4を介して保護板a° を貼り合
わせてもよい。
Further, as shown in FIG. 3, a protective plate a may be bonded to the magneto-optical recording medium of the embodiment shown in FIG. 2 via an adhesive layer 4.

更に、磁気光学記録媒体の両面で記録、再生ができるよ
うに両面に磁性層を設けた構成も可能である。
Furthermore, a configuration in which magnetic layers are provided on both sides of the magneto-optical recording medium is also possible so that recording and reproduction can be performed on both sides of the magneto-optical recording medium.

本発明の磁気光学記録媒体の記録及び再生の機構を第1
図に示した記録媒体に於いて説明する。
First, the recording and reproducing mechanism of the magneto-optical recording medium of the present invention is described.
The recording medium shown in the figure will be explained.

この記録媒体に、基板a側からレーザー光を照射すると
、前述したように第1磁性層の光吸収率は、30〜40
%程度であるので、このレーザー光の残りの部分は、第
1磁性層1を通過し、第2磁性層2へ達して吸収される
。従って、第2磁性層2に於いて、光エネルギーは大部
分熱エネルギーに変換され、第2磁性層の温度が上昇し
、キュリ一点に達するとこの第2磁性層の磁化が反転す
る。
When this recording medium is irradiated with a laser beam from the substrate a side, the light absorption rate of the first magnetic layer is 30 to 40, as described above.
%, the remaining portion of this laser light passes through the first magnetic layer 1, reaches the second magnetic layer 2, and is absorbed. Therefore, in the second magnetic layer 2, most of the optical energy is converted into thermal energy, and when the temperature of the second magnetic layer increases and reaches the Curie point, the magnetization of the second magnetic layer is reversed.

第1磁性層lの保磁力は第2磁性層2の保磁力より小さ
いので、この磁化反転に伴い第1磁性層の磁化も反転し
ビットが記録される。このように第2磁性層2は第1磁
性層lの磁化反転を容易にすると同時に、第1磁性層l
の記録ビットの安定化を可能にする。
Since the coercive force of the first magnetic layer l is smaller than the coercive force of the second magnetic layer 2, the magnetization of the first magnetic layer is also reversed with this magnetization reversal, and a bit is recorded. In this way, the second magnetic layer 2 facilitates the magnetization reversal of the first magnetic layer l, and at the same time
enables stabilization of recording bits.

このようにして記録されたビットの再生は、基板a側よ
りこの記録媒体へレーザー光を照射し、その反射光の偏
光角度を検出することにより行う。
The bits recorded in this manner are reproduced by irradiating the recording medium with laser light from the substrate a side and detecting the polarization angle of the reflected light.

照射されたレーザー光は第1磁性層lで一部は反射され
、一部は透過して第2磁性M2で反射される。この2つ
の反射光の合成されたものが再生の際に検出される。第
1磁性層lで反射されたレーザー光は、この層lのカー
効果−゛を受け、またfiiJ1m性層1を透外層第2
磁性層2で反射されたレーザー光は、第1磁性層1のフ
ァラデー効果と第2磁性層2のカー効果を受ける。この
それぞれの反射光が合成されたものが再生の際に検出さ
れるので、みかけのカー回転角が増加し、高い再生信号
レベルを得ることができる。
Part of the irradiated laser light is reflected by the first magnetic layer l, and part of it is transmitted and reflected by the second magnetic layer M2. A combination of these two reflected lights is detected during reproduction. The laser beam reflected by the first magnetic layer 1 is affected by the Kerr effect of this layer 1, and also passes through the fiiJ1m magnetic layer 1 to the second outer layer.
The laser beam reflected by the magnetic layer 2 is subjected to the Faraday effect of the first magnetic layer 1 and the Kerr effect of the second magnetic layer 2. Since a combination of these respective reflected lights is detected during reproduction, the apparent Kerr rotation angle increases and a high reproduction signal level can be obtained.

また、第2磁性層2のキュリ一点が低く、再生光により
磁化が反転するおそれがあるときには、再生光が第2磁
性層2に達っしないような構成も可能である。この場合
は、第1磁性Mlにカー回転角の大きい材料を用いて、
第1磁性層1からの反射光のみの検出で再生を行えばよ
い。
Furthermore, when the Curie point of the second magnetic layer 2 is low and there is a risk that the magnetization may be reversed by the reproduction light, a configuration in which the reproduction light does not reach the second magnetic layer 2 is also possible. In this case, a material with a large Kerr rotation angle is used for the first magnetic Ml,
Reproduction may be performed by detecting only the reflected light from the first magnetic layer 1.

このような第1m性層と第2磁性層を有する本発明の磁
気光学記録媒体は以下に述べる実施例から明らかなよう
に、記録の際に印加するバイアス磁界の影響を受けるこ
となく、安定した記録ビットが形成でき、保存安定性も
、向上する。
As is clear from the examples described below, the magneto-optical recording medium of the present invention having such a first m-layer and a second magnetic layer has a stable structure without being affected by the bias magnetic field applied during recording. Recording bits can be formed and storage stability is also improved.

本発明による磁気光学記録媒体を実施例を挙げて更に詳
細に説明する。
The magneto-optical recording medium according to the present invention will be explained in more detail by giving examples.

〔実施例1〕 78X 26mm、厚さlIIlmlのスライドガラス
基板上に、−酸化ケイ素(Sin)の中にガドリニウム
・テルビウム・鉄(Gd、 Tb、 Fe、)を分、飲
させた第1m性層を成膜した。この成膜はFeターゲッ
トの上にGd−Tb合金(組成Gd:T−b = 1 
: l )チップを並べた複合ターゲットとSiOター
ゲットを用いた2元スパッタリング法によって実施した
。SiOの中に含まれるGd、 Tb、 Feの体積充
填率は、0.90であり、膜厚は280八である。この
時、第1磁性層の波長8’30 n mにおける透過率
は、40%である。この第1磁性層の上に、Tb20 
(FegoCOlo ) so薄膜を第2磁性層として
膜厚600Aに成膜した。この成膜はスパッタリング法
をにより実施した。保磁力は約2.5KOeである。こ
の磁気光学記録媒体に基板側から波長830nm、出力
25mWの半導体レーザー光を照射し、厚み方向に垂直
に8 KOeの磁界を印加した状態でカー回転角の測定
をした結果、θに〜1.2°が得られた。
[Example 1] On a slide glass substrate of 78 x 26 mm and thickness lIIlml, the first m-type layer was prepared by adding a portion of gadolinium-terbium-iron (Gd, Tb, Fe,) into -silicon oxide (Sin). was deposited. This film is formed using a Gd-Tb alloy (composition Gd:T-b = 1) on a Fe target.
: l) It was carried out by a binary sputtering method using a composite target arranged with chips and a SiO target. The volume filling factor of Gd, Tb, and Fe contained in SiO is 0.90, and the film thickness is 280. At this time, the transmittance of the first magnetic layer at a wavelength of 8'30 nm is 40%. On this first magnetic layer, Tb20
A (FegoCOlo)so thin film was formed to a thickness of 600 Å as a second magnetic layer. This film formation was performed using a sputtering method. The coercive force is about 2.5 KOe. This magneto-optical recording medium was irradiated with a semiconductor laser beam with a wavelength of 830 nm and an output of 25 mW from the substrate side, and the Kerr rotation angle was measured with a magnetic field of 8 KOe applied perpendicular to the thickness direction. As a result, θ was ~1. 2° was obtained.

〔実施例2〕 直径200■、厚さ1.5+o+wのディスク状ガラス
基板の上に、実施例1と全く同様にして、全1磁性層、
第2磁性層を形成した。その上に、電子ビーム蒸着法を
用いて膜厚的400OAのSiO保護層を成膜した後、
接着剤を用いてガラス保護板を貼り合わせ磁気光学記録
媒体を作製した。
[Example 2] On a disk-shaped glass substrate with a diameter of 200 cm and a thickness of 1.5+o+w, a total of one magnetic layer,
A second magnetic layer was formed. After forming a SiO protective layer with a thickness of 400 OA on top of it using electron beam evaporation,
A magneto-optical recording medium was fabricated by bonding glass protective plates together using an adhesive.

この磁気光学記録媒体に、基板側からレーザー光を照射
し、記録を行なった、光源には、出力25mW、波長8
30nmの半導体レーザーを用い、磁性層の厚さ方向に
バイアス磁界を印加した。このディスク状磁気光学記録
媒体を150Orpmで回転させながら、磁性層を一様
に磁化し、レーザーをパルス発振させて周波数2 MH
zの信号をビット記録した。この時印加したバイアス磁
界は、 0.5KOeテする。これを、出力10mWの
半導体レーザーを用いて再生した結果、記録周波数2 
MHzのとき、約480mVの再生信号が得られ、良好
な信号波形であった。また、この時のC/Nは帯域30
KHzで4 e dB h<得られた。また、バイアス
磁界を0.4〜0.7KOeの範囲で変化させて記録を
行ない、記録されたビットの顕微鏡観察を行なった結果
、バイアス磁界の変化に対しても安定して記録ビットが
存在していることが確認された。また、この磁気光学記
録媒体を温度45°C1湿度95%R,H,の雰囲気に
放置して時1111経過による保磁力の変化を測定して
保存安定性の試験を行なったところ1000時間経過後
もほとんど保磁力が低下せず、従来の磁気光学記録媒体
と比較して保存安定性が優れていることがわかった。
This magneto-optical recording medium was irradiated with a laser beam from the substrate side for recording.The light source had an output of 25 mW and a wavelength of 8.
A bias magnetic field was applied in the thickness direction of the magnetic layer using a 30 nm semiconductor laser. While rotating this disc-shaped magneto-optical recording medium at 150 Orpm, the magnetic layer is uniformly magnetized, and the laser is pulsed to generate a frequency of 2 MH.
The signal of z was recorded in bits. The bias magnetic field applied at this time was 0.5 KOe. As a result of reproducing this using a semiconductor laser with an output of 10 mW, the recording frequency was 2.
At MHz, a reproduced signal of about 480 mV was obtained and had a good signal waveform. Also, the C/N at this time is band 30
4 e dB h<4 at KHz was obtained. Furthermore, as a result of recording while changing the bias magnetic field in the range of 0.4 to 0.7 KOe and microscopic observation of the recorded bits, it was found that the recorded bits remained stable even with changes in the bias magnetic field. It was confirmed that In addition, we conducted a storage stability test by leaving this magneto-optical recording medium in an atmosphere with a temperature of 45° C. and a humidity of 95% R, H, and measuring the change in coercive force over the course of 1000 hours. It was found that the coercive force hardly decreased and the storage stability was superior to that of conventional magneto-optical recording media.

また、第1磁性層として、Fe、 Go、 Niの1種
以上の金属元素及びGd、 Tb、 Oyの1種以上の
金属元素をAIN、Si3N4  、 MgF2. B
iF3. SiO,5i02. TiO2゜Ta205
の1種以上からなる誘電体中に分散させて構成したもの
を用い、第2磁性層として前記の金属薄膜、フェライト
薄膜を用い、種々の磁気光学記録媒体を作製し、同様な
実験をしたところ、再生信号レベルが高く、また記録ビ
ットの安定性はバイアス磁界の影響をほとんど受けず、
更に保存安定性が向上することがわかった。
Further, as the first magnetic layer, one or more metal elements of Fe, Go, and Ni and one or more metal elements of Gd, Tb, and Oy are combined with AIN, Si3N4, MgF2. B
iF3. SiO,5i02. TiO2゜Ta205
Similar experiments were conducted on various magneto-optical recording media prepared by using the above-mentioned metal thin film or ferrite thin film as the second magnetic layer. , the reproduction signal level is high, and the stability of the recorded bits is almost unaffected by the bias magnetic field.
It was also found that storage stability was improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第、1図、@2図及び第3図は本発明による磁気光学記
録媒体の実施例を示す模式断面図である。 a・・・基板     ao・・・保護板b・・・反射
防止層  l゛・・・第11a性層2・・・第2磁性層
  3・・・保護層4・・・接着層
1, 2, and 3 are schematic cross-sectional views showing embodiments of the magneto-optical recording medium according to the present invention. a...Substrate ao...Protective plate b...Antireflection layer l゛...11a layer 2...Second magnetic layer 3...Protective layer 4...Adhesive layer

Claims (1)

【特許請求の範囲】[Claims] 透光性基板と、該基板上に形成され遷移金属から選ばれ
た1種以上の金属元素及び希土類金属から選ばれた1種
以上の金属元素を誘電体中に分散させた薄膜からなり膜
面の垂直方向に磁気異方性を有する第1磁性層と、該第
1磁性層上に形成され該第1次磁性層よりも高い保磁力
を有する薄膜からなり膜面の垂直方向に磁気異方性を有
する第2磁性層とを少なくとも有してなる磁気光学記録
媒体。
A film surface consisting of a transparent substrate and a thin film formed on the substrate in which one or more metal elements selected from transition metals and one or more metal elements selected from rare earth metals are dispersed in a dielectric material. a first magnetic layer having magnetic anisotropy in the direction perpendicular to the film surface; and a thin film formed on the first magnetic layer and having a higher coercive force than the first magnetic layer. 1. A magneto-optical recording medium comprising at least a second magnetic layer having magnetic properties.
JP14228184A 1984-05-31 1984-07-11 Magnetooptic recording medium Granted JPS6122455A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14228184A JPS6122455A (en) 1984-07-11 1984-07-11 Magnetooptic recording medium
US07/246,970 US4999260A (en) 1984-05-31 1988-09-21 Magneto-optical recording medium comprising a rare-earth-transition metal dispersed in a dielectric

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14228184A JPS6122455A (en) 1984-07-11 1984-07-11 Magnetooptic recording medium

Publications (2)

Publication Number Publication Date
JPS6122455A true JPS6122455A (en) 1986-01-31
JPH0350344B2 JPH0350344B2 (en) 1991-08-01

Family

ID=15311713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14228184A Granted JPS6122455A (en) 1984-05-31 1984-07-11 Magnetooptic recording medium

Country Status (1)

Country Link
JP (1) JPS6122455A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220019A (en) * 1988-05-20 1990-01-23 Internatl Business Mach Corp <Ibm> Method of forming shallow junction
US4897320A (en) * 1986-03-20 1990-01-30 Fuji Photo Film Co., Ltd. Magneto-optical recording medium
US5016232A (en) * 1987-04-03 1991-05-14 Mitsubishi Denki Kabushiki Kaisha Magneto-optic information-carrying medium including three magnetic layers
US5025430A (en) * 1987-04-03 1991-06-18 Mitsubishi Denki Kabushiki Kaisha Magneto-optic recording and reproducing apparatus including a multiple layer recording medium having a premagnetized bias layer replacing an external bias magnetic
US10370167B2 (en) 2015-01-06 2019-08-06 Conopco, Inc. Cleaning liquid dispensing system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897320A (en) * 1986-03-20 1990-01-30 Fuji Photo Film Co., Ltd. Magneto-optical recording medium
US5016232A (en) * 1987-04-03 1991-05-14 Mitsubishi Denki Kabushiki Kaisha Magneto-optic information-carrying medium including three magnetic layers
US5025430A (en) * 1987-04-03 1991-06-18 Mitsubishi Denki Kabushiki Kaisha Magneto-optic recording and reproducing apparatus including a multiple layer recording medium having a premagnetized bias layer replacing an external bias magnetic
JPH0220019A (en) * 1988-05-20 1990-01-23 Internatl Business Mach Corp <Ibm> Method of forming shallow junction
US10370167B2 (en) 2015-01-06 2019-08-06 Conopco, Inc. Cleaning liquid dispensing system

Also Published As

Publication number Publication date
JPH0350344B2 (en) 1991-08-01

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