JPS6123655B2 - - Google Patents

Info

Publication number
JPS6123655B2
JPS6123655B2 JP53033315A JP3331578A JPS6123655B2 JP S6123655 B2 JPS6123655 B2 JP S6123655B2 JP 53033315 A JP53033315 A JP 53033315A JP 3331578 A JP3331578 A JP 3331578A JP S6123655 B2 JPS6123655 B2 JP S6123655B2
Authority
JP
Japan
Prior art keywords
wafer
container
wafers
grooves
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53033315A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54124969A (en
Inventor
Tatsuo Niitsuma
Takeshi Moriwaki
Minoru Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAISERU KAGAKU KOGYO KK
OOSAKA CHITANIUMU SEIZO KK
Original Assignee
DAISERU KAGAKU KOGYO KK
OOSAKA CHITANIUMU SEIZO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAISERU KAGAKU KOGYO KK, OOSAKA CHITANIUMU SEIZO KK filed Critical DAISERU KAGAKU KOGYO KK
Priority to JP3331578A priority Critical patent/JPS54124969A/ja
Publication of JPS54124969A publication Critical patent/JPS54124969A/ja
Publication of JPS6123655B2 publication Critical patent/JPS6123655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP3331578A 1978-03-22 1978-03-22 Semiconductor wafer container Granted JPS54124969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3331578A JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3331578A JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Publications (2)

Publication Number Publication Date
JPS54124969A JPS54124969A (en) 1979-09-28
JPS6123655B2 true JPS6123655B2 (cs) 1986-06-06

Family

ID=12383116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3331578A Granted JPS54124969A (en) 1978-03-22 1978-03-22 Semiconductor wafer container

Country Status (1)

Country Link
JP (1) JPS54124969A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138337U (ja) * 1982-03-12 1983-09-17 ソニー株式会社 ウエハ支持治具
CN100555596C (zh) * 2003-12-10 2009-10-28 富士塑料股份有限公司 半导体晶片载体容器

Also Published As

Publication number Publication date
JPS54124969A (en) 1979-09-28

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