JPS61243404A - Optical reflection mirror assembly - Google Patents

Abstract

PURPOSE:To prevent a damage from being caused and optical characteristics from deteriorating by providing an optical reflecting mirror, a holding member fixed on the back surface of the optical reflection mirror in one body, and a temperature controller which circulates fluid after temperature control through the holding member. CONSTITUTION:The optical reflection mirror 1 is fixed to the finned holding member 3 to sufficient contacting area with good heat conductivity. The member 3 is provided with projections or fins so that heat is easily exchanged. The fluid supplied from the temperature controller after temperature control flows on the surface of the member 3 where the projections are formed. Further, a temperature sensor 7 is fitted to the reflection mirror 1 and the controller 8 controls the temperature of the fluid flowing through it by using the sensor 7. A fixing member 2 fixes the reflection mirror 1 at an accurate position. The member 2 fixes the member 3, but the member 2 may fixes the reflection mirror 1 directly. In this case, no inclusion is required to fix the reflection mirror 1, so the position precision is improved.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention is directed to optical film! This is related to the IFl mirror. high brightness,
A light source that generates a large luminous flux, such as an ultra-high pressure mercury lamp or an excimer laser, is used to pass the light through several optical elements or reflect it with an optical reflector to create a luminous flux with desired optical characteristics. In recent years, the number of equipment that utilizes this has been increasing, and one of them is semiconductor manufacturing equipment.

The present invention relates to an optical reflector used in such a device.

[Prior Art] This type of optical reflector is irradiated with a large beam of high illuminance, a portion of which is absorbed by the optical reflector and converted into thermal energy, raising the temperature of the optical reflector. This optical anti-9A
If the temperature change of the mirror occurs in a short period of time or is spatially localized, stress is generated inside the optical reflector, which may cause damage to the optical reflector.

Furthermore, if an optical thin film formed on the reflective surface of an optical reflector to improve reflectance is exposed to high temperatures for a long period of time, the reflectance of the optical thin film may decrease and its performance may deteriorate.

As a countermeasure to this thermal problem, it has been proposed to blow air onto the optical reflector to lower its temperature. However, there is a problem in that when air is blown over a long period of time, impurities in the air adhere to the reflective surface and reduce the reflectance.

[Problems to be Solved by the Invention and Means for Solving the Problems] The purpose of the present invention is to prevent damage or deterioration of optical characteristics even when used under unstable thermal environmental conditions. The purpose of the present invention is to provide an optical reflector.

The purpose is to provide an optical reflector according to the invention, a finned retaining member integrally secured to the rear surface of the optical reflector, and a fluid whose temperature is regulated in response to the temperature of said optical reflector to be circulated through said retaining member. This is accomplished by an optical reflector assembly equipped with a filter that allows

[Embodiment] The attached drawings show an embodiment of the optical reflector assembly of the present invention. Optical reflection! 111 is fixed to the finned holding member 3 with a sufficient contact area and good heat conduction. Protrusions or fins are formed on the holding member 3 to facilitate heat exchange. A temperature-controlled fluid supplied from a temperature regulator 8 flows through the surface of the holding member 3 having the protrusions. optical reflection 11
A temperature sensor 7 is attached to the holder, and based on this temperature sensor 7, a temperature regulator 8 adjusts the temperature of the fluid passing through it. The fixing member 2 fixes the optical reflecting mirror 1 in an accurate position. In this embodiment, the fixing member 2 fixes the holding member 3, but the fixing member 2 may directly fix the optical reflecting mirror 1.

In this case, there will be no inclusions in fixing the optical fiber 111, so positional accuracy will be improved. Optical anti-mirror 1 and holding member 3
The fixation may be performed using an adhesive with good thermal conductivity, such as an epoxy adhesive, or by filling a filler with good thermal conductivity so that no space is left on the contact surface.

Further, in the embodiment, the temperature sensor 7 is attached to the optical reflector II, but it may be attached to the holding member 3 if the heat conduction is sufficiently good.

The holding member 3 and the fixing member 2 may be formed integrally, or the optical reflecting mirror 1 and the holding member 3 may be formed integrally from the same material.

The fluid for temperature adjustment may be air, water, or any other gas or liquid.

[Effects of the Invention] As is clear from the description, the optical reflector assembly according to the present invention prevents damage to the optical reflector and deterioration of optical characteristics, and furthermore, the temperature adjustment prevents the optical reflector from being affected by the external environment. Ensure stable conditions.

[Brief explanation of the drawing]

The accompanying figure is a schematic illustration of an optical reflector assembly according to the invention. In the figure: 1: optical reflector, 2: fixing member, 3: holding member, 4: fluid cover, 5: fluid inlet, 5: fluid outlet, 7: temperature sensor, 8: temperature regulator.

Claims (1)

[Claims] 1. Optical reflecting mirror; A finned holding member integrally fixed to the back surface of the optical reflecting mirror, and a fluid whose temperature is adjusted in response to the temperature of the optical reflecting mirror. An optical reflector assembly characterized in that it is equipped with a temperature regulator that allows circulation to flow through the optical reflector assembly. 2. The optical reflecting mirror and the holding member are integrally formed,
Alternatively, the optical reflecting mirror assembly according to claim 1, wherein the optical reflecting mirror and the holding member are integrally fixed via a fixing member.