JPS61254286A - 純粋蒸気又は高純度蒸溜水の小型製造装置 - Google Patents
純粋蒸気又は高純度蒸溜水の小型製造装置Info
- Publication number
- JPS61254286A JPS61254286A JP9474685A JP9474685A JPS61254286A JP S61254286 A JPS61254286 A JP S61254286A JP 9474685 A JP9474685 A JP 9474685A JP 9474685 A JP9474685 A JP 9474685A JP S61254286 A JPS61254286 A JP S61254286A
- Authority
- JP
- Japan
- Prior art keywords
- pure steam
- water
- steam
- high purity
- distilled water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 239000012153 distilled water Substances 0.000 title claims abstract description 13
- 239000012498 ultrapure water Substances 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 abstract description 20
- 229910021641 deionized water Inorganic materials 0.000 abstract description 20
- 239000007788 liquid Substances 0.000 abstract description 10
- 230000008020 evaporation Effects 0.000 abstract 4
- 238000001704 evaporation Methods 0.000 abstract 4
- 238000007689 inspection Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000011176 pooling Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Landscapes
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9474685A JPS61254286A (ja) | 1985-05-01 | 1985-05-01 | 純粋蒸気又は高純度蒸溜水の小型製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9474685A JPS61254286A (ja) | 1985-05-01 | 1985-05-01 | 純粋蒸気又は高純度蒸溜水の小型製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61254286A true JPS61254286A (ja) | 1986-11-12 |
| JPS6354435B2 JPS6354435B2 (de) | 1988-10-27 |
Family
ID=14118687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9474685A Granted JPS61254286A (ja) | 1985-05-01 | 1985-05-01 | 純粋蒸気又は高純度蒸溜水の小型製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61254286A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112326U (de) * | 1989-02-20 | 1990-09-07 | ||
| FR2714958A1 (fr) * | 1994-01-11 | 1995-07-13 | Reic | Générateur de vapeur stérile. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5731922U (de) * | 1980-07-31 | 1982-02-19 |
-
1985
- 1985-05-01 JP JP9474685A patent/JPS61254286A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5731922U (de) * | 1980-07-31 | 1982-02-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112326U (de) * | 1989-02-20 | 1990-09-07 | ||
| FR2714958A1 (fr) * | 1994-01-11 | 1995-07-13 | Reic | Générateur de vapeur stérile. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6354435B2 (de) | 1988-10-27 |
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