JPS61260595A - 薄膜ｅｌ素子 - Google Patents

薄膜ｅｌ素子

Info

Publication number
JPS61260595A
JPS61260595A JP60103426A JP10342685A JPS61260595A JP S61260595 A JPS61260595 A JP S61260595A JP 60103426 A JP60103426 A JP 60103426A JP 10342685 A JP10342685 A JP 10342685A JP S61260595 A JPS61260595 A JP S61260595A
Authority
JP
Japan
Prior art keywords
layer
germanium
thin film
nitrogen
germanium nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60103426A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160917B2 (cs
Inventor
松平　他家夫
清水　安元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP60103426A priority Critical patent/JPS61260595A/ja
Publication of JPS61260595A publication Critical patent/JPS61260595A/ja
Publication of JPH0160917B2 publication Critical patent/JPH0160917B2/ja
Granted legal-status Critical Current

Links

JP60103426A 1985-05-15 1985-05-15 薄膜ｅｌ素子 Granted JPS61260595A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60103426A JPS61260595A (ja) 1985-05-15 1985-05-15 薄膜ｅｌ素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60103426A JPS61260595A (ja) 1985-05-15 1985-05-15 薄膜ｅｌ素子

Publications (2)

Publication Number Publication Date
JPS61260595A true JPS61260595A (ja) 1986-11-18
JPH0160917B2 JPH0160917B2 (cs) 1989-12-26

Family

ID=14353708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60103426A Granted JPS61260595A (ja) 1985-05-15 1985-05-15 薄膜ｅｌ素子

Country Status (1)

Country Link
JP (1) JPS61260595A (cs)

Also Published As

Publication number Publication date
JPH0160917B2 (cs) 1989-12-26

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