JPS61267656A - Pushing up and absorbing device for electron parts - Google Patents

Pushing up and absorbing device for electron parts

Info

Publication number
JPS61267656A
JPS61267656A JP60107485A JP10748585A JPS61267656A JP S61267656 A JPS61267656 A JP S61267656A JP 60107485 A JP60107485 A JP 60107485A JP 10748585 A JP10748585 A JP 10748585A JP S61267656 A JPS61267656 A JP S61267656A
Authority
JP
Japan
Prior art keywords
push
electronic component
ejector
pin
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60107485A
Other languages
Japanese (ja)
Other versions
JPH0671155B2 (en
Inventor
Wataru Hidese
渡 秀瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60107485A priority Critical patent/JPH0671155B2/en
Publication of JPS61267656A publication Critical patent/JPS61267656A/en
Publication of JPH0671155B2 publication Critical patent/JPH0671155B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、電子部品を突き上げて吸着する装置に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a device for pushing up and sucking electronic components.

従来の技術 近年、電子部品をプリント基板に自動装着する装置は多
々提案されており、電子部品供給方法も多々提案され、
確実によ、シ速く供給することが必要となってきた。従
来、円板状にシートが張られ、その上部に電子部品が装
着されているウェノ・タイプの電子部品に対して移載装
置のノズルにより真空圧で吸着され供給を行なっていた
が真空圧だけでは吸引力が小さいため電子部品を確実に
吸着できず吸着ミスが頻繁だった。そこで従来の構成は
前記シートの下部より1本の針状のピンを突き上げ、又
前記ノズルと同期して電子部品を剥離させ上昇する突き
上げ装置(以下エジェクターと略す)により供給が行わ
れていた。
Conventional technology In recent years, many devices have been proposed for automatically mounting electronic components onto printed circuit boards, and many electronic component supply methods have also been proposed.
It has become necessary to provide reliable and quick supply. Conventionally, electronic components of the Weno type, in which a sheet is stretched in the shape of a disk and electronic components are attached to the top, were sucked and supplied using vacuum pressure by the nozzle of the transfer device, but only vacuum pressure was used. Because the suction power was low, it was not possible to reliably suction electronic components, and suction errors were frequent. Therefore, in the conventional configuration, a single needle-like pin is pushed up from the bottom of the sheet, and supply is performed by a push-up device (hereinafter abbreviated as ejector) that peels off and lifts electronic components in synchronization with the nozzle.

発明が解決しようとする問題点 しかしながら近年、電子部品の形状工は大きさの種類が
多くなり電子部品自動装着装置に多種類の電子部品を混
載できる装置が要求されてきた。
Problems to be Solved by the Invention However, in recent years, there has been an increase in the number of sizes of electronic parts that can be shaped, and there has been a demand for an automatic electronic parts mounting apparatus that can mix and load many types of electronic parts.

従来のような専用装置では、多種類の電子部品の形状、
大きさに対応できず、又、エジェクターも前記電子部品
の形状、大きさに対応できず、又1本のみで電子部品を
突き上げる場合、電子部品が安定せずノズルよりズした
シ、ワレ、カケが生じたりして多種類の電子部品を供給
出来なかった。
Conventional dedicated equipment can handle a wide variety of electronic component shapes,
In addition, the ejector cannot accommodate the shape and size of the electronic component, and if only one ejector is used to push up the electronic component, the electronic component may become unstable and fall out of the nozzle, resulting in scratches, cracks, or chips. This made it impossible to supply a wide variety of electronic components.

また、ノズルと突き上げピンの上昇駆動が独立している
ため同期して上昇させる調整が困難である問題を生じて
いた。
Furthermore, since the lifting drives of the nozzle and the push-up pin are independent, there has been a problem in that it is difficult to adjust the raising of the nozzle and the push-up pin in synchronization.

そこで本発明は、多種類の形状、大きさ電子部品を確実
に吸着できるようにしようとするものである。
Therefore, the present invention aims to make it possible to reliably pick up electronic components of various shapes and sizes.

問題点を解決するための手段 そして、上記問題点を解決する本発明の技術的手段は、
エジェクターに複数本の突き上げピンを設け、かつ移載
装置の上下動の駆動および前記突き上げビンの上下動の
駆動を行う駆動装置を設けたものである。
Means for solving the problems and the technical means of the present invention for solving the above problems are:
The ejector is provided with a plurality of push-up pins and a drive device that drives the vertical movement of the transfer device and the up-and-down movement of the push-up bin.

作  用 この技術的手段による作用は次のようになる。For production The effect of this technical means is as follows.

すなわち、駆動装置により移載装置および突き上げビン
の上下動を同期して行い、かつ、複数本の突き上げビン
で電子部品を突き上げる。
That is, the transfer device and the push-up bins are moved up and down synchronously by the drive device, and the electronic components are pushed up by the plurality of push-up bins.

実施例 第1図は本実施例の電子部品自動装着装置の一部を示し
、第2図はエジェクターを示し、第3図。
Embodiment FIG. 1 shows a part of an electronic component automatic mounting apparatus of this embodiment, FIG. 2 shows an ejector, and FIG. 3.

第4図は突き上げピンの詳細を示し、第6図は、へ電子
部品と突き上げビンの関係を示し、第6図は駆動系統を
示し、第7図は電子部品自動装着装置全体を示す。第7
図においてプリント基板6の流れに沿い詳述する。左側
に前記プリント基板6をストックする基板ストック4と
リフター装置(ローダ)3とプリント基板6を押し出し
て供給を行なう押し出し装置2と搬送コンベア6が設け
らへ中央には、前後左右に移動を行なう基板ホルダー7
によりプリント基板6が位置決めされ、又電子部品11
が位置決めされ移載しプリント基板5に装着が行われる
が、装着工程は後述する。前記電子部品11が装着され
たプリント基板6は搬出ガイドレール17と搬出装置1
6によりリフター装置14(アンローダ)に保持された
基板ストック4へ挿入される。第1図において中央手前
のX−Yテーブル10上に、インデックス装置12が固
定された電子部品供給装置9が設けられ、前記インデッ
クス装置121C治^21がネジ22により装着固定さ
れ数種類の電子部品11が装着されている。その下部に
エジェクター23が設けられている。第2図において前
記エジェクター23は後述する駆動装置よりロッド10
7が1方向に作動を行ない、ボールジヨイント88.シ
ャフト92゜N方向に揺動するアーム93.ボールジヨ
イント88、ロッド91.ボールジヨイント88がL方
向に揺動するアーム85.シャフト86を介して突き上
げシャフト83又は84が上下動する。前記シャフト8
3又は84には第4図に示すように1本の突き上げピン
24aと4本の突き上げビン24bが設けられている。
FIG. 4 shows the details of the push-up pin, FIG. 6 shows the relationship between the electronic component and the push-up pin, FIG. 6 shows the drive system, and FIG. 7 shows the entire electronic component automatic mounting device. 7th
A detailed explanation will be given along the flow of the printed circuit board 6 in the figure. A board stock 4 for stocking the printed circuit boards 6, a lifter device (loader) 3, an extrusion device 2 for pushing out and supplying the printed circuit boards 6, and a conveyor 6 are provided on the left side, and in the center, there is a board stock 4 for stocking the printed circuit boards 6, and a conveyor 6 for moving the printed circuit boards back and forth and left and right. Board holder 7
The printed circuit board 6 is positioned, and the electronic component 11
is positioned, transferred, and mounted on the printed circuit board 5, and the mounting process will be described later. The printed circuit board 6 on which the electronic component 11 is mounted is transported between the unloading guide rail 17 and the unloading device 1.
6 into the substrate stock 4 held by the lifter device 14 (unloader). In FIG. 1, an electronic component supply device 9 to which an indexing device 12 is fixed is provided on the X-Y table 10 in the center front, and the indexing device 121C is mounted and fixed with screws 22, and several types of electronic components 11 is installed. An ejector 23 is provided at the bottom thereof. In FIG. 2, the ejector 23 is driven by a rod 10 from a drive device which will be described later.
7 operates in one direction, and the ball joint 88. Shaft 92° Arm 93 swinging in the N direction. Ball joint 88, rod 91. An arm 85 with a ball joint 88 swinging in the L direction. The push-up shaft 83 or 84 moves up and down via the shaft 86. The shaft 8
3 or 84 is provided with one push-up pin 24a and four push-up pins 24b, as shown in FIG.

前記シャフト83又は84はブロック94とブロック8
1に保持され弾性体100及び101によシ下方に付勢
されている。突き上げピン24a 、24bを切り換え
るスライドレール89とシリンダー87が設けてあり、
ブロック96に固定されたスライドレール96とシリン
ダー99により全体がスライドを行なう構成になってい
る。前記エジェクター23の後方に電子部品位置決め装
置(以下プリセンターと略す)13が設けられ、その後
方にX軸を駆動するモータ26とY軸を駆動するモータ
26を有するX−Yテーブル上に基板ホルダー7が設け
てあシ、B方向に移動を行なう。更にその後方に接着剤
供給装置(以下、エポキシユニットと略す)27が設け
られ、接着剤は溝型リング29の溝に注入されモータ2
8により回転している。以上の各装置は一直線上に等間
隔に配置され、その上部に一直線上に等間隔に配置され
た移載ヘッド40a、40b。
The shaft 83 or 84 is connected to the block 94 and the block 8.
1 and is urged downward by elastic bodies 100 and 101. A slide rail 89 and a cylinder 87 are provided to switch the push-up pins 24a and 24b.
The entire structure slides using a slide rail 96 fixed to a block 96 and a cylinder 99. An electronic component positioning device (hereinafter referred to as precenter) 13 is provided behind the ejector 23, and a substrate holder is placed on an X-Y table having a motor 26 for driving the X axis and a motor 26 for driving the Y axis behind it. 7 is provided to move in direction B. Furthermore, an adhesive supply device (hereinafter abbreviated as an epoxy unit) 27 is provided behind it, and the adhesive is injected into the groove of the groove ring 29 and the motor 2
It is rotated by 8. Each of the above devices is arranged in a straight line at equal intervals, and above the devices are transfer heads 40a and 40b arranged in a straight line at equal intervals.

40cがE方向に移動を行ない電子部品11又は接着剤
を移載する。次に各装置を駆動する構成について説明す
る。駆動モータ103によシカム駆動装置104を駆動
し、ロッド105よシボールジョイント88を介しアー
ム108がシャフト109を支点としN方向(矢印)に
回動し、ボールジヨイント88とロッド110を介しグ
レート44a 、44bに取り付けられた移載ヘッド4
0a。
40c moves in the E direction and transfers the electronic component 11 or adhesive. Next, the configuration for driving each device will be explained. The drive motor 103 drives the cam drive device 104, and the arm 108 rotates in the N direction (arrow) using the shaft 109 as a fulcrum through the rod 105 and the ball joint 88, and the arm 108 rotates in the N direction (arrow) through the ball joint 88 and the rod 110. Transfer head 4 attached to 44a and 44b
0a.

40b 、40Gは前述したようにE方向に移動する。40b and 40G move in the E direction as described above.

また、ロッド106がM方向(矢印)に作動し、ボール
ジヨイント88を介しアーム66よりシャフト33が回
転し、アーム36及びプレート36が下方向(矢印)に
揺動することにより移載ヘッド40a 、40b 、4
0cO/ズル73゜74.75はH方向に上下動を行な
う。又、カム駆動装置104よりロッド107を作動さ
せることによシ前記エジェクター23の突き上げビン2
4a又は24bを突き上げる構成になっている。
Further, the rod 106 operates in the M direction (arrow), the shaft 33 rotates from the arm 66 via the ball joint 88, and the arm 36 and plate 36 swing downward (arrow), causing the transfer head 40a to move. ,40b,4
0cO/Zuru 73°74.75 performs vertical movement in the H direction. Also, by operating the rod 107 from the cam drive device 104, the ejector 23 is pushed up by the pin 2.
4a or 24b is pushed up.

電子部品供給装置9の電子部品11はシート102上に
貼られ任意に選別され所定の位置へX−Yテーブル1o
によシB方向(矢印)に移動を行ない停止する。エジェ
クター23のシリンダー99が作動を行ない前述したよ
うにシャフト98を介しブロック97によりスライドレ
ール96に沿ってエジェクタ−23全体は下方向(矢印
)に上昇を行ないエジェクター23の先端のリング7が
シート1o2に接触を行ない停止する。選別された小さ
い電子部品11aの場合、前記移載ヘッド40aのノズ
ル73aが前記カム駆動装置104により前記動作にて
H方向(矢印)に下降を行ない電子部品11aを吸着を
する。前記ノズル73aが上昇すると共に前記カム駆動
装置104により前記と同様ロッド107が1方向に引
くのでボールジヨイント88を介しアーム93を介し、
ボールジヨイント88よシロラド91とボールジヨイン
ト88よりアーム86をL方向に揺動する。シリンダー
87によシスライドレール89に沿って突き出しビンシ
ャフト84に切り換えられアーム86よシ前記シャフト
84は弾性体100に抗してC方向(矢印)へ上昇を行
ない、第3図のイ又は第6図のイに示すようにノズル7
3aと突き上げピン24aに挾まれH方向に上昇を行な
いシート1o2より剥離され供給を行なう。又、大きい
電子部品11bはノズル73bがH方向に下降し吸着を
行ない、前記と同様にシリンダー87によ枠参←ピンシ
ャフト83の弾性体101に抗してC方向(矢印)に上
昇を行ない、第3図又は第6図の口に示すように電子部
品11が大きい場合、4本の突き上げピン24 a −
dにより安定して供給が行われる。前記カム駆動装置が
更に作動を行なうとロッド107は押され弾性体1oO
又は1o1により突き上げビン24a 、24bは下・
降を行い、次の電子部品11を供給する。このように供
給された電子部品11は移載ヘッド40 aにより角度
設定が行われプリセンター13に移載され位置決めされ
る。又、移載ヘッド40bによシ前記位置決めされた電
子部品11は基板ホルダ=7に位置決めされたプリント
基板6の所定の位置へ装置される。又、後方のエポキシ
ユニット27よシ、移載ヘッド40cより接着剤をプリ
ント基板6の所定の位置へ塗布を行う。以上の作用をく
シ返すことによって電子部品11はプリント基板6へ装
着される。
The electronic components 11 of the electronic component supply device 9 are pasted on a sheet 102, arbitrarily sorted, and moved to a predetermined position on the X-Y table 1o.
Move in direction B (arrow) and stop. The cylinder 99 of the ejector 23 operates, and as described above, the entire ejector 23 is raised downward (indicated by the arrow) along the slide rail 96 by the block 97 via the shaft 98, and the ring 7 at the tip of the ejector 23 is moved to the seat 1o2. contact and stop. In the case of the selected small electronic component 11a, the nozzle 73a of the transfer head 40a is moved downward in the H direction (arrow) by the cam drive device 104 to adsorb the electronic component 11a. As the nozzle 73a rises, the rod 107 is pulled in one direction by the cam drive device 104 as before, so that the rod 107 is pulled in one direction via the ball joint 88 and the arm 93.
The arm 86 is swung in the L direction by the ball joint 88, the Shirorad 91, and the ball joint 88. The arm 86 is switched to the protruding pin shaft 84 along the system slide rail 89 by the cylinder 87, and the shaft 84 rises in the direction C (arrow) against the elastic body 100, and moves upward in the direction A or A in FIG. Nozzle 7 as shown in Figure 6 A.
3a and the push-up pin 24a, the sheet moves upward in the H direction, is peeled off from the sheet 1o2, and is supplied. Further, the nozzle 73b descends in the H direction to suck the large electronic component 11b, and the cylinder 87 moves the large electronic component 11b upward in the C direction (arrow) against the elastic body 101 of the pin shaft 83 in the same manner as above. , if the electronic component 11 is large as shown in FIG. 3 or FIG. 6, four push-up pins 24 a -
d ensures stable supply. When the cam drive device further operates, the rod 107 is pushed and the elastic body 1oO
Or, by 1o1, the push-up bins 24a and 24b are lowered.
Then, the next electronic component 11 is supplied. The electronic component 11 thus supplied is set at an angle by the transfer head 40a, and then transferred to the precenter 13 and positioned. Further, the positioned electronic component 11 is placed at a predetermined position on the printed circuit board 6 positioned at the board holder 7 by the transfer head 40b. Further, adhesive is applied to a predetermined position of the printed circuit board 6 from the rear epoxy unit 27 and the transfer head 40c. By repeating the above operations, the electronic component 11 is mounted on the printed circuit board 6.

以上のように電子部品11が小さい場合に1本の突き上
げピンが作動し、又、電子部品11が大きい場合に4本
の突き上げピンが作動を行なうように、大小専用の突き
上げビン24を設けたによシ形状、大きさに関係なく多
種類の電子部品11を安定して突き上げることができ、
又、移載ヘッド40aの上下動とエジェクターピンの上
下動がカム駆動装置104により連動していることによ
りスムーズに電子部品11を供給することができる。
As described above, push-up pins 24 dedicated to large and small sizes are provided so that one push-up pin operates when the electronic component 11 is small, and four push-up pins operate when the electronic component 11 is large. It is possible to stably push up various types of electronic components 11 regardless of shape and size.
Further, since the vertical movement of the transfer head 40a and the vertical movement of the ejector pin are linked by the cam drive device 104, the electronic components 11 can be smoothly supplied.

発明の効果 以上のように本発明は、エジェクターに電子部品の大き
さ形状に合わせられる複数の突き上げビンを設けたこと
により電子部品を安定して簡単に突き上げ、又、移載ヘ
ッドのノズルの上下動とエジェクタービンが連動し同期
して上昇するため電子部品が欠けたり傷ついたすせず、
確実に安定して、速く電子部品を突き上げることができ
る電子部品突き上げ吸着装置を実現できるものである。
Effects of the Invention As described above, the present invention provides the ejector with a plurality of push-up bins that can be matched to the size and shape of the electronic components, thereby stably and easily pushing up the electronic components, and also allows the nozzles of the transfer head to be moved up and down. The engine and ejector turbine are linked and rise in synchronization, so electronic parts are not chipped or damaged.
It is possible to realize an electronic component push-up suction device that can push up electronic components reliably, stably, and quickly.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例における電子部品自動装着装置
の移載装置の一部斜視図、第2図は同装着装置のエジェ
クターの断面図、第3図は同エジエフターの要部断面図
、第4図は同要部平面図、第6図は同エジェクターにお
ける電子部品に対するピンの位置を示した要部平面図、
第6図は同装着装置の要部正面図、第7図は同電子部品
自動装着装置の斜視図である。 23・・・・・・突き上げ装置(エジェクター)、24
・・・・・・突き上げピン、73,74.75・・・・
・・ノズル。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名11
−−一電テ部品 第2図      23−電子音p品矢さbす゛衷J−
心肋−−−莢さヱlア゛ビン (イ) tot 第4図 δ4ピ2ベフト 絢文き上ずピン 第5図
FIG. 1 is a partial perspective view of a transfer device of an automatic electronic component mounting device according to an embodiment of the present invention, FIG. 2 is a sectional view of an ejector of the same mounting device, and FIG. 3 is a sectional view of a main part of the same ejector. FIG. 4 is a plan view of the main part of the ejector, and FIG. 6 is a plan view of the main part showing the position of the pins relative to the electronic components in the ejector.
FIG. 6 is a front view of essential parts of the electronic component automatic mounting device, and FIG. 7 is a perspective view of the electronic component automatic mounting device. 23... Push-up device (ejector), 24
...Push-up pin, 73, 74.75...
··nozzle. Name of agent: Patent attorney Toshio Nakao and 1 other person11
--Electronic sound parts Figure 2 23-Electronic sound parts
Cardiac rib --- capsule (a) tot Fig. 4 δ 4 pin 2 beft knitted pin Fig. 5

Claims (3)

【特許請求の範囲】[Claims] (1)ウェハタイプの電子部品を突き上げ剥離せしめる
突き上げ装置と、前記電子部品を吸着し所定の位置へ移
載を行なう移載装置と、前記突き上げ装置および移載装
置を駆動する駆動装置を備え、前記突き上げ装置に複数
本の突き上げピンを設けたことを特徴とする電子部品突
き上げ吸着装置。
(1) A push-up device that pushes up and peels off a wafer-type electronic component, a transfer device that adsorbs the electronic component and transfers it to a predetermined position, and a drive device that drives the push-up device and the transfer device; An electronic component push-up suction device characterized in that the push-up device is provided with a plurality of push-up pins.
(2)複数本の突き上げピンが選択的に突き上げられる
ことを特徴とする特許請求の範囲第1項記載の電子部品
突き上げ吸着装置。
(2) The electronic component push-up suction device according to claim 1, wherein the plurality of push-up pins are selectively pushed up.
(3)前記突き上げ装置と前記移載装置の上下動を駆動
装置により同期して行うことを特徴とする特許請求の範
囲第1項記載の電子部品突き上げ吸着装置。
(3) The electronic component push-up suction device according to claim 1, wherein the push-up device and the transfer device are moved up and down synchronously by a drive device.
JP60107485A 1985-05-20 1985-05-20 Electronic component push-up device Expired - Lifetime JPH0671155B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60107485A JPH0671155B2 (en) 1985-05-20 1985-05-20 Electronic component push-up device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60107485A JPH0671155B2 (en) 1985-05-20 1985-05-20 Electronic component push-up device

Publications (2)

Publication Number Publication Date
JPS61267656A true JPS61267656A (en) 1986-11-27
JPH0671155B2 JPH0671155B2 (en) 1994-09-07

Family

ID=14460410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60107485A Expired - Lifetime JPH0671155B2 (en) 1985-05-20 1985-05-20 Electronic component push-up device

Country Status (1)

Country Link
JP (1) JPH0671155B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63255937A (en) * 1987-04-14 1988-10-24 Sumitomo Electric Ind Ltd Chip mounting equipment
JPH03114299A (en) * 1989-09-27 1991-05-15 Matsushita Electric Ind Co Ltd Mounting machine head for chiplike electronic component
JP2009176988A (en) * 2008-01-25 2009-08-06 Panasonic Corp Electronic component mounting device
JP2018046060A (en) * 2016-09-12 2018-03-22 ファスフォードテクノロジ株式会社 Semiconductor manufacturing apparatus and semiconductor device manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245873A (en) * 1975-10-08 1977-04-11 Hitachi Ltd Article adsorbing mechanism
JPS5979547A (en) * 1982-10-28 1984-05-08 Mitsubishi Electric Corp Sucker for minute part

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245873A (en) * 1975-10-08 1977-04-11 Hitachi Ltd Article adsorbing mechanism
JPS5979547A (en) * 1982-10-28 1984-05-08 Mitsubishi Electric Corp Sucker for minute part

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63255937A (en) * 1987-04-14 1988-10-24 Sumitomo Electric Ind Ltd Chip mounting equipment
JPH03114299A (en) * 1989-09-27 1991-05-15 Matsushita Electric Ind Co Ltd Mounting machine head for chiplike electronic component
JP2009176988A (en) * 2008-01-25 2009-08-06 Panasonic Corp Electronic component mounting device
JP2018046060A (en) * 2016-09-12 2018-03-22 ファスフォードテクノロジ株式会社 Semiconductor manufacturing apparatus and semiconductor device manufacturing method

Also Published As

Publication number Publication date
JPH0671155B2 (en) 1994-09-07

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