JPS6137005B2 - - Google Patents
Info
- Publication number
- JPS6137005B2 JPS6137005B2 JP58249760A JP24976083A JPS6137005B2 JP S6137005 B2 JPS6137005 B2 JP S6137005B2 JP 58249760 A JP58249760 A JP 58249760A JP 24976083 A JP24976083 A JP 24976083A JP S6137005 B2 JPS6137005 B2 JP S6137005B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- vacuum
- aluminum
- hollow
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES, PROFILES OR LIKE SEMI-MANUFACTURED PRODUCTS OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C23/00—Extruding metal; Impact extrusion
- B21C23/02—Making uncoated products
- B21C23/04—Making uncoated products by direct extrusion
- B21C23/14—Making other products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES, PROFILES OR LIKE SEMI-MANUFACTURED PRODUCTS OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C23/00—Extruding metal; Impact extrusion
- B21C23/009—Gas treatment of work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Extrusion Of Metal (AREA)
Description
【発明の詳細な説明】
この発明は、たとえばシンクロトロンなどの加
速器に使用される粒子加速用パイプのような高真
空状態で用いられるアルミニウム製中空押出形材
の製造法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing hollow extruded aluminum profiles used in high vacuum conditions, such as particle acceleration pipes used in accelerators such as synchrotrons.
この明細書において、アルミニウムとはアルミ
ニウムおよびその合金を含むものとする。 In this specification, aluminum includes aluminum and its alloys.
この種の粒子加速用パイプの材料には、いまま
で主としてステンレスが使用されてきたが、最近
になつてアルミニウムがこの用途に適しているこ
とが分かり、使用されるようになつてきている。
その理由は、アルミニウムの方がステンレスに比
べて誘導放射能を生じにくくかつ生じても減衰時
間が早いこと、熱伝導性および電気伝導性が良好
であること、表面のガス放出係数が小さいこと、
軽量であること、加工性が良いことなどの点で優
れているからである。この粒子加速用パイプの内
部は、粒子を高速で通す必要上、高真空に保たな
ければならない。したがつて、いかにしてパイプ
内部を高真空にするかということが重要な課題と
なる。 Up until now, stainless steel has mainly been used as the material for this type of particle acceleration pipe, but recently aluminum has been found to be suitable for this purpose and is being used more and more.
The reasons for this are that compared to stainless steel, aluminum is less likely to generate induced radiation, and even if it does, it decays quickly, has good thermal and electrical conductivity, and has a small surface gas release coefficient.
This is because it is excellent in terms of light weight and good workability. The inside of this particle acceleration pipe must be kept at a high vacuum in order to allow particles to pass through it at high speed. Therefore, an important issue is how to create a high vacuum inside the pipe.
従来、粒子加速用パイプの内部を高真空にする
ために、パイプ内面を有機溶剤等により脱脂処理
した後、約150℃で24時間程度の加熱脱ガス処理
を繰返して行なつたり、またこの処理と組合わせ
て水素ガス、アルゴンガス、酸素ガスなどの中で
の放電洗浄を行つていたが、このような作業は長
時間を要して非能率的であるうえに、真空度の点
においても未だ充分に満足し得るものではなかつ
た。 Conventionally, in order to create a high vacuum inside a particle acceleration pipe, the inner surface of the pipe was degreased with an organic solvent, etc., and then heated and degassed at approximately 150°C for about 24 hours was repeatedly performed. Previously, discharge cleaning was carried out in hydrogen gas, argon gas, oxygen gas, etc., in combination with the was still not completely satisfactory.
ところで粒子加速用パイプ内部の高い真空度を
保持するためには、製品になつた後におけるパイ
プ内壁からの放出ガスを減らすことが重要であ
る。この点につき本発明者らは実験研究を重ねた
結果、アルミニウム製パイプの内面の皮膜状態が
真空度に大きく影響を与えることが判明した。 By the way, in order to maintain a high degree of vacuum inside the particle acceleration pipe, it is important to reduce the amount of gas released from the inner wall of the pipe after it is made into a product. As a result of repeated experimental research on this point, the present inventors have found that the state of the coating on the inner surface of the aluminum pipe has a large effect on the degree of vacuum.
アルミニウムは、周知のように、非常に酸化さ
れ易い金属であり、微量の酸素に触れただけで表
面に酸化膜が形成される。また、水、湿気などの
水分の存在する環境下に置かれると、その表面に
水和酸化膜が生成する。そして水和酸化物の生成
反応の温度が高い程水和酸化膜の成長は著しく、
高温環境ではアルミニウム表面にベーマイトまた
はバイアライトなどの水和酸化膜が形成される。
このような水和酸化膜の膜質は、水分の存在しな
い環境で形成されるアルミニウム酸化膜に比べて
非常に粗で多孔質状でありかつその孔形態も複雑
にいり込んでいる。加えて膜厚も厚い。 As is well known, aluminum is a metal that is very easily oxidized, and an oxide film is formed on the surface even if it comes into contact with a trace amount of oxygen. Furthermore, when placed in an environment containing moisture such as water or humidity, a hydrated oxide film is formed on the surface. The higher the temperature of the hydrated oxide production reaction, the more remarkable the growth of the hydrated oxide film.
In a high temperature environment, a hydrated oxide film such as boehmite or vialite is formed on the aluminum surface.
The quality of such a hydrated oxide film is much rougher and more porous than that of an aluminum oxide film formed in an environment without moisture, and the pores are also intricately shaped. In addition, the film thickness is also thick.
ところで、通常の押出成形によるアルミニウム
製パイプの内面には、成形時水分を含んだ大気と
の接触により水和酸化膜が生成される。しかもこ
の水和酸化膜は、押出時高温にさらされるため、
水和酸化膜の生成反応が促進されて厚膜となつて
いる。この水和酸化膜の膜質は上述のとおりのも
のであり、かつ厚膜であるために皮膜に多くの水
分が吸着する。しかも皮膜がちみつさに欠けるた
めに、成形後においても大気中に存在する水分、
ハイドロカーボン、二酸化炭素および一酸化炭素
などの真空度低下物質が皮膜に吸着する。このよ
うな真空度低下物質は、前記ガス中における放電
洗浄時や真空引き時においてすらなお若干存在し
ているために前記同様皮膜に吸着する。しかもこ
れは水和酸化膜が上記のようなものであるため
に、皮膜内にいわば吸蔵された形態になる。その
結果これの脱離が困難な状態となり、真空引きを
行なつてもなかなか除去できない。したがつて、
これが粒子加速用パイプの真空度向上阻害の原因
になつている。また押出成形後のアルミニウム製
パイプの機械的強度を高めるために、高温加熱
後、水冷および空冷などの焼入れ処理が行なわれ
るが、このさいにも押出成形時に形成された上述
の水和酸化膜はさらに成長するとともにすでに吸
着されている真空度低下物質は皮膜に内蔵される
形となる。 By the way, a hydrated oxide film is formed on the inner surface of an aluminum pipe formed by ordinary extrusion molding due to contact with the atmosphere containing moisture during molding. Moreover, this hydrated oxide film is exposed to high temperatures during extrusion, so
The formation reaction of the hydrated oxide film is promoted, resulting in a thick film. The film quality of this hydrated oxide film is as described above, and since it is a thick film, a large amount of water is adsorbed to the film. Moreover, because the film lacks consistency, moisture that remains in the atmosphere even after molding.
Vacuum reducing substances such as hydrocarbons, carbon dioxide and carbon monoxide are adsorbed onto the coating. Such substances that lower the degree of vacuum are still present to some extent even during discharge cleaning in the gas or during evacuation, and therefore are adsorbed to the film as described above. Moreover, since the hydrated oxide film is as described above, it is in the form of being occluded within the film. As a result, it becomes difficult to remove it, and it is difficult to remove it even by vacuuming. Therefore,
This is the cause of the impediment to improving the degree of vacuum in the particle acceleration pipe. In addition, in order to increase the mechanical strength of aluminum pipes after extrusion, quenching treatments such as water cooling and air cooling are performed after high-temperature heating, but the above-mentioned hydrated oxide film formed during extrusion is also As the film grows further, the vacuum-lowering substances that have already been adsorbed become incorporated into the film.
この発明の目的は、上記の問題を解決し、内部
を真空に保つことが要求される粒子加速用パイプ
などの用途に適した真空用アルミニウム製中空押
出形材の安価な製造法を提供することにある。 The purpose of this invention is to solve the above-mentioned problems and provide an inexpensive manufacturing method for vacuum extrusion aluminum hollow extruded sections suitable for applications such as particle acceleration pipes that require the interior to be kept in a vacuum. It is in.
この発明による真空用アルミニウム製中空押出
形材の製造法は、アルミニウム中空押出形材を押
出成形するにあたり、押出されつつある形材の中
空部内に不純物としての酸素を含む不活性ガスを
供給し、この不活性ガス中に含まれる酸素によ
り、中空押出形材の内面にちみつで薄い酸化膜を
形成することを特徴とするものである。 The method for manufacturing a hollow extruded aluminum profile for vacuum use according to the present invention includes, when extruding an aluminum hollow extruded profile, supplying an inert gas containing oxygen as an impurity into the hollow part of the profile being extruded; This method is characterized in that a thin honey oxide film is formed on the inner surface of the hollow extruded shape due to the oxygen contained in the inert gas.
上記において、押出形材の素材としては、押出
性および機械的強度の点から、A6061および
A6063などのA―Mg―Si系合金が好ましい。
不活性ガスとしては、アルゴンおよびヘリウムが
一般的である。また現在工業的に得られる不活性
ガスの純度はほぼ99.99%であり、微量の酸素が
不純物として必ず含まれている。 In the above, from the viewpoint of extrudability and mechanical strength, A6061 and
A-Mg-Si alloys such as A6063 are preferred.
Argon and helium are common inert gases. Furthermore, the purity of the inert gas currently available industrially is approximately 99.99%, and it always contains a small amount of oxygen as an impurity.
従来方法で製造されたアルミニウム製加速用パ
イプでは、その真空度が充分満足しうるまで高く
ない理由は、上述したようにアルミニウム表面に
水和酸化膜が形成せられており、この水和酸化膜
に吸蔵された状態になつている真空度低下物質が
パイプ内に放出されるからであるが、この発明の
真空用アルミニウム製中空押出形材の製造法によ
れば、アルミニウム中空押出形材を押出成形する
にあたり、押出されつつある形材の中空部内に不
純物としての酸素を含む不活性ガスを供給するも
のであるから、中空押出形材の内面は水分を含ん
だ大気と接触することはなく、同内面に問題のあ
る水和酸化膜が生成しない。他方上記供給不活性
ガス中に含まれる酸素により、同内面に酸化膜が
形成せられる。この酸化膜の膜質はちみつでかつ
その膜厚は薄いから、水和酸化膜に較べて真空度
低下物質の吸着、吸蔵は著しく少なく、かつ吸
着、吸蔵されていても脱ガス処理により簡単にこ
れを除去することができる。したがつて、真空度
低下物質がパイプ内に放出される量が非常に少な
くなり、高真空度を保つことができるし、従来の
ように真空度を高めるための面倒な作業を省略な
いし軽減することができる。 The reason why the degree of vacuum in aluminum acceleration pipes manufactured using conventional methods is not sufficiently high is that, as mentioned above, a hydrated oxide film is formed on the aluminum surface, and this hydrated oxide film This is because vacuum deteriorating substances that are occluded in the pipe are released into the pipe.However, according to the method for manufacturing a hollow extruded aluminum profile for vacuum use of the present invention, the hollow extruded aluminum profile is extruded. During molding, an inert gas containing oxygen as an impurity is supplied into the hollow part of the extruded shape, so the inner surface of the hollow extruded shape does not come into contact with the moisture-containing atmosphere. No problematic hydrated oxide film is formed on the same inner surface. On the other hand, due to the oxygen contained in the supplied inert gas, an oxide film is formed on the same inner surface. Since the film quality of this oxide film is honey and its thickness is thin, adsorption and occlusion of vacuum deteriorating substances is significantly less than that of a hydrated oxide film, and even if it is adsorbed or occluded, it can be easily removed by degassing treatment. Can be removed. Therefore, the amount of vacuum-degrading substances released into the pipe is extremely small, making it possible to maintain a high degree of vacuum, and eliminating or reducing the troublesome work required to increase the degree of vacuum as in the past. be able to.
また形材の中空部内に酸素のみを供給すること
が考えられるが、酸素でけであればダイスに付着
している油が押出時の温度の高い中空押出形材に
転移したりすると爆発の危険性がある。この危険
性を除くために酸素と不活性ガスとの混合ガスを
用いるのがよいが、コスト高となる。この発明に
よれば、不活性ガスの存在によりこのようなおそ
れがないし、微量の酸素で充分上記酸化膜が得ら
れるからコスト安となる利点がある。 It is also possible to supply only oxygen into the hollow part of the shape, but if there is only oxygen, there is a risk of explosion if oil adhering to the die transfers to the hollow extruded shape, where the temperature is high during extrusion. There is sex. In order to eliminate this danger, it is preferable to use a mixed gas of oxygen and an inert gas, but this increases the cost. According to the present invention, there is no such fear due to the presence of an inert gas, and the above-mentioned oxide film can be sufficiently obtained with a small amount of oxygen, which has the advantage of reducing costs.
なお、この発明の方法によつて得られた中空押
出形材は、粒子加速用パイプに限らず高真空を保
つ必要がある製品に用いることができる。 Note that the hollow extruded shape obtained by the method of the present invention can be used not only for particle acceleration pipes but also for products that require maintaining a high vacuum.
この発明の実施例を、以下図面を参照して説明
する。 Embodiments of the invention will be described below with reference to the drawings.
第1図には押出機が示されており、同図におい
て、1はコンテナ、2はコンテナ1内のアルミニ
ウム・ビレツト、3,4はビレツト2を押圧する
ダミー・ブロツクおよびステム、5は中央に混合
ガス噴射口6を有するポート・ホール・ダイス雄
型、7は同雌型、8はダイ・ホルダ、9,10は
雄型5およびダイ・ホルダ8に形成せられたガス
通路、11はダイ・ホルダ8に設けられたガス供
給口、12はガス容器で、これに取付けられた導
管13がガス供給口11に接続せられている。1
4はボルスタである。 Fig. 1 shows an extruder, in which 1 is a container, 2 is an aluminum billet inside the container 1, 3 and 4 are dummy blocks and stems that press the billet 2, and 5 is in the center. A male port hole die having a mixed gas injection port 6, 7 a female die, 8 a die holder, 9 and 10 gas passages formed in the male die 5 and the die holder 8, and 11 a die. - A gas supply port 12 provided on the holder 8 is a gas container, and a conduit 13 attached to this is connected to the gas supply port 11. 1
4 is a bolster.
第1図の押出機により、第2図および第3図に
示されているような横断面を有する粒子加速用パ
イプに用いられる中空押出形材15,16が押出
成形されるのである。もちろん両者を成形するダ
イスは成形されるべき形材15,16のそれぞれ
に合致した形状のものが用いられる。所定長さの
両押出形材15,16が交互に連結せられて無端
状の粒子加速用パイプ(図示せず)が組立てられ
るのである。両図において、17,18は横断面
楕円形の粒子流通中空部(粒子加速用パイプに組
込時―以下同様)、19はこれに隣接する横断面
方形の真空引き用中空部、20は両中空部17,
19間の隔壁で、これには所定間隔おきに連通孔
があけられる。21,22は粒子流通中空部1
7,18の一側に設けられた横断面小円形の冷却
水流通中空部、23,24および25は粒子流通
中空部17,18および真空用中空部19のそれ
ぞれ一側に設けられた加熱脱ガス処理用シーズ・
ヒータ線取付用溝である。 The extruder shown in FIG. 1 is used to extrude hollow extruded sections 15, 16 used for particle acceleration pipes having cross sections as shown in FIGS. 2 and 3. Of course, the dies used for molding both have shapes that match the respective shapes 15 and 16 to be molded. Both extruded sections 15 and 16 of a predetermined length are alternately connected to assemble an endless particle acceleration pipe (not shown). In both figures, reference numerals 17 and 18 indicate a particle flow hollow part with an elliptical cross section (when incorporated into a particle acceleration pipe - the same applies hereinafter), 19 an adjacent hollow part for evacuation with a rectangular cross section, and 20 a hollow part for vacuum evacuation with a rectangular cross section. hollow part 17,
19 partition walls, in which communication holes are bored at predetermined intervals. 21 and 22 are particle circulation hollow parts 1
Cooling water circulation hollow portions 7 and 18 with a small circular cross section are provided on one side, and heating desorption portions 23, 24 and 25 are provided on one side of the particle circulation hollow portions 17 and 18 and the vacuum hollow portion 19, respectively. Seeds for gas processing
This is a groove for attaching heater wires.
上記中空押出形材15の製造順序について述べ
る。まず、ダイスを苛性洗浄した後560℃で3時
間均質化処理したA6063のビレツト2を押出温度
500℃、押出速度10m/minで押出す。このさい
潤滑油は使用しない。前記押出と同時にガス容器
12より不純物としての酸素を含むアルゴンガス
26を導管13、通路10,9を経て噴出口6よ
り圧力2〜3Kg/cm2で噴出し、押出されつつある
形材15の中空部内に供給する。そして僅か押出
された後の形材15の先端開口部をプレスで圧接
して密封し、第1図に示されているような一方の
密封端部27を形成する。その後も混合ガス26
の供給を継続し、所定長さ押出した後、形材15
をシヤーで切断すると同時に切断端を密封し、他
方の密封端部28を形成する(第4図参照)。そ
の後混合ガス26を密封したまゝの形材15を
250℃まで強制空冷し、続いて自然冷却した後引
張り矯正する。つぎにそのまゝの状態で180℃で
6時間時効処理を行なう。最後に形材15の両密
封端部27,28を油を用いずかつエヤー・ブロ
ーなしで切断し、所定寸法の中空押出形材をう
る。他の中空押出形材16もダイスを代えるだけ
で上記と同様にして製造せられる。 The manufacturing order of the hollow extruded section 15 will be described. First, billet 2 of A6063, which had been homogenized at 560℃ for 3 hours after caustic cleaning of the die, was extruded at the extrusion temperature.
Extrude at 500℃ and extrusion speed of 10m/min. Do not use lubricant at this time. At the same time as the extrusion, argon gas 26 containing oxygen as an impurity is ejected from the gas container 12 through the conduit 13 and the passages 10 and 9 from the ejection port 6 at a pressure of 2 to 3 kg/cm 2 to remove the shape 15 that is being extruded. Supplied into the hollow part. Then, the tip opening of the slightly extruded section 15 is pressed and sealed with a press to form one sealed end 27 as shown in FIG. After that, the mixed gas 26
After continuing to supply the material and extruding it to a predetermined length, the shape material 15
is cut with a shear and the cut end is sealed at the same time to form the other sealed end 28 (see FIG. 4). After that, the profile 15 with the mixed gas 26 sealed is
Forced air cooling to 250℃ followed by natural cooling followed by tensile straightening. Next, aging treatment is performed at 180°C for 6 hours in that state. Finally, the two sealed ends 27, 28 of the profile 15 are cut off without oil and without air blowing to obtain a hollow extruded profile of the specified dimensions. Other hollow extruded sections 16 can also be manufactured in the same manner as described above, only by changing the die.
なお、上記両密封端部27,28は、押出成形
後、中空押出形材の使用地に送られてから切断除
去してもよい。 Note that the sealed end portions 27 and 28 may be cut and removed after being sent to the place where the hollow extruded shape is used after extrusion molding.
上記押出形材の内面にはちみつでかつ薄い酸化
膜が形成されていた。 A thin honey oxide film was formed on the inner surface of the extruded shape.
図面はこの発明の実施例を示すもので、第1図
は押出成形途上の状態を示す縦断面図、第2図は
第1図の―線にそう断面図、第3図は粒子加
速用パイプをつくるさい第2図の形材と組合わせ
て用いられる他の形材の第2図相当断面図、第4
図は不純物としての酸素を含む不活性ガス密封状
態の形材の縦断面図である。
15,16…中空押出形材。
The drawings show an embodiment of the present invention, in which Fig. 1 is a longitudinal sectional view showing a state in the middle of extrusion molding, Fig. 2 is a sectional view taken along the line - in Fig. 1, and Fig. 3 is a particle acceleration pipe. Figure 2-equivalent cross-sectional view of other shapes used in combination with the shapes shown in Figure 2 when making
The figure is a longitudinal sectional view of a profile sealed with an inert gas containing oxygen as an impurity. 15, 16...Hollow extruded shape.
Claims (1)
あたり、押出されつつある形材の中空部内に不純
物としての酸素を含む不活性ガスを供給し、この
不活性ガス中に含まれる酸素により、中空押出形
材の内面にちみつで薄い酸化膜を形成することを
特徴とする真空用アルミニウム製中空押出形材の
製造法。1. When extruding an aluminum hollow extruded section, an inert gas containing oxygen as an impurity is supplied into the hollow part of the extruded section, and the oxygen contained in this inert gas causes the hollow extruded section to be formed. A method for manufacturing hollow extruded aluminum shapes for vacuum use, which is characterized by forming a thin oxide film with honey on the inner surface of the material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58249760A JPS59130624A (en) | 1981-11-04 | 1983-12-26 | Production of hollow extruded shape made of aluminum for vacuum |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56177552A JPS5919769B2 (en) | 1981-11-04 | 1981-11-04 | Manufacturing method for hollow extruded aluminum sections for vacuum use |
| JP58249760A JPS59130624A (en) | 1981-11-04 | 1983-12-26 | Production of hollow extruded shape made of aluminum for vacuum |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56177552A Division JPS5919769B2 (en) | 1981-11-04 | 1981-11-04 | Manufacturing method for hollow extruded aluminum sections for vacuum use |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59130624A JPS59130624A (en) | 1984-07-27 |
| JPS6137005B2 true JPS6137005B2 (en) | 1986-08-21 |
Family
ID=26498063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58249760A Granted JPS59130624A (en) | 1981-11-04 | 1983-12-26 | Production of hollow extruded shape made of aluminum for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59130624A (en) |
-
1983
- 1983-12-26 JP JP58249760A patent/JPS59130624A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59130624A (en) | 1984-07-27 |
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