JPS6147513A - Optical fiber sensor - Google Patents

Optical fiber sensor

Info

Publication number
JPS6147513A
JPS6147513A JP59169150A JP16915084A JPS6147513A JP S6147513 A JPS6147513 A JP S6147513A JP 59169150 A JP59169150 A JP 59169150A JP 16915084 A JP16915084 A JP 16915084A JP S6147513 A JPS6147513 A JP S6147513A
Authority
JP
Japan
Prior art keywords
optical fiber
polarization optical
polarization
constant polarization
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59169150A
Other languages
Japanese (ja)
Inventor
Yoshio Kikuchi
菊地 佳夫
Takeru Fukuda
福田 長
Takao Shioda
塩田 孝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP59169150A priority Critical patent/JPS6147513A/en
Publication of JPS6147513A publication Critical patent/JPS6147513A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To make it possible to measure the physical force to be measured among various physical forces without receiving the effect of the other physical forces, by directly connecting a compensation constant polarization optical fiber, which has a characteristic substantially equal to that of a sensor constant polarization optical fiber, to the sensor constant polarization optical fiber. CONSTITUTION:A polarizer 3 is arranged with respect to a compensation constant polarization optical fiber 2 so that linear polarized light is excited in a ratio of 1:1 to the X'- and Y'- directions of a constant polarization optical fiber 2. The constant polarization optical fiber 1 and the constant polarization optical fiber 2 are constituted so as to be made substantially equal in a double refraction index characteristic and same in phase difference. The main axes of both optical fibers are mutually rotated by 90 deg. to be connected so as to be crossed at right angles so that the linear polarized light propagated through the constant polarization optical fiber 2 in the X'-direction is propagated to a Y-direction in the constant polarization optical fiber 1 and that propagated through the constant polarization optical fiber 2 in the Y'-direction is propagated to an X-direction in the constant polarization optical fiber 1 to an X-direction. By this method, when the same temp. is imparted to both of the constant polarization optical fibers 1, 2, the phase difference generated between the polarizations of the sensor constant polarization optical fiber 1 in the X- and Y-directions is cancelled out by that generated between the polarizations of the compensation constant polarization optical fiber 2 in the X'- and Y'-directions.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 この発明は、定偏波光ファイバに温度、圧力、張力等の
物理力が加わるときその複屈折が変化することを利用し
て物理力を測定する光ファイバセンサの改良に関する。
Detailed Description of the Invention (a) Industrial Application Field This invention utilizes the fact that when physical forces such as temperature, pressure, and tension are applied to a constant polarization optical fiber, its birefringence changes. This invention relates to improvements in optical fiber sensors for measurement.

(ロ)従来技術 従来より、定偏波光ファイバの複屈折率が温度、張力、
圧力などによって変化するため、これを利用した光ファ
イバセンサが種々に提案されている。たとえば、第4図
に示すような定偏波光ファイバ1を用いて第5図のよう
に構成される。
(b) Conventional technology It has been known that the birefringence of a polarization-controlled optical fiber depends on temperature, tension,
Since it changes depending on pressure, etc., various optical fiber sensors that utilize this have been proposed. For example, it is constructed as shown in FIG. 5 using a polarization-controlled optical fiber 1 as shown in FIG.

この定偏波光ファイバlは、中央部のコア11の周囲に
形成されたクラッド12中に、コア11の両脇に2つの
応力付与部13.13を配したもので、残留歪に異方性
を持たせて複屈折を持たせたものである。そして第5図
のように、偏光子3と検光子4とが空間的に平行または
直交ニコル状態とされ、この間に、上記の定偏波光ファ
イバlの主軸が入射偏光に対して45°とな′るように
回転されて定偏波光ファイバlが配置される。この構成
で、定偏波光ファイバ1の主軸であるX、Y方向に対し
て直線偏光をl:1に励振すると、その2つの偏光の位
相差により終端での偏波状態が変化し、これにともない
検光子4を通過する光パワーも変化するので、温度、張
力、圧力などの測定が可能となる。
This constant polarization optical fiber l has two stress applying parts 13 and 13 arranged on both sides of the core 11 in a cladding 12 formed around a central core 11, and has anisotropy in residual strain. It has double refraction. As shown in FIG. 5, the polarizer 3 and analyzer 4 are brought into a spatially parallel or orthogonal Nicol state, and during this time, the main axis of the polarization-constant optical fiber l is at 45° with respect to the incident polarization. The polarization-constant optical fiber 1 is rotated so that the fixed polarization optical fiber 1 is rotated so that the fixed polarization optical fiber 1 is rotated so as to With this configuration, when linearly polarized light is excited at l:1 with respect to the X and Y directions, which are the main axes of the constant polarization optical fiber 1, the polarization state at the end changes due to the phase difference between the two polarized lights. Since the power of the light passing through the analyzer 4 changes accordingly, it becomes possible to measure temperature, tension, pressure, etc.

ところで、このような定偏波光ファイバの複屈折率変化
を利用した光ファイバセンサは、一般に高感度であるが
、温度、張力、圧力といった多くの測定対象に対して反
応するため、逆にたとえば張力だけを測定したいという
ときには、周囲温度を一定に保たなければならないとか
、使用環境条件が限定されるという欠点がある。
By the way, optical fiber sensors that utilize the change in birefringence of polarized optical fibers are generally highly sensitive, but they react to many measurement targets such as temperature, tension, and pressure; If you only want to measure the temperature, there are drawbacks such as the need to keep the ambient temperature constant and the environmental conditions for use limited.

(ハ)目的 この発明は、温度、張力、圧力などの種々の物理力のう
ち測定対象としたもののみを、非測定対象たる他の物理
力に影響されずに測定することができ、使用環境条件な
どの制限を除去して使用範囲の拡大を図った光ファイバ
センサを提供することを目的とする。
(c) Purpose This invention enables the measurement of only the physical forces to be measured, such as temperature, tension, pressure, etc., without being influenced by other physical forces that are not to be measured. It is an object of the present invention to provide an optical fiber sensor that can be used in a wider range of applications by removing restrictions such as conditions.

(ニ)構成 この発明によれば、定偏波光ファイバに温度。(d) Configuration According to this invention, the polarization constant optical fiber is heated.

圧力、張力等の物理力が加わるときその複屈折が変化す
ることを利用して上記の物理力を測定する光ファイバセ
ンサにおいて、センサ用定偏波光ファイバと実質的に等
しい特性を有する補償用定偏波光ファイバを、該センサ
用定偏波光ファイバに直交接続している。そして、たと
えば、張力を測定対象としたとき、周囲環境の温度変化
がこれらセンサ用定偏波光ファイバと補償用定偏波光フ
ァイバの両方に加わって両方で同じように複屈折変化を
生じる。そこで、画定偏波光ファイバを直交接続するこ
とにより、この測定対象でない温度によるセンサ用定偏
波光ファイバの複屈折変化を補償用定偏波光ファイバの
複屈折変化で補償し、センサ用定偏波光ファイバに加わ
る測定対象たる張力のみを測定する。
In an optical fiber sensor that measures the above-mentioned physical force by utilizing the change in birefringence when a physical force such as pressure or tension is applied, a compensating constant having substantially the same characteristics as a constant polarization optical fiber for the sensor is used. A polarized optical fiber is orthogonally connected to the sensor polarization constant optical fiber. For example, when tension is the object to be measured, temperature changes in the surrounding environment are applied to both the sensor polarization-constant optical fiber and the compensation polarization-constant optical fiber, causing birefringence changes in both in the same way. Therefore, by orthogonally connecting defined polarization optical fibers, the change in birefringence of the polarization constant optical fiber for the sensor due to the temperature that is not the object of measurement is compensated for by the birefringence change of the compensation polarization constant optical fiber, and the polarization constant optical fiber for the sensor is Measures only the tension that is applied to the object.

(ホ)実施例 第1図において、この発明に係る光ファイバセンサは、
センサ用定偏波光ファイバ1と、これに直交接続される
補償用定偏波光ファイバ2と、偏光子3と、検光子4と
からなる。偏光子3は、補償用定偏波光ファイバ2に対
し、定偏波光ファイバ2のXo、Y″方向直線偏光がl
:1に励振されるように配置される。定偏波光ファイバ
lと定偏波光ファイバ2とは同一の定偏波光ファイバか
ら同じ長さに切断して作ることなどにより、複屈折率特
性を実質的に等しくし、位相差が同じとなるようにする
。そして、定偏波光ファイバ2を伝搬したX′力方向直
線偏光が定偏波光ファイバ1ではY方向に、定偏波光フ
ァイバ2を伝搬したY゛方向直線偏光が定偏波光ファイ
バ1ではX方向に伝搬するよう、互いに主軸を90°回
転させて直交接続される。つまりこれにより、定偏波光
ファイバ1.2の両方に同じ温度が与えられたときなど
では、センサ用定偏波光ファイバ1のX、Y方向の偏光
間で生じた位相差は補償用定偏波光ファイバ2のXo、
Y°力方向偏光間で生じた位相差で相殺されてしまう、
こ−のように、周囲環境の温度変化があっても、両方の
定偏波光ファイバ1.2にともに作用するため、2つの
偏光間の位相差が無視できるものとなる。
(E) Embodiment In FIG. 1, the optical fiber sensor according to the present invention is
It consists of a constant polarization optical fiber 1 for a sensor, a constant polarization optical fiber 2 for compensation that is orthogonally connected to the constant polarization optical fiber 1, a polarizer 3, and an analyzer 4. The polarizer 3 is configured such that the linearly polarized light in the Xo and Y'' directions of the constant polarization optical fiber 2 is l
:1. The constant polarization optical fiber 1 and the constant polarization optical fiber 2 are made by cutting the same constant polarization optical fiber to the same length, so that the birefringence characteristics are substantially equal and the phase difference is the same. Make it. Then, the linearly polarized light in the X′ force direction that propagated through the constant polarization optical fiber 2 moves in the Y direction in the constant polarization optical fiber 1, and the linearly polarized light in the Y′ direction that propagated in the constant polarization optical fiber 2 moves in the X direction in the constant polarization optical fiber 1. For propagation, they are orthogonally connected with their main axes rotated by 90°. In other words, when the same temperature is applied to both polarized optical fibers 1 and 2, the phase difference that occurs between the polarized light in the X and Y directions of the polarized optical fiber 1 for sensor is Xo of fiber 2,
It is canceled out by the phase difference that occurs between the polarized lights in the Y° force direction.
In this way, even if there is a temperature change in the surrounding environment, it acts on both polarization constant optical fibers 1.2, so that the phase difference between the two polarizations can be ignored.

したがって、両方の定偏波光ファイバ1.2にともに作
用しない物理力、たとえばセンサ用定偏波光ファイバl
にのみ加わる測定対象たる張力や圧力によってのみ複屈
折の変化による偏光間の位相差が現われ、検光子4を通
して光パワーの変体。
Therefore, physical forces that do not act on both polarization-controlled optical fibers 1.2, for example, the polarization-controlled optical fiber for sensor l.
A phase difference between polarized lights due to a change in birefringence appears only due to the tension or pressure applied to the measurement object, and a change in optical power occurs through the analyzer 4.

とじて計測することができる。It can be measured by closing.

第2図は第2の実施例を示す、この図において、センサ
用定偏波光ファイバl、補償用定偏波光ファイバ2、偏
光子3、検光子4およびそれらの配置関係は第1図と同
じであり、ただ、補償用定偏波光ファイバ2と偏光子3
との間に、定偏波光ファイバ5が挿入されている。この
定偏波光ファイバ5は、入射端において偏光子3を通し
て励振されたX”方向またはY”方向の直線偏光を補償
用定偏波光ファイバ2に伝送する働き?持つ、そして、
定偏波光ファイバ5は、その主軸が;、a信用定偏波光
ファイバ2の主軸に対して45゜回転するよう己して接
続されており、これにより定偏波光ファイバ2のX”方
向、Y°力方向偏光成分が1:1に励振される。このよ
うに伝送用の定偏波光ファイバ5を用いたことにより遠
隔地でのJ14定が可能となる。
FIG. 2 shows a second embodiment. In this figure, the fixed polarization optical fiber 1 for sensor, the fixed polarization optical fiber 2 for compensation, the polarizer 3, the analyzer 4, and their arrangement are the same as in FIG. 1. However, the compensation polarization constant optical fiber 2 and the polarizer 3
A polarization-constant optical fiber 5 is inserted between the two. This polarization-constant optical fiber 5 serves to transmit linearly polarized light in the X" direction or Y" direction, which is excited through the polarizer 3 at the input end, to the compensation polarization-constant optical fiber 2. have, and
The constant polarization optical fiber 5 is connected so that its main axis rotates by 45 degrees with respect to the main axis of the a-credit constant polarization optical fiber 2, so that the polarization constant optical fiber 2 is rotated in the The polarized light component in the force direction is excited at a ratio of 1:1.By using the constant polarization optical fiber 5 for transmission in this way, J14 constant is possible at a remote location.

第3図は第3の実施例を示す、この実施例では、レーザ
発振器7からの光が偏光分離プリズム6を介して伝送用
定偏波光ファイバ5の一端に入射され、直線偏光が定偏
波光ファイバ5のX”方向またはY”方向へ励振される
。定偏波光フアイバ5体、その主軸が補償用定偏波光フ
ァイバ2の主軸に対して45°回転するようにして、定
偏波光ファイバ2に接続され、これにより定偏波光ファ
イバ2のX′方向、Y′力方向偏光成分が1:IK励振
される。センサ用定偏波光ファイバ1と補償用定偏波光
ファイバ2とは、それらの主軸が互いに90°回転させ
られて接続されていることは第1図および第2図と同様
である。さらにセンサ用定偏波光ファイバlの終端には
AIやAg等の金属によりミラー9が形成され光路を折
り返している。光ファイバ1と光ファイバ2との接続点
が固定部材10により固定され、光ファイバ1の終端が
張力Fで引っ張られ、その張力が測定される。
FIG. 3 shows a third embodiment. In this embodiment, light from a laser oscillator 7 is incident on one end of a transmission polarization-controlled optical fiber 5 through a polarization splitting prism 6, and the linearly polarized light is converted into a fixed-polarization light. The fiber 5 is excited in the X'' direction or Y'' direction. Five fixed polarization optical fibers are connected to the fixed polarization optical fiber 2 so that their main axes are rotated by 45 degrees with respect to the main axis of the fixed polarization optical fiber 2 for compensation, and thereby the X′ direction of the fixed polarization optical fiber 2 is , Y' force direction polarization component is excited by 1:IK. As in FIGS. 1 and 2, the sensor polarization-constant optical fiber 1 and the compensation polarization-constant optical fiber 2 are connected with their principal axes rotated by 90 degrees. Furthermore, a mirror 9 made of metal such as AI or Ag is formed at the end of the polarization-constant optical fiber 1 for the sensor to fold back the optical path. The connection point between optical fiber 1 and optical fiber 2 is fixed by fixing member 10, the terminal end of optical fiber 1 is pulled with tension F, and the tension is measured.

センサ用定偏波光ファイバlに与えられた張力によって
複屈折が変化し、これにより位相差に変化が生じ、ミラ
ー9で反射された光が再び定偏波光ファイバ1.2,5
を伝搬して定偏波光ファイバ5の入射端に戻る。この戻
り光は、最初に入射された偏光と直交する成分となって
いるので、これが偏光分離プリズム6を経て光電変換器
8に送られ、光パワーの変化として観測できる。したが
って、遠隔地より、環境温度の変化の影響を無視できる
程に小さくした、精度の高い、張力測定が可能となる。
The birefringence changes due to the tension applied to the fixed polarization optical fiber 1 for the sensor, which causes a change in the phase difference, and the light reflected by the mirror 9 returns to the fixed polarization optical fiber 1, 2, 5.
is propagated and returns to the input end of the polarization-constant optical fiber 5. Since this returned light has a component orthogonal to the initially incident polarized light, it is sent to the photoelectric converter 8 via the polarization separation prism 6 and can be observed as a change in optical power. Therefore, it is possible to measure tension with high precision from a remote location, with the influence of environmental temperature changes negligible.

つぎに、具体的に、直径125 gm、ビート長が波長
0.633ルmにおいて1.8mmの定偏波光ファイバ
にエポキシ系アクリレートを被覆して外径が400ルm
となっている素線を用いて、第3図のような反射型の光
ファイバセンサを作ってみたので、それについて説明す
る。センサ用定偏波光ファイバlおよび補償用定偏波光
ファイバ2はそれぞれ長さ5cm、伝送用定偏波光ファ
イバ5は長さ10mとし、それらの間は融着接続し、さ
らにその接続部はエポキシ系アクリレートで補強した。
Next, specifically, a fixed polarization optical fiber with a diameter of 125 gm and a beat length of 1.8 mm at a wavelength of 0.633 lm was coated with epoxy acrylate to have an outer diameter of 400 lm.
I made a reflection type optical fiber sensor as shown in Fig. 3 using the strand of wire, so I will explain it. The fixed polarization optical fiber 1 for sensor and the fixed polarization optical fiber 2 for compensation each have a length of 5 cm, and the fixed polarization optical fiber 5 for transmission has a length of 10 m, and they are fusion spliced, and the connection part is made of epoxy resin. Reinforced with acrylate.

一般に定偏波光ファイバを引っ張った場合の位相変化Δ
φは、 Δφ′、(2π/入)・に118OII l・Δezで
表わされる。ここで、BOは室温時のモード複屈折、■
はファイバ長、Δε2は引っ張り歪みの変化であり、K
は定偏波光ファイバの構造パラメータによって定まる定
数であるが、この具体例の場合は18であった。
In general, phase change Δ when pulling a constant polarization optical fiber
φ is expressed as Δφ′, (2π/in)·118OII l·Δez. Here, BO is the mode birefringence at room temperature, ■
is the fiber length, Δε2 is the change in tensile strain, and K
is a constant determined by the structural parameters of the polarization constant optical fiber, and was 18 in this specific example.

そして、実際に張力を測定したところ、2πの位相差を
生じる引っ張り歪みは10−3であった。
When the tension was actually measured, the tensile strain that produced a 2π phase difference was 10-3.

これと同じ変化を生じさせる温度変化は、補償用定偏波
光ファイバ5がない場合14.4℃であり1℃の変化に
対して7%の誤差を生じることになるが、第3図のよう
に補償用定偏波光ファイバ5を接続したことにより0.
1%に抑えることができた。
The temperature change that would cause the same change would be 14.4°C without the compensation polarization-controlled optical fiber 5, which would result in a 7% error for a 1°C change, as shown in Figure 3. By connecting the compensation polarization optical fiber 5 to 0.
We were able to keep it down to 1%.

(へ)効果 この発明によれば、温度、張力、圧力などの種々の物理
力のうち測定対象としたもののみを、非測定対象たる他
の物理力に影響されずに測定することができる。たとえ
ば張力を測定しようとする場合には、周囲環境の温度変
化に影響されず張力のみを測定することができ、適用温
度範囲を拡大できる。このように、使用環境条件などの
制限を除去し、使用範囲の拡大を図ることができる。
(f) Effects According to the present invention, only the physical force to be measured out of various physical forces such as temperature, tension, and pressure can be measured without being influenced by other physical forces that are not to be measured. For example, when measuring tension, only the tension can be measured without being affected by temperature changes in the surrounding environment, and the applicable temperature range can be expanded. In this way, restrictions such as usage environmental conditions can be removed and the range of usage can be expanded.

【図面の簡単な説明】[Brief explanation of the drawing]

ft51図はこの発明の一実施例を示す模式図、第2図
および第3図は他の実施例をそれぞれ示す模式図、第4
図は定偏波光ファイバの一例を示す断面図、第5図は従
来例の模式図である。
ft51 is a schematic diagram showing one embodiment of the present invention, FIGS. 2 and 3 are schematic diagrams showing other embodiments, respectively, and FIG.
The figure is a sectional view showing an example of a constant polarization optical fiber, and FIG. 5 is a schematic diagram of a conventional example.

Claims (1)

【特許請求の範囲】[Claims] (1)定偏波光ファイバに温度、圧力、張力等の物理力
が加わるときその複屈折が変化することを利用して上記
の物理力を測定する光ファイバセンサにおいて、センサ
用定偏波光ファイバと実質的に等しい特性を有する補償
用定偏波光ファイバを、該センサ用定偏波光ファイバに
直交接続し、これらセンサ用定偏波光ファイバと補償用
定偏波光ファイバの両方に加わる測定対象でない物理力
によるセンサ用定偏波光ファイバの複屈折変化を補償用
定偏波光ファイバの複屈折変化で補償し、センサ用定偏
波光ファイバに加わる測定対象たる物理力のみを測定す
るようにしたことを特徴とする光ファイバセンサ。
(1) In an optical fiber sensor that measures the above-mentioned physical forces by utilizing the change in birefringence when physical forces such as temperature, pressure, tension, etc. are applied to a polarization-controlled optical fiber, the polarization-controlled optical fiber for sensors and A compensation polarization constant optical fiber having substantially the same characteristics is orthogonally connected to the sensor polarization constant optical fiber, and a physical force that is not the object of measurement is applied to both the sensor polarization constant optical fiber and the compensation polarization constant optical fiber. The change in birefringence of the fixed polarization optical fiber for the sensor is compensated by the change in birefringence of the fixed polarization optical fiber for compensation, and only the physical force that is the object of measurement that is applied to the fixed polarization optical fiber for the sensor is measured. optical fiber sensor.
JP59169150A 1984-08-13 1984-08-13 Optical fiber sensor Pending JPS6147513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59169150A JPS6147513A (en) 1984-08-13 1984-08-13 Optical fiber sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59169150A JPS6147513A (en) 1984-08-13 1984-08-13 Optical fiber sensor

Publications (1)

Publication Number Publication Date
JPS6147513A true JPS6147513A (en) 1986-03-08

Family

ID=15881208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59169150A Pending JPS6147513A (en) 1984-08-13 1984-08-13 Optical fiber sensor

Country Status (1)

Country Link
JP (1) JPS6147513A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773753A (en) * 1985-09-03 1988-09-27 Daiichi Denshi Kogyo Kabushiki Kaisha Fiber sensor
JPH01158326A (en) * 1987-09-11 1989-06-21 Toshiba Corp Temperature measuring apparatus
US5942750A (en) * 1994-12-16 1999-08-24 Safety-One As Method and device for continuous monitoring of dynamic loads
JP2020085572A (en) * 2018-11-20 2020-06-04 Dmg森精機株式会社 Displacement detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226821A (en) * 1983-05-26 1984-12-20 ジーイーシー ― マルコニ リミテッド Optical detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226821A (en) * 1983-05-26 1984-12-20 ジーイーシー ― マルコニ リミテッド Optical detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773753A (en) * 1985-09-03 1988-09-27 Daiichi Denshi Kogyo Kabushiki Kaisha Fiber sensor
JPH01158326A (en) * 1987-09-11 1989-06-21 Toshiba Corp Temperature measuring apparatus
US5942750A (en) * 1994-12-16 1999-08-24 Safety-One As Method and device for continuous monitoring of dynamic loads
JP2020085572A (en) * 2018-11-20 2020-06-04 Dmg森精機株式会社 Displacement detector
JP2023078475A (en) * 2018-11-20 2023-06-06 Dmg森精機株式会社 Displacement detector

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