JPS6147905B2 - - Google Patents

Info

Publication number
JPS6147905B2
JPS6147905B2 JP58169323A JP16932383A JPS6147905B2 JP S6147905 B2 JPS6147905 B2 JP S6147905B2 JP 58169323 A JP58169323 A JP 58169323A JP 16932383 A JP16932383 A JP 16932383A JP S6147905 B2 JPS6147905 B2 JP S6147905B2
Authority
JP
Japan
Prior art keywords
coating
temperature
tic
carbide
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58169323A
Other languages
Japanese (ja)
Other versions
JPS6063371A (en
Inventor
Shiro Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Fujikoshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi KK filed Critical Fujikoshi KK
Priority to JP16932383A priority Critical patent/JPS6063371A/en
Publication of JPS6063371A publication Critical patent/JPS6063371A/en
Publication of JPS6147905B2 publication Critical patent/JPS6147905B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32Carbides

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は超硬合金、セラミツク鉄鋼製品等とい
つた工具、機械部品の表面へのチタニウムカーバ
イド被覆方法に関する。 チタニウムカーバイド(以下TiC)は高硬度で
耐摩耗性に富み、鋼および超硬合金、サーメツト
等で作られた工具、機械部品の表面に数μ以上の
厚さに被覆することによつて性能向上に役立つて
いることは衆知である。しかしいずれも900℃以
上の高温で処理されている。このため鋼では母材
中の炭素の被膜中の移動による被覆境界部の脱炭
が避けられず、処理前後に浸炭等の処理を講じて
いるが必ずしも充分でない。 又超硬サーメツトではバインダー金属であるコ
バルト又はニツケル等が被膜中に移動拡散し、母
材の性能が低下し、被膜の硬さの低下をまねく原
因となる。 このような理由から被覆温度は低い方が良く、
イオンブレーテイング等物理的蒸着方法も種々提
案され実用化されているが、量産性、均一被覆性
に今一つ欠ける。 これらの理由から下記の目的で検討して到達し
たものである。 (A) 超硬合金、サーメツトにおいてはη相発生防
止と基材の高温劣化防止、および (B) 鉄鋼では処理後の焼入、焼戻し組織の粗大化
防止とTiC膜と母材境界における脱炭防止 におき、鋼については焼鈍温度、超硬サーメツト
では800℃以下が望ましく、この温度以下で実用
性のある被膜を得るべく、処理方法を研究し到達
したものである。 即ち、通常の高温TiC被覆では炭素源としてメ
タン(CH4)、プロパン(C3H8)で代表される炭
化水素を用いるが、その反応は TiCl4+CH4=TiC+4HCl ……(1) TiCl4+1/3C3H8+1.33H2=TiC+4HCl ……(2) では実用性のある被膜は900℃以上の処理温度が
必要である。しかるに本法によるCH3Cl(メチル
クロライド)を炭素源とする被覆では650℃より
TiCが析出する。反応式は TiCl4(g)+CH3Cl(g)+1/2H2 =TiC(s)+5HCl ……(3) △GT゜=570℃ と化学量論的な考察としてその生成反応の自由エ
ネルギーの変化を算出比較すれば(第1図参照)
840〓(567℃)前後で△GT゜=0となり、この
温度以上よりTiCを生成する可能性がある。実際
には650℃前後で明らかにTiCの析出が見られる
が、生産性があり実用可能被膜は700℃以上であ
つた。又、900℃以上ではCH3Clが被覆炉内のガ
ス導入口付近で急速に分解し、炉内の製品位置に
よるコーテイングむらを生ずるので700〜900℃が
適当な処理温度であつた。CH4、C3H8の実用上
処理温度の下限を200℃以上も低下させることが
出来た。 又参考としてのC2H2(アセチレン)は炉内で
のすすの発生が激しく、製品面にスーチング発生
し、△GT゜=0がCH3Clと類似温度であつて
も、高温における反応駆動力(△GT゜の変化
量)が小さく不適当であつた。 本法に使用するCH3Clの濃度は処理温度によつ
て下記に調整したが効果的である。例えばTiCl41
容(ガス)に対し 650〜700℃ CH3Cl 2〜3容 750〜900℃ 〃 1〜2〃 と処理温度が高い程少なくすることが望ましく、 超硬合金、サーメツト 700〜800℃ 鉄 鋼 750〜850℃ の処理温度が最適である。 又、雰囲気ガスとしてH2(水素)、又はH2とア
ルゴン(Ar)又はヘリウム(He)との混合が適
切であり、これらの混合ガスの割合は70%以下
(Ar又はHe)が望ましく、低炭素鋼(C0.6以
下)のコーテイングに効果がある。 しかしながらこれらのガスは高温であり、普通
はH2雰囲気が経済的である。 実施例 (i) 条 件
The present invention relates to a method for coating titanium carbide on the surfaces of tools and machine parts such as cemented carbide, ceramic steel products, etc. Titanium carbide (TiC) has high hardness and wear resistance, and can improve performance by coating the surface of tools and machine parts made of steel, cemented carbide, cermet, etc. to a thickness of several micrometers or more. It is common knowledge that it is useful. However, all of them are processed at high temperatures of over 900℃. For this reason, in the case of steel, decarburization at the coating boundary due to movement of carbon in the base metal through the coating cannot be avoided, and although treatments such as carburization are taken before and after treatment, they are not always sufficient. Furthermore, in the case of carbide cermets, the binder metal such as cobalt or nickel moves and diffuses into the coating, reducing the performance of the base material and causing a decrease in the hardness of the coating. For this reason, the lower the coating temperature, the better.
Various physical vapor deposition methods such as ion brating have been proposed and put into practical use, but they lack mass productivity and uniform coverage. For these reasons, we have studied and arrived at the following objectives. (A) Prevention of η phase generation and high-temperature deterioration of the base material in cemented carbide and cermet, and (B) Prevention of coarsening of the quenched and tempered structure after treatment and decarburization at the boundary between the TiC film and the base material in steel. In order to prevent this, the annealing temperature for steel and 800°C or lower for carbide cermets is desirable, and we have arrived at this by researching a processing method to obtain a practical coating at this temperature or lower. That is, in normal high-temperature TiC coating, hydrocarbons such as methane (CH 4 ) and propane (C 3 H 8 ) are used as carbon sources, but the reaction is TiCl 4 + CH 4 = TiC + 4HCl... (1) TiCl 4 +1/3C 3 H 8 +1.33H 2 =TiC+4HCl... (2) Therefore, a practical coating requires a treatment temperature of 900°C or higher. However, with the coating using CH 3 Cl (methyl chloride) as the carbon source by this method, the temperature is higher than 650℃.
TiC precipitates. The reaction formula is TiCl 4 (g) + CH 3 Cl (g) + 1/2H 2 = TiC (s) + 5HCl ... (3) △GT゜ = 570℃, and as a stoichiometric consideration, the free energy of the formation reaction is If you calculate and compare the changes (see Figure 1)
△GT゜=0 at around 840〓 (567℃), and there is a possibility that TiC will be generated above this temperature. In reality, TiC precipitation was clearly seen at around 650°C, but a productive and practical coating was obtained at temperatures above 700°C. Furthermore, at temperatures above 900°C, CH 3 Cl rapidly decomposes near the gas inlet in the coating furnace, causing uneven coating depending on the position of the product in the furnace, so 700 to 900°C was the appropriate treatment temperature. We were able to lower the lower limit of the practical treatment temperature for CH 4 and C 3 H 8 by more than 200°C. In addition, C 2 H 2 (acetylene) used as a reference generates a lot of soot in the furnace, sooting occurs on the product surface, and even though △GT゜=0 is similar to CH 3 Cl, the reaction drive at high temperatures is The force (amount of change in △GT°) was small and inappropriate. The concentration of CH 3 Cl used in this method was adjusted as shown below depending on the treatment temperature, but it was found to be effective. For example TiCl 4 1
650-700℃ for volume (gas) CH 3 Cl 2-3 volumes 750-900℃ 〃 1-2〃 It is desirable to reduce the amount as the processing temperature increases. Cemented carbide, cermet 700-800℃ Iron Steel 750 Processing temperatures of ~850°C are optimal. In addition, H 2 (hydrogen) or a mixture of H 2 and argon (Ar) or helium (He) is suitable as the atmospheric gas, and the proportion of these mixed gases is preferably 70% or less (Ar or He). Effective for coating low carbon steel (C0.6 or less). However, these gases have high temperatures and a H 2 atmosphere is usually economical. Example (i) Conditions

【表】 (ii) 処理結果 Γ超硬スロアウエーチツプ(P30タイプ)で
は、被覆厚さ6〜8μ 被膜硬さHv2800〜3400(荷重50gr)、膜中へ
のCoの拡散、η相の発生がない(Photo1) Γ鋼、SUJ2SKH55では被膜厚さ7〜10μ 被膜硬さHv3000〜3400であつた。 (iii) 試験結果(第2図参照) Γ超硬;切削条件を図中に示した本法の被覆を
することにより超硬TiCコートでは非コー
トの8倍、1000℃コートの約2.0倍の切削
性能の向上が見られた。 ΓSUJ2;被膜後標準熱処理を施した砥石アダ
プター(耐摩部品)で非コートの5倍の性
能向上があつた。 ΓSKH55;アンダーハード熱処理を施したピ
アツシングパンチ(母材硬さHRC63±1
゜)は3〜5倍の性能向上をはかることが
できた。 尚本法に依るTiCを基礎被膜としてTiCN、
TiNαAl2O3等の多層被覆を構成することが可能
であり、且つ有効である。
[Table] (ii) Treatment results For the Γ carbide throw-away chip (P30 type), the coating thickness was 6 to 8μ, the coating hardness was Hv2800 to 3400 (load 50gr), Co was diffused into the film, and the η phase was generated. None (Photo 1) For Γ steel and SUJ2SKH55, the coating thickness was 7 to 10μ and the coating hardness was Hv3000 to 3400. (iii) Test results (see Figure 2) Γ Carbide: Cutting conditions are shown in the figure. By coating with this method, the carbide TiC coating has a cutting speed 8 times that of the non-coating, and approximately 2.0 times that of the 1000℃ coating. An improvement in cutting performance was observed. ΓSUJ2: The grinding wheel adapter (wear-resistant part) that was subjected to standard heat treatment after coating showed a 5 times improvement in performance compared to the uncoated one. ΓSKH55; Piercing punch with under hard heat treatment (base material hardness HRC63±1)
゜) was able to improve performance by 3 to 5 times. In addition, TiCN using TiC according to this method as a basic coating,
It is possible and effective to construct multilayer coatings such as TiNαAl 2 O 3 .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は温度と生成反応の自由エネルギーの変
化とを示すグラフ、第2図は本発明の方法で被覆
した工具チツプと従来製品との切削性能の比較を
示すグラフである。
FIG. 1 is a graph showing changes in temperature and free energy of the formation reaction, and FIG. 2 is a graph showing a comparison of cutting performance between a tool tip coated by the method of the present invention and a conventional product.

Claims (1)

【特許請求の範囲】[Claims] 1 水素、または水素とアルゴンまたはヘリウム
との混合ガス、を雰囲気ガスとして、チタンカー
バイドの炭素源としてメチルクロライド
(CH3Cl)ガスを、チタン源としてハロゲン化チ
タンガスを使用し、温度約700℃乃至900℃で加熱
してチタニウムカーバイド被覆をすることを特徴
とするチタニウムカーバイド被覆方法。
1 Using hydrogen or a mixed gas of hydrogen and argon or helium as the atmospheric gas, methyl chloride (CH 3 Cl) gas as the carbon source for titanium carbide, and titanium halide gas as the titanium source, at a temperature of approximately 700°C. A titanium carbide coating method characterized by coating titanium carbide by heating at a temperature of 900°C to 900°C.
JP16932383A 1983-09-16 1983-09-16 Method for coating titanium carbide Granted JPS6063371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16932383A JPS6063371A (en) 1983-09-16 1983-09-16 Method for coating titanium carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16932383A JPS6063371A (en) 1983-09-16 1983-09-16 Method for coating titanium carbide

Publications (2)

Publication Number Publication Date
JPS6063371A JPS6063371A (en) 1985-04-11
JPS6147905B2 true JPS6147905B2 (en) 1986-10-21

Family

ID=15884413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16932383A Granted JPS6063371A (en) 1983-09-16 1983-09-16 Method for coating titanium carbide

Country Status (1)

Country Link
JP (1) JPS6063371A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8579768B2 (en) 2007-05-08 2013-11-12 Nike, Inc. Training ladder formed with polygon segments

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424914A (en) * 1977-07-27 1979-02-24 Tokyo Shibaura Electric Co Method of making ceramic sintered body

Also Published As

Publication number Publication date
JPS6063371A (en) 1985-04-11

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