JPS6148210B2 - - Google Patents

Info

Publication number
JPS6148210B2
JPS6148210B2 JP56031332A JP3133281A JPS6148210B2 JP S6148210 B2 JPS6148210 B2 JP S6148210B2 JP 56031332 A JP56031332 A JP 56031332A JP 3133281 A JP3133281 A JP 3133281A JP S6148210 B2 JPS6148210 B2 JP S6148210B2
Authority
JP
Japan
Prior art keywords
sample
electron microscope
scanning electron
partition plate
positively charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56031332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57147857A (en
Inventor
Koichi Kanetani
Kiichi Hojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56031332A priority Critical patent/JPS57147857A/ja
Publication of JPS57147857A publication Critical patent/JPS57147857A/ja
Publication of JPS6148210B2 publication Critical patent/JPS6148210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP56031332A 1981-03-06 1981-03-06 Sample observation through scanning electron microscope Granted JPS57147857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56031332A JPS57147857A (en) 1981-03-06 1981-03-06 Sample observation through scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56031332A JPS57147857A (en) 1981-03-06 1981-03-06 Sample observation through scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS57147857A JPS57147857A (en) 1982-09-11
JPS6148210B2 true JPS6148210B2 (de) 1986-10-23

Family

ID=12328297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56031332A Granted JPS57147857A (en) 1981-03-06 1981-03-06 Sample observation through scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57147857A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6172363B1 (en) 1996-03-05 2001-01-09 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
US7241993B2 (en) 2000-06-27 2007-07-10 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
JP4629207B2 (ja) * 2000-10-20 2011-02-09 株式会社ホロン マスク検査装置
US6627884B2 (en) 2001-03-19 2003-09-30 Kla-Tencor Technologies Corporation Simultaneous flooding and inspection for charge control in an electron beam inspection machine
EP1978355B1 (de) * 2006-01-20 2016-07-27 Hitachi High-Technologies Corporation Verfahren zur probenbeobachtung mit flüssigem medium zur vermeidung von aufladung in einem elektronen-mikroskop
EP2755225B1 (de) * 2011-09-09 2017-05-10 Japan Science and Technology Agency Elektronenmikroskopisches untersuchungsverfahren zur untersuchung einer lebenden biologischen probe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127981A (ja) * 1974-09-02 1976-03-09 Mitsui Shipbuilding Eng Jikubarikikei

Also Published As

Publication number Publication date
JPS57147857A (en) 1982-09-11

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