JPS6148417A - シリコン溶融炉 - Google Patents

シリコン溶融炉

Info

Publication number: JPS6148417A
Authority: JP; Japan
Prior art keywords: mold module; preparation chamber; mold; discharging; intake
Prior art date: 1984-08-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP17133384A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0314770B2 (2

Inventor

Takeyuki Matsuyama

松山　岳之

Ichiro Hide

一郎秀

Takashi Yokoyama

敬志横山

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hoxan Corp

Hoxan Co Ltd

Original Assignee

Hoxan Corp

Hoxan Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-08-17

Filing date

1984-08-17

Publication date

1986-03-10

1984-08-17 Application filed by Hoxan Corp, Hoxan Co Ltd filed Critical Hoxan Corp

1984-08-17 Priority to JP17133384A priority Critical patent/JPS6148417A/ja

1986-03-10 Publication of JPS6148417A publication Critical patent/JPS6148417A/ja

1991-02-27 Publication of JPH0314770B2 publication Critical patent/JPH0314770B2/ja

Status Granted legal-status Critical Current

Links

229910052710 silicon Inorganic materials 0.000 title claims abstract description 30
239000010703 silicon Substances 0.000 title claims abstract description 30
238000002844 melting Methods 0.000 title claims description 14
230000008018 melting Effects 0.000 title claims description 14
238000002360 preparation method Methods 0.000 claims abstract description 56
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
238000000034 method Methods 0.000 claims abstract description 11
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 7
230000007246 mechanism Effects 0.000 claims description 26
238000002347 injection Methods 0.000 claims description 12
239000007924 injection Substances 0.000 claims description 12
239000012298 atmosphere Substances 0.000 claims description 8
238000001125 extrusion Methods 0.000 claims description 5
239000011261 inert gas Substances 0.000 claims description 5
238000010309 melting process Methods 0.000 claims 1
230000007723 transport mechanism Effects 0.000 claims 1
229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 4
238000007789 sealing Methods 0.000 abstract description 2
238000007599 discharging Methods 0.000 abstract 8
238000000605 extraction Methods 0.000 description 17
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
239000007789 gas Substances 0.000 description 11
230000003028 elevating effect Effects 0.000 description 9
229910052786 argon Inorganic materials 0.000 description 8
238000004519 manufacturing process Methods 0.000 description 5
235000012431 wafers Nutrition 0.000 description 5
238000010438 heat treatment Methods 0.000 description 4
230000000149 penetrating effect Effects 0.000 description 4
229920000049 Carbon (fiber) Polymers 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
239000004917 carbon fiber Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
239000011810 insulating material Substances 0.000 description 2
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
101710085718 Defensin-like protein 3 Proteins 0.000 description 1
239000012300 argon atmosphere Substances 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
235000009508 confectionery Nutrition 0.000 description 1
238000001816 cooling Methods 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000011835 investigation Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
238000012544 monitoring process Methods 0.000 description 1
238000000465 moulding Methods 0.000 description 1
239000002994 raw material Substances 0.000 description 1

Landscapes

Silicon Compounds (AREA)

JP17133384A 1984-08-17 1984-08-17 シリコン溶融炉 Granted JPS6148417A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP17133384A JPS6148417A (ja)	1984-08-17	1984-08-17	シリコン溶融炉

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP17133384A JPS6148417A (ja)	1984-08-17	1984-08-17	シリコン溶融炉

Publications (2)

Publication Number	Publication Date
JPS6148417A true JPS6148417A (ja)	1986-03-10
JPH0314770B2 JPH0314770B2 (2)	1991-02-27

Family

ID=15921281

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP17133384A Granted JPS6148417A (ja)	1984-08-17	1984-08-17	シリコン溶融炉

Country Status (1)

Country	Link
JP (1)	JPS6148417A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH04347635A (ja) *	1991-05-25	1992-12-02	Think Lab Kk	ロータリースクリーンの製造方法

1984
- 1984-08-17 JP JP17133384A patent/JPS6148417A/ja active Granted

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH04347635A (ja) *	1991-05-25	1992-12-02	Think Lab Kk	ロータリースクリーンの製造方法

Also Published As

Publication number	Publication date
JPH0314770B2 (2)	1991-02-27

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Legal Events

Date	Code	Title	Description
2004-08-17	EXPY	Cancellation because of completion of term