JPS6150759U - - Google Patents
Info
- Publication number
- JPS6150759U JPS6150759U JP13414684U JP13414684U JPS6150759U JP S6150759 U JPS6150759 U JP S6150759U JP 13414684 U JP13414684 U JP 13414684U JP 13414684 U JP13414684 U JP 13414684U JP S6150759 U JPS6150759 U JP S6150759U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- opening
- reaction tube
- buffer portion
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414684U JPS6150759U (mo) | 1984-09-04 | 1984-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414684U JPS6150759U (mo) | 1984-09-04 | 1984-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150759U true JPS6150759U (mo) | 1986-04-05 |
Family
ID=30692666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13414684U Pending JPS6150759U (mo) | 1984-09-04 | 1984-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150759U (mo) |
-
1984
- 1984-09-04 JP JP13414684U patent/JPS6150759U/ja active Pending
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