JPS6151513U - - Google Patents

Info

Publication number
JPS6151513U
JPS6151513U JP13713784U JP13713784U JPS6151513U JP S6151513 U JPS6151513 U JP S6151513U JP 13713784 U JP13713784 U JP 13713784U JP 13713784 U JP13713784 U JP 13713784U JP S6151513 U JPS6151513 U JP S6151513U
Authority
JP
Japan
Prior art keywords
stage
pair
auxiliary
actuator
elastic deformation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13713784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435928Y2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13713784U priority Critical patent/JPH0435928Y2/ja
Publication of JPS6151513U publication Critical patent/JPS6151513U/ja
Application granted granted Critical
Publication of JPH0435928Y2 publication Critical patent/JPH0435928Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP13713784U 1984-09-10 1984-09-10 Expired JPH0435928Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13713784U JPH0435928Y2 (2) 1984-09-10 1984-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13713784U JPH0435928Y2 (2) 1984-09-10 1984-09-10

Publications (2)

Publication Number Publication Date
JPS6151513U true JPS6151513U (2) 1986-04-07
JPH0435928Y2 JPH0435928Y2 (2) 1992-08-25

Family

ID=30695555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13713784U Expired JPH0435928Y2 (2) 1984-09-10 1984-09-10

Country Status (1)

Country Link
JP (1) JPH0435928Y2 (2)

Also Published As

Publication number Publication date
JPH0435928Y2 (2) 1992-08-25

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