JPS615280B2 - - Google Patents
Info
- Publication number
- JPS615280B2 JPS615280B2 JP55081138A JP8113880A JPS615280B2 JP S615280 B2 JPS615280 B2 JP S615280B2 JP 55081138 A JP55081138 A JP 55081138A JP 8113880 A JP8113880 A JP 8113880A JP S615280 B2 JPS615280 B2 JP S615280B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8113880A JPS577100A (en) | 1980-06-16 | 1980-06-16 | Plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8113880A JPS577100A (en) | 1980-06-16 | 1980-06-16 | Plasma generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS577100A JPS577100A (en) | 1982-01-14 |
| JPS615280B2 true JPS615280B2 (ja) | 1986-02-17 |
Family
ID=13738035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8113880A Granted JPS577100A (en) | 1980-06-16 | 1980-06-16 | Plasma generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS577100A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1301938A2 (en) * | 2000-07-06 | 2003-04-16 | Applied Materials, Inc. | A plasma reactor having a symmetric parallel conductor coil antenna |
-
1980
- 1980-06-16 JP JP8113880A patent/JPS577100A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS577100A (en) | 1982-01-14 |