JPS6155372U - - Google Patents

Info

Publication number
JPS6155372U
JPS6155372U JP14095984U JP14095984U JPS6155372U JP S6155372 U JPS6155372 U JP S6155372U JP 14095984 U JP14095984 U JP 14095984U JP 14095984 U JP14095984 U JP 14095984U JP S6155372 U JPS6155372 U JP S6155372U
Authority
JP
Japan
Prior art keywords
frame chamber
supply
exhaust pipe
printed circuit
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14095984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14095984U priority Critical patent/JPS6155372U/ja
Publication of JPS6155372U publication Critical patent/JPS6155372U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係るプリント基板の真空乾
燥装置の１実施例の系統図、第２図は他の実施例
の系統図、第３図は従来の装置の系統図を示す。 １…外枠チヤンバ、２…給排気配管、３…真空
ポンプ、４…分岐管、５…真空破壊弁、６…プリ
ント基板、７…空気流出入空間、８…空気吸込口
、９…内枠チヤンバ、１０…ＨＥＰＡフイルタ。

Claims (1)

    【実用新案登録請求の範囲】
  1. プリント基板を収容して複数個の空気吸込口を
    有する内枠チヤンバと、この内枠チヤンバを一定
    の間隔を隔てて包含する外枠チヤンバと、この外
    枠チヤンバに接続するＨＥＰＡフイルタと、この
    ＨＥＰＡフイルタに接続する給排気配管と、この
    給排気配管に接続する真空ポンプと、前記給排気
    配管より分岐する分岐管と、この分岐管に接続す
    る真空破壊弁とより成ることを特徴とするプリン
    ト基板の真空乾燥装置。
JP14095984U 1984-09-18 1984-09-18 Pending JPS6155372U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14095984U JPS6155372U (ja) 1984-09-18 1984-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14095984U JPS6155372U (ja) 1984-09-18 1984-09-18

Publications (1)

Publication Number Publication Date
JPS6155372U true JPS6155372U (ja) 1986-04-14

Family

ID=30699300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14095984U Pending JPS6155372U (ja) 1984-09-18 1984-09-18

Country Status (1)

Country Link
JP (1) JPS6155372U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995016173A1 (en) * 1993-12-11 1995-06-15 Sinyung Company Ltd. Heat accumulating type vacuum drying machine for dung of domestic animal
WO2001095682A1 (en) * 2000-06-08 2001-12-13 Matsushita Electric Industrial Co., Ltd. Method and device for drying materials and method of producing circuit boards using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995016173A1 (en) * 1993-12-11 1995-06-15 Sinyung Company Ltd. Heat accumulating type vacuum drying machine for dung of domestic animal
WO2001095682A1 (en) * 2000-06-08 2001-12-13 Matsushita Electric Industrial Co., Ltd. Method and device for drying materials and method of producing circuit boards using the same

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