JPS6158985U - - Google Patents
Info
- Publication number
- JPS6158985U JPS6158985U JP14085784U JP14085784U JPS6158985U JP S6158985 U JPS6158985 U JP S6158985U JP 14085784 U JP14085784 U JP 14085784U JP 14085784 U JP14085784 U JP 14085784U JP S6158985 U JPS6158985 U JP S6158985U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bonded together
- molecular pump
- diffusion bonding
- stacking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14085784U JPS6158985U (sr) | 1984-09-19 | 1984-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14085784U JPS6158985U (sr) | 1984-09-19 | 1984-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6158985U true JPS6158985U (sr) | 1986-04-21 |
Family
ID=30699200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14085784U Pending JPS6158985U (sr) | 1984-09-19 | 1984-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6158985U (sr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015062909A1 (de) * | 2013-10-28 | 2015-05-07 | Oerlikon Leybold Vacuum Gmbh | Trägerelement für rohrelemente einer holweckstufe |
-
1984
- 1984-09-19 JP JP14085784U patent/JPS6158985U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015062909A1 (de) * | 2013-10-28 | 2015-05-07 | Oerlikon Leybold Vacuum Gmbh | Trägerelement für rohrelemente einer holweckstufe |
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