JPS6163404A - How to punch holes in ceramic green sheets - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a method for punching holes in a sheet material, particularly for forming π holes (through holes) in a ceramic green sheet for a ceramic multilayer substrate. Concerning a hole punching method.

[Background of the invention]

In semiconductor packaging technology, ceramic multilayer substrates formed from ceramic green sheets and provided with through holes and conductive gold patterns are well known. The through holes in the ceramic green sheet are punched with a mechanical punching device (punch) having a large number of very small punching elements, which are very fragile and subject to wear from the ceramic particles of the green sheet. Also.

In particular, this can lead to the inconvenience of blockage of the punched hole by the punched material, which often prevents the conductive material from completing the conductive path and can sometimes form an open circuit. . In order to eliminate this inconvenience, we forcibly blow away the small pieces of material mechanically punched out from the ceramic green sheet with a punch.

The small piece returns to the formed through hole and seals the hole.
A device has been devised to prevent this from occurring (Japanese Patent Application Laid-Open No. 58-59800). but.

Although this device is somewhat effective from the perspective of eliminating hole clogging, the hole PT can also be used to blow out small pieces by adjusting the air flow according to the position of the tie piece IC and punch of the punching device.
The equipment to create ft "t" must be provided.

Equipment losses of 1-high were unavoidable. Also, to simplify this, punch out small pieces of material.

There is also a method of suctioning from the entire bottom surface of the tie piece using a vacuum suction device, but this method is not always effective enough due to the viscosity of the small pieces, and it still does not solve the problem of clogging the holes in the clean sheet. is the current situation.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for punching holes in a ceramic green sheet without clogging the holes without installing complicated and expensive additional equipment.

[Summary of the Invention] A major cause of hole clogging is that during punching work using a hole punching device, small pieces of the green sheet punched out by the downward movement of the punch remain attached to the punch as the punch enters the upward movement. Since the diameter of the six is small, the punch may descend to punch the hole, and the seal 81 will close when the hole is punched.
Due to the viscosity of the particles, they may not be able to be removed completely from the hole, and may end up being attached as small pieces around the hole. As a result of various studies as a countermeasure against such factors, it has been found that double striking is extremely effective. Just do the same thing as hitting it once. 5!1. Simply repeating the punching operation twice at the same position on the green sheet will double the punching time.

Therefore, the present invention provides a punching device with a double function and minimizes the amount of vertical movement of the punch, thereby reducing the increase in punching time. That is, this can be explained schematically by the correspondence between the vertical movement position of the punch and the horizontal movement position of the green sheet.
Figure 4 shows the situation of a simple one-time punch, where 71 to zJ indicating the vertical movement position of the punch are specified, Z fl is the initial position, ZI is the standby position of the punch, Z7 is the top dead center of the punch, Assuming that Z4 is the same top dead center and Zl is the lowest point possible on the device, punching is performed by reciprocating the punch between Z2 and 23. In other words, punch or 2. (When in standing lay, Green Sea 1 moves in the direction of water/■i force, and when that movement is completed, it descends to Punch or Z, and 1
．． After that, if you want to hit 52 degrees by returning to Z7, the reciprocating movement of z7-4 Z, → z2 will be repeated 2 times as shown in Figure 5.
The Hanamoto concept of the present invention is that the parameter Z1. for double hitting is as shown in FIG. Add between Z7 and 74 1,
2 punches. , move the green sheet horizontally, and when the movement is finished, move the punch from Z2 to Z□.
→z1. Move vertically →Z, →Z2. Zl, is Z,
Since the cent is inserted between and Z, it is possible to shorten the punching time in the case of double punching. In addition,
The movement process of the punch is shown by the symbol CL1→(S1→...).

[Embodiments of the invention]

Ceramic mounting plate is generally used for Ceramic Clean Sea 1-
The casting process, through-hole drilling process, through-hole conductor filling process, button printing process, lamination bonding process, outline cutting process, and sintering process are manufactured.

Among these, the punching device used in the through-hole punching process is explained with reference to FIG.
And it is set on the arm 3 of the device by a guide pin 4. For making holes, a punch 5 is attached to a punch plate 6 attached to an upper die plate 7. The punching operation is
The stripper plate 8 descends and presses the green sheet 1, and then the punch plate 6 descends, so that the punch 5 is attached to the lower die plate 9 and the die pieces 10
The tie will be held down in the sixth. At this time, arm 3 is
YIP IIl Kakeru! It can be moved to any position on the X-axis and Y-axis by the FII mounting 11, and the punch plate 6
can be moved to any position on the Z axis by the Z 1ill drive device 12, and positioning is performed by numerical control while detecting pulses from the motor that drives it. In addition, 13 is a guide boss such as the upper die plate 7,
14 and 15 are stoppers, 16 is a stripper plate 8
These stoppers are provided to prevent over-operation of the device and to ensure safety. Furthermore, if necessary, a suction device 17 for sucking up small pieces (extraction scraps) of the clean sheet is provided.

When punching is performed once as needed using a punching device, the vertical position of the punch 5 is adjusted as described above.
That is, i sword rank 1vi 7. It is sufficient to calculate the descending position from , , by calculating the parameters Z, .about.Z4. For example, Z
, =48.65mm, Z, =48.75mm, z
,=51.75III11. Z4=51.80InI
There is a punch at the position of Z, = 48.75mm for I+.

When the arm 3 is set in the horizontal position, the punch 5 punches a hole in the clean sheet 1 by 3 mm down to 24"51, 75 mm, and then returns to the position Z. The setting should be made so that there is a sufficient distance between the punch and the green sheet, taking into account the time to move in the direction.

In addition to the above Z1 to Z4, parameters Z1. I'll get it. If Z, ~Z4 are the same as in the case of the single strike above, Z represents the position where the punch 5 is pulled up during the second strike operation at the same position on the clean sheet, so the position of the punch 5 is The tip is green sea 1-
It is sufficient to be slightly forward from the surface of the surface. Now, if the distance between the green sheet 1 and the die piece 10 is 0.1 mm, the Vl (distance) that the punch inserts into the tie piece is 0, 5111111, and the green sheet is 25 mm, then Z5 is 0.1 + 0 from Z.
．． 5 + 0.25 = 0.85mm higher position, in this example Z5 = 21 - 0.85 = 50°90
Set to mm. In other words, the arm 3 moves horizontally to determine the position of the hole at Z, = 48.75mm, and after that, it drops 3mm to Z, 51.75mm and punches a hole in the green sheet. Z,=50.
It rises once to 90mm and then goes back to 2. =5], descend to 75mm, then punch out the hole and return to 75mm.

The position of such a punch depends on the motor that drives the punch (
(not shown) and is determined by numerical control according to a predetermined procedure.

Figure 2 shows the control command procedure, including information on whether to strike twice or once and the vertical position of the punch 71-2.
D
ATA 1 to DATA N are manually input, and while decoding this data, operation commands are given to the punching device.

At this time, the amount of movement of the green sheet in the XY axis directions and the amount of movement of the punch 5 in the Z direction are MOVE X, Y, MOVE
+5 is obtained by the Z command, and the pulse of the 1 driving device is controlled by comparing it with the pulse of the driving device.

FIG. 3 shows an outline of the entire system in which a punching device and a control device are connected, and a dust collector is added as necessary.

〔Effect of the invention〕

According to the method and apparatus of the present invention, it is possible to prevent holes in the green sheet from clogging without providing a special suction device, and it is also possible to avoid prolonging one working time, which helps to reduce the number of man-hours required for drilling holes.

[Brief explanation of the drawing]

Fig. 1 shows a ceramic green sheet punching device according to an embodiment of the present invention, Fig. 2 shows a correspondence diagram of the control command procedure of the control device and the operation of the punching device, and Fig. 3 shows the punching device of the present invention including the control device. Overall diagram, Figure 4 is an explanatory diagram of the operation of one-time striking, Figure 5 is an explanatory diagram of the conventional double-stroke operation, and Figure 6
The figure is an explanatory diagram of the double-strike operation of the present invention. l...ceramic green sheet, 2...frame. 3... Arm, 4... Guide pin, 5...
・Punch. 6... Punch plate, 7... Upper die plate. 8... Stripper plate, 9... Lower die plate, ■0... Die piece, 11... XY axis drive device, 12... Z 4++ll drive device, 13
...Guide post 1-514.15.16... All stoppers, 17... Suction device. Figure 3 赳 4 [4 13f ding konkyoku ip Figure 5 Chūshun Wholesale, . 0 (乃−yν+〕

Claims (1)

[Claims] (1) Move the ceramic green sheet in the X-axis and Y-axis directions to a predetermined position, then lower the hole punch from at least the top dead center on the Z axis to penetrate the sheet and bring it to the bottom dead center. In the method for punching holes in the sheet, in which the sheet is raised to the top dead center after reaching the top dead center, and the lowering and rising steps are repeated at least twice, the raised position of the punch is lower than the top dead center except for the last raised position. A method for punching holes in a ceramic green sheet, characterized by positioning.