JPS6166945U - - Google Patents
Info
- Publication number
- JPS6166945U JPS6166945U JP15244784U JP15244784U JPS6166945U JP S6166945 U JPS6166945 U JP S6166945U JP 15244784 U JP15244784 U JP 15244784U JP 15244784 U JP15244784 U JP 15244784U JP S6166945 U JPS6166945 U JP S6166945U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- side wall
- holding groove
- holding
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案に係るウエハキヤリアの一実
施例を示す説明図である。
１０…ウエハキヤリア、１１，１２，１３，１
４…側壁、１１１，１２１…突脈、１１２，１２
２…保持溝、２０…ウエハ。
FIG. 1 is an explanatory diagram showing an embodiment of a wafer carrier according to this invention. 10...Wafer carrier, 11, 12, 13, 1
4... Side wall, 111, 121... Ridge, 112, 12
2... Holding groove, 20... Wafer.
Claims (1)
いて、前記ウエハを保持すべき保持溝が形成され
た側壁を、少なくとも前記ウエハの直径の約１．
５倍以上の高さにすると共に前記保持溝も前記側
壁に連通して形成され、前記ウエハを収納した状
態でウエハの表面側に位置する側壁を所定形状開
口したことを特徴とするウエハキヤリア。 In a wafer carrier that accommodates a plurality of wafers, the side wall in which the holding groove for holding the wafer is formed is at least about 1.0 mm in diameter of the wafer.
A wafer carrier characterized in that the holding groove has a height of five times or more and is formed to communicate with the side wall, and the side wall located on the front side of the wafer is opened in a predetermined shape when the wafer is housed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244784U JPS6166945U (en) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244784U JPS6166945U (en) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166945U true JPS6166945U (en) | 1986-05-08 |
Family
ID=30710508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15244784U Pending JPS6166945U (en) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166945U (en) |
-
1984
- 1984-10-09 JP JP15244784U patent/JPS6166945U/ja active Pending